Absolute pressure sensing with bipolar corona discharge: Design, simulation and experimental validation

Abstract

In this paper we present, for the first time, a reliable cost-effective absolute pressure sensor based on a novel bipolar corona system, which monitors pressure by producing both polarities of corona discharge simultaneously. The unique setup increases sensitivity and stability of the sensor. Systematical design study, numerical simulation and experiment of five prototypes acquired consistent results. With sub-microampere operating current, the sensors have temperature-independent sensitivity and good repeatability.