Elasto-optic modulator integrated in high frequency piezoelectric MEMS resonator

Abstract

This paper presents a new type of MEMS-based optical modulator, which operates on the elasto-optic effect. The device consists of a photonic racetrack resonator embedded into a laterally-vibrating piezoelectric resonator for strain to be transferred. This constitutes the first demonstration of a MEMS strain-based optomechanical device in which the operation is based on refractive index changes due to the elasto-optic effect rather than conventional physical displacements. Optical modulation is observed at the device resonance frequency of 843 MHz. The device could be used for signal modulation in RF-Photonic systems. As an example of such applications, an elasto-optic based electronic oscillator is also demonstrated.