一种新型的0 - 3kpa压阻压力传感器

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI:10.1109/MEMSYS.2016.7421754

Taotao Guan, Fang Yang, Wei Wang, Xian Huang, Boyan Jiang, Jun He, Li Zhang, F. Fu, Dan Li, Ruipei Li, Qian Zhao, Dacheng Zhang

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引用次数: 4

摘要

本文报道了一种新型的高灵敏度和线性度0-3千帕的压阻式压力传感器，该传感器仔细地权衡了光束边缘的应力和传感隔膜的挠度。为了提高压阻式压力传感器的灵敏度和线性度，首次提出了一种可调结构膜片(SSD)。在0-3 kPa的压力范围内，传感器的灵敏度为4.72 mV/kPa/V，非线性为0.18% FSO(满量程输出)。与之前的工作相比，灵敏度提高了28.3%，而非线性降低了50%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A novel 0–3 kPa piezoresistive pressure sensor based on a shuriken-structured diaphragm

This paper reported a novel high sensitivity and linearity 0-3 kPa piezoresistive pressure sensor by carefully trading off the stress on the beam edge and the deflection of the sensing diaphragm. A shuriken-structured diaphragm (SSD) was proposed for the first time to improve both sensitivity and linearity for the piezoresistive pressure sensor. The fabricated sensor showed a sensitivity of 4.72 mV/kPa/V and a nonlinearity of 0.18% FSO (full scale output) in the pressure range of 0-3 kPa. Compared with our previous work, the sensitivity was increased by 28.3%, while the nonlinearity was reduced by 50%.

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来源期刊

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

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