集成在高频压电MEMS谐振器中的弹光调制器

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2016-02-29 DOI:10.1109/MEMSYS.2016.7421544

Siddhartha Ghosh, G. Piazza

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引用次数: 2

摘要

本文提出了一种利用弹性光效应的新型mems光调制器。该装置由嵌入横向振动压电谐振器中的光子赛道谐振器组成，用于传递应变。这是基于MEMS应变的光机械装置的首次演示，该装置的操作是基于由于弹性光学效应而不是传统的物理位移引起的折射率变化。在器件谐振频率843 MHz处观察到光调制。该器件可用于射频光子系统的信号调制。作为此类应用的一个例子，还演示了基于弹性光学的电子振荡器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Elasto-optic modulator integrated in high frequency piezoelectric MEMS resonator

This paper presents a new type of MEMS-based optical modulator, which operates on the elasto-optic effect. The device consists of a photonic racetrack resonator embedded into a laterally-vibrating piezoelectric resonator for strain to be transferred. This constitutes the first demonstration of a MEMS strain-based optomechanical device in which the operation is based on refractive index changes due to the elasto-optic effect rather than conventional physical displacements. Optical modulation is observed at the device resonance frequency of 843 MHz. The device could be used for signal modulation in RF-Photonic systems. As an example of such applications, an elasto-optic based electronic oscillator is also demonstrated.

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2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

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