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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Flexible organic leds with parylene thin films for biological implants 生物植入用聚对二甲苯薄膜柔性有机发光二极管
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433128
T. Yamamura, M. Kitamura, K. Kuribayashi, Y. Arakawa, S. Takeuchi
{"title":"Flexible organic leds with parylene thin films for biological implants","authors":"T. Yamamura, M. Kitamura, K. Kuribayashi, Y. Arakawa, S. Takeuchi","doi":"10.1109/MEMSYS.2007.4433128","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433128","url":null,"abstract":"This paper describes an ultra thin, flexible device with organic light emitting diodes (OLEDs) between Parylene thin films (20 mum or less in total thickness). The device was formed on a glass substrate and could be easily peeled off without breaking. The OLEDs in the flexible device emitted light with high brightness, and were useful as excitation light sources for fluorescent dyes. We have also demonstrated a flexible probe with an OLED for the application of biological implants toward in vivo fluorescent imaging and optical stimulation of cells.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78093929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
3 dimensionally combined pyrolyzed polymer sensor and heater toward all polymeric gas detection system 面向全聚合物气体检测系统的三维组合热解聚合物传感器和加热器
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433027
O. Jeong, S. Konishi
{"title":"3 dimensionally combined pyrolyzed polymer sensor and heater toward all polymeric gas detection system","authors":"O. Jeong, S. Konishi","doi":"10.1109/MEMSYS.2007.4433027","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433027","url":null,"abstract":"This paper proposes for the first time all polymeric gas detection system consisting of the 3 dimensionally combined carbon structures and the gas regulator with the three-stage pneumatic valves. The pyrolyzed photo-resist structure as an absorbent of nitrogen dioxide sensor and 3D bridge-type resistive heater are fabricated and assembled with the gas regulator. The valve efficiency of the gas regulator and the sensitivity of the gas sensor to NO2 are characterized.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75945438","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Microsystems for UV-visible and x-ray analysis of protein crystals 用于蛋白质晶体紫外可见和x射线分析的微系统
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433161
L. Cheung, R. Quick, S.K. Singh, A. Weichsel, W. Montfort, Y. Zohar
{"title":"Microsystems for UV-visible and x-ray analysis of protein crystals","authors":"L. Cheung, R. Quick, S.K. Singh, A. Weichsel, W. Montfort, Y. Zohar","doi":"10.1109/MEMSYS.2007.4433161","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433161","url":null,"abstract":"polydimethylsiloxane (PDMS) based microsystems have successfully been fabricated and characterized for studying protein crystals utilizing both UV-visible spectroscopy and X-ray crystallography. Transmittance tests have been conducted with PDMS and glass substrates; the measurements indicate that in PDMS, unlike glass, the emerging intensity is higher than 50% of the incident intensity as long as the total optical path is shorter than 100 mum. Indeed, both the UV-visible spectrum and X-ray diffraction of a protein crystal enclosed in a PDMS device are almost identical to those of the crystal alone. Hence, PDMS is suitable as substrate material in device fabrication to study protein crystals. In glass, however, the UV-visible spectrum is significantly distorted and the X-ray diffraction pattern is rather weak resulting in poor signal to noise ratio. Furthermore, microsystems integrated with micro- channels allowing continuous exchange of buffer solution around the protein crystals have been tested; this would greatly enhance the potential to induce, trap and characterize functional states in proteins.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73753510","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Continuous and regulated organic micro bubble generation using lumped gas and organic injected junction 连续和调节有机微气泡的产生使用集中气体和有机注入结
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433157
T. Yamamoto, T. Arakawa, S. Shoji
{"title":"Continuous and regulated organic micro bubble generation using lumped gas and organic injected junction","authors":"T. Yamamoto, T. Arakawa, S. Shoji","doi":"10.1109/MEMSYS.2007.4433157","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433157","url":null,"abstract":"Continuous and regulated micro bubble generation system was realized in a water flow microchannel including a lumped gas and organic injection junction. The idea was originated in the soap bubble formation. The diameter and thickness of organic micro bubble were well controlled by the flow rates of water and organic respectively. The controllable diameter of the bubble was ranged from 110 mum to 220 mum, while its thickness from 4 mum to 16 mum. The generation rate is mainly dependant on the water flow rate. The organic phase membrane is useful for the chemical reaction media. The organic bubbles are expected to be used as capsules of reactive gas handling.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81643047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Chemical sensor utilizing indium phosphide cantilevers and pentacene as a functionalization layer 化学传感器利用磷化铟悬臂梁和并五苯作为功能化层
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433111
N. Siwak, X. Fan, D. Hines, E. Williams, N. Goldsman, R. Ghodssi
{"title":"Chemical sensor utilizing indium phosphide cantilevers and pentacene as a functionalization layer","authors":"N. Siwak, X. Fan, D. Hines, E. Williams, N. Goldsman, R. Ghodssi","doi":"10.1109/MEMSYS.2007.4433111","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433111","url":null,"abstract":"We present a MEMS cantilever waveguide resonator sensing platform utilizing a novel optical readout scheme and the organic semiconductor pentacene as a surface functionalization layer. Detection of vapor by way of mass induced frequency shift is demonstrated. Frequency shifts due to mass absorption of 509 and 236 Hz were measured to plusmn85 Hz corresponding to a sensitivity of plusmn0.507 pg. The III-V Indium Phosphide (InP) material enables passive waveguides and active optical components to be monolithically integrated, yielding single-chip sensors in the future.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81795681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Highly reliable and extremely stable SiGe micro-mirrors 高度可靠和极其稳定的SiGe微镜
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433173
M. Gromova, L. Haspeslagh, A. Verbist, B. du Bois, R. Van Hoof, B. Eyckens, B. Sijmus, I. De Wolf, V. Simons, P. Mutter, T. Lauwagie, M. Willegems, S. Locorotondo, W. Boullart, K. Baert, A. Witvrouw
{"title":"Highly reliable and extremely stable SiGe micro-mirrors","authors":"M. Gromova, L. Haspeslagh, A. Verbist, B. du Bois, R. Van Hoof, B. Eyckens, B. Sijmus, I. De Wolf, V. Simons, P. Mutter, T. Lauwagie, M. Willegems, S. Locorotondo, W. Boullart, K. Baert, A. Witvrouw","doi":"10.1109/MEMSYS.2007.4433173","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433173","url":null,"abstract":"This paper presents very reliable and stable micro- mirrors made of hydrogenated microcrystalline SiGe (muc-SiGe:H) at temperatures that would allow processing above standard CMOS circuitry. Very flat micro-mirrors with sizes ranging between 7.5 x 7.5 and 16 x 16 mum2 size and submicron hinges are fabricated. No hinge creep is observed over a period of 20 days and no fatigue damage is seen after 5 x 1010 cycles.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85992035","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Dynamic characterization of nano oscillators by atomic force microscopy 纳米振荡器的原子力显微镜动力学表征
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433023
B. Ilic, S. Krylov, L. Bellan, H. Craighead
{"title":"Dynamic characterization of nano oscillators by atomic force microscopy","authors":"B. Ilic, S. Krylov, L. Bellan, H. Craighead","doi":"10.1109/MEMSYS.2007.4433023","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433023","url":null,"abstract":"We report on the dynamic quantitative characterization of nanoelectromechanical systems (NEMS) through direct coupling with a micromechanical (MEMS) probe. The nanomechanical structures were driven using piezoelectric transducers and the resulting out-of-plane vibrations were monitored with a conventional commercially available atomic force microscope (AFM) probe. Intermittent contact imaging data and non-contact AFM interrogation revealed the initiation of interaction between the two oscillators, providing a description of the resonant response. The vibrational spectra measured through optical detection was in good agreement with the coupled NEMS-AFM system measurement results. The dynamic response of the coupled system was modelled through a combination of long range van der Waals and contact forces using the Derjaguin-Muller-Toporov model.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86098257","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
In-channel particle position and velocity detectors based on particle transit time across uneven inter-gap electrodes 基于粒子在不均匀间隙电极间传递时间的通道内粒子位置和速度检测器
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433077
Tae Yoon Kim, Dong Woo Lee, Young‐Ho Cho
{"title":"In-channel particle position and velocity detectors based on particle transit time across uneven inter-gap electrodes","authors":"Tae Yoon Kim, Dong Woo Lee, Young‐Ho Cho","doi":"10.1109/MEMSYS.2007.4433077","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433077","url":null,"abstract":"We present the first proposal to detect both particle position and velocity based on the electrical measurement of particle transit time across uneven inter-gap electrodes. Compared to the previous methods, the present detector provides higher integrability for chip-based systems and achieves higher measurement stability robust to particle size variation. The position uncertainty of polystyrene particles is measured as 3.3%. Particle velocity uncertainty is measured as 2.21% from the fabricated devices, achieving 2.4 times improvement compared to the uncertainty of 5.38% from the conventional optical methods. The stable performance of the present detector insensitive to particle size variation is also verified by the experiments using different particle sizes.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85277966","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels 半圆形表面通道上平面集成传感器结构的小型化流量传感器
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433031
Marcel Dijkstra, M. D. de Boer, M.J.W. Berenschot, T. Lammerink, R. Wiegerink, M. Elwenspoek
{"title":"Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels","authors":"Marcel Dijkstra, M. D. de Boer, M.J.W. Berenschot, T. Lammerink, R. Wiegerink, M. Elwenspoek","doi":"10.1109/MEMSYS.2007.4433031","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433031","url":null,"abstract":"A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nlmin-1 up to 300 nlmin-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91007149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 24
Fabrication of vertical comb electrodes using selective anodic bonding 利用选择性阳极键合技术制备垂直梳状电极
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433107
Sangwoo Lee, J. Cho, K. Najafi
{"title":"Fabrication of vertical comb electrodes using selective anodic bonding","authors":"Sangwoo Lee, J. Cho, K. Najafi","doi":"10.1109/MEMSYS.2007.4433107","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433107","url":null,"abstract":"This paper presents a new fabrication technology for forming vertical comb (VC) electrodes used in sensors and actuators. The main feature of VC electrodes is that they are positioned above and below the plane of a moving microstructure that is used as the sensing or actuating plate, thus enabling one to either measure or create out-of-plane motion. In our method, VC electrodes and the moving microstructure are first fabricated using the silicon-on-glass (SOG) process. Next, the VC electrodes are moved into position by selectively displacing them up or down using electrostatic force applied during an anodic bonding step specifically utilized for this purpose. Three different VC electrode designs and analytic approaches to determine mechanical stiffness and required pull-down force are presented. VC structures with both 8mum and 4.6mum gaps to glass wafers are successfully fabricated. VC electrodes with vertical (out of plane) displacement of as large as 45mum in 100mum-thick structure have been realized.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81183160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
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