化学传感器利用磷化铟悬臂梁和并五苯作为功能化层

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI:10.1109/MEMSYS.2007.4433111

N. Siwak, X. Fan, D. Hines, E. Williams, N. Goldsman, R. Ghodssi

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引用次数: 6

摘要

我们提出了一个MEMS悬臂波导谐振器传感平台，利用一种新的光学读出方案和有机半导体并五苯作为表面功能化层。演示了用质量诱发频移法检测蒸汽。由于509和236 Hz的质量吸收导致的频率漂移被测量到plusmn85 Hz，对应于plusmn0.507 pg的灵敏度。III-V磷化铟(InP)材料使无源波导和有源光学元件能够单片集成，在未来产生单芯片传感器。

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Chemical sensor utilizing indium phosphide cantilevers and pentacene as a functionalization layer

We present a MEMS cantilever waveguide resonator sensing platform utilizing a novel optical readout scheme and the organic semiconductor pentacene as a surface functionalization layer. Detection of vapor by way of mass induced frequency shift is demonstrated. Frequency shifts due to mass absorption of 509 and 236 Hz were measured to plusmn85 Hz corresponding to a sensitivity of plusmn0.507 pg. The III-V Indium Phosphide (InP) material enables passive waveguides and active optical components to be monolithically integrated, yielding single-chip sensors in the future.

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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

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