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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Process compensated micromechanical resonators 过程补偿微机械谐振器
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-12-11 DOI: 10.1109/MEMSYS.2007.4432960
G. K. Ho, J. Perng, F. Ayazi
{"title":"Process compensated micromechanical resonators","authors":"G. K. Ho, J. Perng, F. Ayazi","doi":"10.1109/MEMSYS.2007.4432960","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432960","url":null,"abstract":"Manufacturability and yield are the major challenges prior to adoption of micromechanical resonators as frequency references. In this paper, a design for manufacturability (DFM) technique to achieve absolute frequency accuracy is presented. Non-idealities of a deep reactive ion etching process are examined and determined to be random. The variations in resonator geometry are assumed to be locally systematic and are represented as a process bias. The effect of process bias on resonator center frequency is modeled and the procedure for optimizing for zero sensitivity is explained. Process bias on a 10 MHz optimized design was replicated with electron-beam lithography and supporting data demonstrating DFM is reported.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84390267","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
3D integration of heterogeneous MEMS structures by stamping transfer 异质MEMS结构的冲压转移三维集成
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-12-01 DOI: 10.1109/MEMSYS.2007.4433045
H. Onoe, E. Iwase, K. Matsumoto, I. Shimoyama
{"title":"3D integration of heterogeneous MEMS structures by stamping transfer","authors":"H. Onoe, E. Iwase, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2007.4433045","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433045","url":null,"abstract":"We propose an integration method of heterogeneous micro-electro-mechanical-system (MEMS) structures by liftoff and stamping transfer using a poly-(dimethylsiloxane) (PDMS) sheet. Silicon structures fabricated on multiple wafers were lifted off by PDMS sheets, and integrated onto a single wafer by the stamping transfer with high yield (>90%) and high accuracy (position error <500 nm). A two-dimensional (2D) integration and three-dimensional (3D) assembly of pyramid-like/inverted pyramid-like structures were demonstrated by our method. These demonstrations prove that our method enables us to integrate process-incompatible heterogeneous MEMS structures onto a single wafer.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88450256","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Electrochromic voxel array for 3D display 用于三维显示的电致变色体素阵列
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-12-01 DOI: 10.1109/MEMSYS.2007.4433087
S. Murao, S. Takamatsu, B. Nguyen, E. Iwase, K. Matsumoto, I. Shimoyama
{"title":"Electrochromic voxel array for 3D display","authors":"S. Murao, S. Takamatsu, B. Nguyen, E. Iwase, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2007.4433087","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433087","url":null,"abstract":"We developed an electrochromic voxel array for realizing a three-dimensional (3D) display. A voxel is a unit of 3D graphic data just as a pixel of 2D data. The color of voxels is tuned not by their light emission but by their light absorption in the same way as the coloration of things in the real world. Our voxels consist of ITO electrodes on glass substrates and 1 mm cubes of an UV-curing polymer coated with electrochromic material which can change its color electrically. We utilized poly-(3,4-ethylenedioxy- thiophene):polystyrenesulfonate (PEDOT:PSS) as the electrochromic material. Our voxel array and its Al counter electrode were soaked in CaCl2 solution. Voxels were operated with a very low voltage of about 1.0 V We demonstrated a 4x4 voxel array, and the color change of the voxels was observed not only in the top view but also in the side view.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74605004","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid 通过在液体上直接沉积聚对二甲苯而制成的电驱动变焦微透镜
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-12-01 DOI: 10.1109/MEMSYS.2007.4433059
B. Nguyen, E. Iwase, K. Matsumoto, I. Shimoyama
{"title":"Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid","authors":"B. Nguyen, E. Iwase, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2007.4433059","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433059","url":null,"abstract":"The design and fabrication process of an electrically-driven varifocal liquid microlens are reported with experimental measurement results and a theoretical calculation model. Droplets of oil are sandwitched between a glass wafer and a thin-film of parylene chemical vapor deposited (CVD) directly onto the droplets' liquid surface. A method for creating fluid-filled micro chambers was realized with two core steps: 1) placing-shaping of oil droplets with hydrophobic/hydrophilic patterns and 2) coating them with a thin CVD parylene film in high vacuum condition. Liquid lenses and lens arrays of diameter from 20 mum to 10 mm were fabricated. In the tuning experiment, focal length was shortened to 20% of its initial value, from 3.8 mm to 0.8 mm. The values calculated from model match the data collected from experiments within the range of applied voltage from 0 V to 150 V.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91292507","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 20
A novel scanning Thermal Microscopy System 一种新型扫描热显微镜系统
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-12-01 DOI: 10.1109/MEMSYS.2007.4433123
K. Tanaka, H. Kuwano, S. Nagasawa, T. Ono
{"title":"A novel scanning Thermal Microscopy System","authors":"K. Tanaka, H. Kuwano, S. Nagasawa, T. Ono","doi":"10.1109/MEMSYS.2007.4433123","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433123","url":null,"abstract":"This paper describes a concept, fabrication and evaluation of a novel nano-meter scale scanning thermal microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73777629","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Photodynamic perforation of cell membrane on Micro Channel Array toward intracellular technology 基于微通道阵列的细胞膜光动力穿孔技术
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-12-01 DOI: 10.1109/MEMSYS.2007.4433067
K. Iso, T. Saito, H. Muguruma, H. Tabata, S. Konishi
{"title":"Photodynamic perforation of cell membrane on Micro Channel Array toward intracellular technology","authors":"K. Iso, T. Saito, H. Muguruma, H. Tabata, S. Konishi","doi":"10.1109/MEMSYS.2007.4433067","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433067","url":null,"abstract":"This paper reports the design, fabrication, and experimental results for a micro channel array (MCA)-based photodynamic cell perforator toward intracellular technology. The perforator will be developed to improve whole-cell patch-clamp technique. The perforator consists of planar micro channels and electrodes of the MCA. The perforator utilizes the micro channel for both cell suction and chemical supply. The diameter of the micro channel is Phi2 mum. The photosensitizer (PS) is introduced to the cell membrane through the micro channel, and then the cell membrane is perforated photodynamically by activated PS. Photodynamic perforation of the cell membrane performed successfully in the experiment using PC12 cells with diameters as small as tens of mum.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79997343","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Pyrolyzed polymer mesh electrode integrated into fluidic channel for gate type sensor 热分解聚合物网状电极集成到栅极式传感器的流体通道中
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-12-01 DOI: 10.1109/MEMSYS.2007.4432966
K. Yamamoto, K. Naka, Y. Nagaura, H. Sato, S. Shoji, S. Konishi
{"title":"Pyrolyzed polymer mesh electrode integrated into fluidic channel for gate type sensor","authors":"K. Yamamoto, K. Naka, Y. Nagaura, H. Sato, S. Shoji, S. Konishi","doi":"10.1109/MEMSYS.2007.4432966","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432966","url":null,"abstract":"This paper presents a novel means of introducing conductive pyrolyzed polymer structures into a muTAS platform. Insulation structures of polymer materials can be transformed into conductive structures through pyrolysis, and MEMS structures consisting of pyrolyzed polymer can be formed by a dual process of micromachining and pyrolysis. This work focuses on gate type sensing by a three-dimensional pyrolyzed polymer electrode. The three-dimensional SU-8 original structure was micromachined by multi-angle inclined lithography. Three-dimensional structures of pyrolyzed SU-8, which have meshes of 10 mum times 20 mum in dimension, could be obtained by pyrolysis in N2 atmosphere. Furthermore, the structures were integrated into the SU-8 fluidic channel with the 100 mum in height and 200 mum in width by a post-pyrolysis process. We will demonstrate the cross sectional sensing in electrochemical detection by making the best use of the three-dimensional mesh structure to overcome the restriction of planar electrode.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76184552","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
High aspect ratio nano-scale CFX structures fabricated by deep-rie 用deep-rie制备高纵横比纳米级CFX结构
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-12-01 DOI: 10.1109/MEMSYS.2007.4432970
T. Arakawa, H. Kusakawa, S. Shoji
{"title":"High aspect ratio nano-scale CFX structures fabricated by deep-rie","authors":"T. Arakawa, H. Kusakawa, S. Shoji","doi":"10.1109/MEMSYS.2007.4432970","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432970","url":null,"abstract":"High aspect ratio (>500) nano-scale CFx (fluorocarbon) \"tube\" and \"test-tube\" arrays were realized using Deep Reactive Ion Etching (RIE). Sidewall CFx nano structures of 200 nm in thickness formed during Deep RIE passivation process were used for the purpose. The film thickness of CFx was controlled from 200 nm to 500 nm, and the height more than 100 mum was available. As a result, the aspect ratio is larger than 500. This fluorocarbon tube and test-tube array are useful tools for chemical and biological applications.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73982442","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fully integrated three dimensional sound intensity sensor 完全集成三维声强传感器
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-21 DOI: 10.1109/MEMSYS.2007.4433010
D. Yntema, R. Wiegerink, J.W. van Ffonschoten, M. Elwenspoek
{"title":"Fully integrated three dimensional sound intensity sensor","authors":"D. Yntema, R. Wiegerink, J.W. van Ffonschoten, M. Elwenspoek","doi":"10.1109/MEMSYS.2007.4433010","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433010","url":null,"abstract":"For the first time, a complete 3-dimensional sound intensity sensor - consisting of 4 particle velocity sensors and a pressure microphone - has been integrated on a single chip, providing the possibility to do nearly point measurements of acoustic particle velocity, sound pressure, and therefore sound intensity. Principally the sensor consists of two distinct designs; a pressure sensor and particle velocity sensors. In this paper the design of the sensor, fabrication and measurement results are discussed and compared with theoretical results.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76696595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
The serial dilution chip for cytotoxicity and cell differentiation test 用于细胞毒性和细胞分化试验的串联稀释芯片
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433118
Choong Kim, Kangsun Lee, Sung-Shin Ryu, K.S. Shin, Kyu-Jung Lee, Tae Song Kim, J. Kang
{"title":"The serial dilution chip for cytotoxicity and cell differentiation test","authors":"Choong Kim, Kangsun Lee, Sung-Shin Ryu, K.S. Shin, Kyu-Jung Lee, Tae Song Kim, J. Kang","doi":"10.1109/MEMSYS.2007.4433118","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433118","url":null,"abstract":"This paper proposes two types of serial dilution devices for linear and logarithmic concentration gradient. The designs of serial dilution chips were based on the adjustment of flow rate to obtain desired dilution ratio, so that they are not affected by molecular size, flow rate, and diffusion length. The performance of linear dilution chip was verified by image analysis of diluted tryphane blue solution as well as by cytotoxicity test. The analysis of the color intensity indicated that the tryphane blue solution was diluted in linear scale, which was in good agreement with the theoretical value. The percentage of viable cells linearly increased with the concentration of PFA and the standard deviation was within 0.05%. Also, the experiment of logarithmic dilution chip demonstrated that the concentrations of outlet was logarithmically linear, regardless of the variation of flow rates and was in accordance with that of dilution by manual pipetting.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75221742","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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