一种新型扫描热显微镜系统

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-12-01 DOI:10.1109/MEMSYS.2007.4433123

K. Tanaka, H. Kuwano, S. Nagasawa, T. Ono

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引用次数: 2

摘要

本文介绍了一种新型纳米级扫描热显微系统的概念、制作和评价。本研究的目的是实现一种非接触式SThM系统。在我们的系统中，测量探头由一个热释电探测器和一个具有高横向分辨率孔径的红外线屏蔽膜组成。结果表明，成功地制备了热释电探测器(PZT)和带孔屏蔽膜。

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A novel scanning Thermal Microscopy System

This paper describes a concept, fabrication and evaluation of a novel nano-meter scale scanning thermal microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.

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来源期刊

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

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