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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Silicon carbide coated MEMS strain sensor for harsh environment applications 用于恶劣环境应用的碳化硅涂层MEMS应变传感器
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433166
R. Azevedo, Jingchun Zhang, D.G. Jones, D. R. Myers, A. Jog, B. Jamshidi, M. Wijesundara, R. Maboudian, A. Pisano
{"title":"Silicon carbide coated MEMS strain sensor for harsh environment applications","authors":"R. Azevedo, Jingchun Zhang, D.G. Jones, D. R. Myers, A. Jog, B. Jamshidi, M. Wijesundara, R. Maboudian, A. Pisano","doi":"10.1109/MEMSYS.2007.4433166","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433166","url":null,"abstract":"We present poly-SiC coating and subsequent operation of a Si-based double-ended tuning fork (DETF) resonant strain sensor fabricated in the Bosch commercial foundry process. The coating is applied post release and, hence, has minimal impact on the front end of the microfabrication process. The deposition thickness of nanometer-thin SiC coating was optimized to provide enhanced corrosion resistance to silicon MEMS without compromising the electrical and mechanical performance of the original device. The coated DETF achieves a strain resolution of 0.2 mue in a 10 Hz to 20 kHz bandwidth, which is comparable to the uncoated device. The coated DETF is locally heated with an IR lamp and is shown to operate up to 190 degC in air with a temperature sensitivity of -7.6 Hz/degC. The devices are also dipped in KOH at 80 degC for 5 minutes without etching the structures, confirming the poly-SiC coating provides a sufficient chemical barrier to the underlying silicon. The results demonstrate that SiC-coated poly-Si devices are an effective bridge between poly-Si and full poly-SiC films for applications requiring a high level of corrosion resistance and moderate operating temperatures (up to 200 degC) without compromising the performance characteristics of the original poly-Si device.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73046194","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 34
Micro-mechanical external-cavity laser with wide tuning range 宽调谐范围的微机械外腔激光器
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433090
E. Geerlings, M. Rattunde, J. Schmitz, G. Kaufel, J. Wagner, D. Kallweit, H. Zappe
{"title":"Micro-mechanical external-cavity laser with wide tuning range","authors":"E. Geerlings, M. Rattunde, J. Schmitz, G. Kaufel, J. Wagner, D. Kallweit, H. Zappe","doi":"10.1109/MEMSYS.2007.4433090","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433090","url":null,"abstract":"We report on GaSb-based quantum-well diode lasers in a micro-machined external cavity setup using the Littrow configuration. An electrostatically-actuated silicon- grating, optimized to achieve a wide tuning range in the 2.3 mum wavelength range, is used as tuning element. A tuning range of 82 nm could be realized. The maximum output power of the micro external cavity laser (muECL) was above 15 mW over the entire tuning range.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72726083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Retro-reflection VOA using parabolic mirror for low insertion loss and linear attenuation relationship 反射式VOA采用抛物面反射镜，插入损耗低，衰减呈线性关系
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433089
X.M. Zhang, A. Liu, H. Cai, A. Yu
{"title":"Retro-reflection VOA using parabolic mirror for low insertion loss and linear attenuation relationship","authors":"X.M. Zhang, A. Liu, H. Cai, A. Yu","doi":"10.1109/MEMSYS.2007.4433089","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433089","url":null,"abstract":"This paper reports a new design of MEMS variable optical attenuator (VOA) that makes use of a pair of parabolic mirrors as the retro-reflector in the horizontal plane and a normal fiber as the rod lens to focus in the vertical plane. It is advantageous over the conventional co-axial VOAs since it allows the fibers to be arranged in parallel and is thus convenient for the packaging. The parabolic mirrors improve the optical coupling and yield an insertion loss of only 1.4 dB even when only the normally-cleaved single mode fibers are used. The attenuation can go up to 63 dB when the mirror pair is rotated by 2.6 degrees. More importantly, a linear relationship is well maintained over the whole range, unlike the nonlinear relationship in many conventional VOAs. At the 20-dB level, the VOA measures a PDL of 0.2 dB and a WDL of 0.5 dB, which are superior to the typically values of 1-2 dB in the conventional VOAs.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74857339","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Integrated fabrication of a micro methanol reformer and a hydrogen peroxide heat source 微型甲醇重整器和过氧化氢热源的集成制造
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433183
Taegyu Kim, Sejin Kwon
{"title":"Integrated fabrication of a micro methanol reformer and a hydrogen peroxide heat source","authors":"Taegyu Kim, Sejin Kwon","doi":"10.1109/MEMSYS.2007.4433183","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433183","url":null,"abstract":"This paper presents the design, fabrication and evaluation of a micro methanol reformer complete with a heat source. The micro system consists of the steam reforming reactor of methanol, the catalytic decomposition reactor of hydrogen peroxide, and a heat exchanger between the two reactors. In the present study, catalytic decomposition of hydrogen peroxide is used as a process to supply heat to the reforming reactor. The fabrication process integrated with the catalyst loading process is developed. The performance of the methanol steam reforming system was measured at various test conditions and the optimum operation condition was sought.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77255078","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging 碳纳米管在超锋利硅纳米尖上的高产接枝:力学表征和原子力显微镜成像
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433179
A. Rollier, C. Bernard, S. Marsaudon, A. Bonnot, Marc Faucher, J. Aimé, Bernard Legrand, Dominique Collard, L. Buchaillot
{"title":"High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging","authors":"A. Rollier, C. Bernard, S. Marsaudon, A. Bonnot, Marc Faucher, J. Aimé, Bernard Legrand, Dominique Collard, L. Buchaillot","doi":"10.1109/MEMSYS.2007.4433179","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433179","url":null,"abstract":"The novelty of this work lies in the fabrication of nanotips without any facet allowing the high yield of robust carbon nanotube (CNT) grafting for atomic force microscopy (AFM) experiments.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75024492","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A micro planar coil for local high resolution magnetic resonance imaging 用于局部高分辨率磁共振成像的微平面线圈
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433156
H. Takahashi, T. Dohi, K. Matsumoto, I. Shimoyama
{"title":"A micro planar coil for local high resolution magnetic resonance imaging","authors":"H. Takahashi, T. Dohi, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2007.4433156","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433156","url":null,"abstract":"This paper reports on a flexible micro planar coil for an MR (Magnetic Resonance) catheter. High resolution images can be obtained by using the MR catheter. Two types of coils of 5 mm and 20 mm in diameter were fabricated. Both of the coils were designed to have inductance of 1.0 muH at 8.5 MHz. The proto-type MR catheters were made by attaching the micro coils to the tip of acrylic pipes. In order to evaluate the MR catheters, the sensitive area and SNR (Signal to Noise Ratio) were measured. SNRs of the MR catheters were about three to eight times higher than that of a standard medical coil. Furthermore, we demonstrated that high resolution MR images can be achieved by using the MR catheters. MR images of a gumbo (Abelmoschus esculentus) were acquired with 0.5 x 0.5 x 1.0 mm3 resolution. While clear MR images were not able to be taken by the standard medical coil due to its low SNR, we were able to observe the gumbo and distinguished its seeds one by one in the MR images taken by the MR catheters.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84047051","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
Tunable light grating integrated with high-voltage driver IC for image projection display 可调谐光栅集成高压驱动IC用于图像投影显示
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433037
K. Takahashi, H. Fujita, H. Toshiyoshi, K. Suzuki, H. Funaki, K. Itaya
{"title":"Tunable light grating integrated with high-voltage driver IC for image projection display","authors":"K. Takahashi, H. Fujita, H. Toshiyoshi, K. Suzuki, H. Funaki, K. Itaya","doi":"10.1109/MEMSYS.2007.4433037","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433037","url":null,"abstract":"This paper presents a monolithic integration technique of MEMS grating light valves with high-voltage (40 V) driver circuits that target for image projection display devices. Driver circuits were prepared on an 8-mum-thick SOI (Silicon-on- Insulator) wafer by the DMO S (Double-diffused Metal Oxide Semiconductor) processes, after which the MEMS grating were integrated in the identical SOI layer by post-processing using the DRIE (Deep Reactive Ion Etching). In our work, optical light angle is modulated by changing the period of the MEMS grating pixel by means of electrostatic actuation. Optical diffraction angles of 6.6deg (OFF-state) and 3.3 deg (ON-State) were obtained with drive voltage of 0 V and 40 V, respectively.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78336326","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
DNA transformation by local heat shock 局部热休克的DNA转化
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433152
Sha Li, L. M. Anderson, Liwei Lin, Haw Yang
{"title":"DNA transformation by local heat shock","authors":"Sha Li, L. M. Anderson, Liwei Lin, Haw Yang","doi":"10.1109/MEMSYS.2007.4433152","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433152","url":null,"abstract":"DNA transformation by local heat shock using a MEMS device has been successfully demonstrated using an on-chip micro heater and corresponding microfluidic system. The transformation experiments have been conducted and 200% improvement in transformation efficiency was shown as compared with control tests using conventional methodology. Moreover, the green fluorescent proteins expressed from the transformed DNA in cells were verified under a fluorescence microscope, showing all cells grown from antibiotic selection after transformation have transformed DNA working correctly as expected. As such, this work complements other on-going lab-on-a- chip researches for possible gene cloning, gene therapy, and protein expression applications.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78352626","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Fabrication of microchannels with patterned bio-active layers 具有图案生物活性层的微通道的制备
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433066
R. Iwama, Lap Man Lee, E. S. Cho, Y. Zohar
{"title":"Fabrication of microchannels with patterned bio-active layers","authors":"R. Iwama, Lap Man Lee, E. S. Cho, Y. Zohar","doi":"10.1109/MEMSYS.2007.4433066","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433066","url":null,"abstract":"Patterns of bio-active coatings on the inner surfaces of microchannels have been realized using a novel low-temperature, UV-epoxy glass-to-silicon bonding technique. Sucrose is applied as a protection layer for the immobilized bio-functional films during the bonding step. The bio-functional layer is composed of antibody patterns, for binding specific targets, next to polyethylene glycol (PEG) coated regions for preventing non-specific absorption. The activity of the patterned bio layer is tested, after the removal of the sucrose protection layer, utilizing fluorescent microscopy. A solution of fluorescent-labelled antigens is injected into the microchannels for incubation with the immobilized antibodies. Upon exposure to proper radiation, light is emitted only from the antibody patterns while the PEG regions remain dark. Hence, the sucrose-protection and UV-bonding techniques have not significantly compromised the functionality of the patterned antibodies, in binding to their counter receptors, and PEG molecules, in preventing non-specific adsorption, at the end of the fabrication process.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78068941","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Zinc-air microbattery with electrode array of zinc microposts 锌微柱电极阵列的锌-空气微电池
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433097
F. Chamran, Hong-seok Min, B. Dunn, C. Kim
{"title":"Zinc-air microbattery with electrode array of zinc microposts","authors":"F. Chamran, Hong-seok Min, B. Dunn, C. Kim","doi":"10.1109/MEMSYS.2007.4433097","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433097","url":null,"abstract":"We report the first successful development of a high performance MEMS-fabricated zinc-air microbattery. The key feature of this battery is the 3-dimensional architecture of the zinc electrode, which consists of an array of high aspect ratio microposts. This design efficiently increases the surface area of the zinc electrode and improves the performance of the battery at high discharge rates. The superior performance over commercially available batteries is demonstrated through high discharge rate tests as well as powering a real device. A surface-mounted LED was integrated into the microbattery package as the device, and the illumination of the LED was monitored during the discharge.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72877308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
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