2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献_第3页

Low-power electrostatic microthruster for propulsion based on helmholtz-resonance 基于亥姆霍兹共振的低功率静电微推力器

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433032

Hanseup Kim, A. J'auregui, C. Morrison, K. Najafi, L. Bernal, P. Washabaugh

{"title":"Low-power electrostatic microthruster for propulsion based on helmholtz-resonance","authors":"Hanseup Kim, A. J'auregui, C. Morrison, K. Najafi, L. Bernal, P. Washabaugh","doi":"10.1109/MEMSYS.2007.4433032","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433032","url":null,"abstract":"This paper reports the development of a low-power electrostatic microthruster based-on Helmholtz resonance. This fluidic resonance phenomenon is utilized to create high-speed jets of air for thrust generation. The microthruster contains a curved-electrode (~8.8 mum deep) and provides high force to, and large deflection of a vibrating membrane thus resulting in twice higher thrust performance than previously reported devices with a flat-electrode design. The out-of-plane curved electrode is formed on a silicon wafer through the controlled buckling of stressed thin films of oxide, poly silicon, and nitride. The fabricated device contains 25 microthrusters, has a footprint of 1.6 times1.6 times 0.1 cm3 , and weighs about 0.35 g. It operates using a 140 V and 70 kHz sinusoidal signal and produces: 1) thrust of 55.6 muN, 2) maximum air velocity of 1.2 m/s, and 3) average velocity of 1.0 m/s across the whole chip. The average power consumption of the 25 micro thruster array is 3.1 mW. The generated jet was visualized by pumping ethanol clouds into a vertical gas stream up to 12 cm.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"9 1","pages":"127-130"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87573010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 5

Biodegradable polymer needle with various tip angles and effect of vibration and surface tension on easy insertion 可生物降解的聚合物针具有不同的针尖角度和振动和表面张力的影响，易于插入

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4432974

S. Aoyagi, H. Izumi, M. Fukuda

引用次数: 15

Fabrication and characterization of an integrated schottky emitter array for multi-beam lithography applications 用于多波束光刻的集成肖特基发射极阵列的制造和表征

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433145

C. Tsai, T. Ono, M. Esashi

引用次数: 0

Miniaturized and highly parallel protein crystallization on a microfluidic disc 微流控圆盘上的微型化和高度平行的蛋白质结晶

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433159

C. Steinert, J. Mueller-Dieckmann, M. Weiss, M. Roessle, R. Zengerle, P. Koltay

{"title":"Miniaturized and highly parallel protein crystallization on a microfluidic disc","authors":"C. Steinert, J. Mueller-Dieckmann, M. Weiss, M. Roessle, R. Zengerle, P. Koltay","doi":"10.1109/MEMSYS.2007.4433159","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433159","url":null,"abstract":"For the first time we present a new microfluidic system for miniaturized and highly parallel protein crystallization experiments by the free interface diffusion (FID) method. The novel system is based on a microfluidic disc fabricated by hot embossing which features 100 protein crystallization chambers enabling up to 100 different crystallization experiments in parallel. The mi- crostructures exhibit minimal feature sizes of 30mum and a maximum aspect ratio of 1. The fluidic design of the disc enables lamination of nanoliter volumes of protein and crystallization solution (precipitant) in a crystallization chamber of minimum volume of 5 nL. The protein sample is loaded to the disc by a non-contact nL-dispenser with a minimal dosage volume of 1 nL and dead volume of only 500 nL. All liquid processing steps on the disc are accomplished by centrifugal forces caused by rotation of the disc. Up to 80mum large crystals of catalase, lysozyme, proteinase K and insulin, have been produced on the disc to demonstrate the proper performance. Subsequently the crystals have been analyzed in situ in an X-ray experiment without removing them from the disc.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"81 1","pages":"561-564"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83949982","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 9

Micro switchable sucker for fixable and mobile mechanism of medical MEMS 用于医用MEMS固定和移动机构的微开关吸盘

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433169

T. Horie, S. Sawano, Satoshi Konishi

引用次数: 15

Detection of Neisseria meningitidis using a micromachined split-flow microcalorimeter 用微机分离式流微热计检测脑膜炎奈瑟菌

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433116

Seung-Il Yoon, M. Lim, Se‐Chul Park, Jeon-Soo Shin, Yong-Jun Kim

引用次数: 2

Above-IC integration of capacitive pressure sensor fabricated with CMOS interconnect processes 采用CMOS互连工艺制造的电容式压力传感器的集成电路

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433008

T. Fujimori, Y. Hanaoka, H. Fukuda

引用次数: 10

A novel sacrificial layer technology based on highly selective etching of silicon-germanium in CLF3 基于CLF3高选择性蚀刻硅锗的牺牲层新技术

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433014

C. Leinenbach, H. Seidel, T. Fuchs, S. Kronmüller, F. Laermer

引用次数: 13

Demonstration of cortical recording and reduced inflammatory response using flexible polymer neural probes 证明皮质记录和减少炎症反应使用柔性聚合物神经探针

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433162

A. Mercanzini, K. Cheung, D. Buhl, M. Boers, A. Maillard, P. Colin, J. Bensadoun, A. Bertsch, A. Carleton, P. Renaud

引用次数: 19

RIE of solenoidal microcoil glass mould with integrated sample container for micro-MRI 微磁共振成像用集成样品容器的电磁微线圈玻璃模具的研制

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433106

M. Klein, T. Ono, M. Esashi, J. Korvink

引用次数: 2