宽调谐范围的微机械外腔激光器

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI:10.1109/MEMSYS.2007.4433090

E. Geerlings, M. Rattunde, J. Schmitz, G. Kaufel, J. Wagner, D. Kallweit, H. Zappe

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引用次数: 1

摘要

我们报道了基于gasb的量子阱二极管激光器在微机械外腔装置中使用Littrow配置。采用了一种经优化后可在2.3 μ m波长范围内实现宽调谐的静电驱动硅光栅作为调谐元件。可实现82 nm的调谐范围。在整个调谐范围内，微外腔激光器(muECL)的最大输出功率在15 mW以上。

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Micro-mechanical external-cavity laser with wide tuning range

We report on GaSb-based quantum-well diode lasers in a micro-machined external cavity setup using the Littrow configuration. An electrostatically-actuated silicon- grating, optimized to achieve a wide tuning range in the 2.3 mum wavelength range, is used as tuning element. A tuning range of 82 nm could be realized. The maximum output power of the micro external cavity laser (muECL) was above 15 mW over the entire tuning range.

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来源期刊

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

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