半圆形表面通道上平面集成传感器结构的小型化流量传感器

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI:10.1109/MEMSYS.2007.4433031

Marcel Dijkstra, M. D. de Boer, M.J.W. Berenschot, T. Lammerink, R. Wiegerink, M. Elwenspoek

{"title":"半圆形表面通道上平面集成传感器结构的小型化流量传感器","authors":"Marcel Dijkstra, M. D. de Boer, M.J.W. Berenschot, T. Lammerink, R. Wiegerink, M. Elwenspoek","doi":"10.1109/MEMSYS.2007.4433031","DOIUrl":null,"url":null,"abstract":"A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nlmin-1 up to 300 nlmin-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"123-126"},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"24","resultStr":"{\"title\":\"Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels\",\"authors\":\"Marcel Dijkstra, M. D. de Boer, M.J.W. Berenschot, T. Lammerink, R. Wiegerink, M. Elwenspoek\",\"doi\":\"10.1109/MEMSYS.2007.4433031\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nlmin-1 up to 300 nlmin-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.\",\"PeriodicalId\":6388,\"journal\":{\"name\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"19 1\",\"pages\":\"123-126\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"24\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2007.4433031\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433031","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 24

摘要

实现了一种量热小型化流量传感器，测量了直流电流量从40 nlmin-1到300 nlmin-1的线性传感器响应。采用一种通用的技术概念来实现具有热隔离自由悬浮氮化硅微通道的传感器，该传感器直接位于衬底表面下方。微通道概念允许传感器结构在流体附近的平面集成。耐化学流体连接可以直接在微通道的顶部进行，而不会引入大的死体积。所实现的流量传感器由一个液压阻力小、总流体体积小的微通道组成。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels

A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nlmin-1 up to 300 nlmin-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

自引率

0.00%

发文量