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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Universal concept for fabricating arbitrary shaped μIPMC transducers and its application on developing accurately controlled surgical devices 制备任意形状μIPMC换能器的通用概念及其在精确控制手术装置中的应用
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433028
G. Feng, Ri-Hong Chen
{"title":"Universal concept for fabricating arbitrary shaped μIPMC transducers and its application on developing accurately controlled surgical devices","authors":"G. Feng, Ri-Hong Chen","doi":"10.1109/MEMSYS.2007.4433028","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433028","url":null,"abstract":"This paper presents a novel micromachined method for fabricating micro-sized ion polymer metal composite (IPMC) devices with arbitrary shapes and demonstrates the technique to develop tiny accurately controlled surgical devices. This technology is beyond current state-of-the-art approaches in manufacturing large-scale IPMC devices, and provides a universal solution to construct micro-size- featured IPMC transducers with fine contours and no short-circuits. To demonstrate the usefulness of the method, hand-shaped grips for laparoscopic operation are designed, fabricated and tested. The fabricated device with the dimension of 6 mm times 6 mm times 80 mum shows that it could reach a displacement of 300 mum at the location 1 mm away from the anchor when a 0.5 Hz square wave of 12 Volts is applied, and a maximum instantaneous force of 5 mN output when it is driven with a 0.5 Hz square wave of 6 Volts.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"7-10"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85141671","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Flexible micro thermoelectric generator 柔性微型热电发电机
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433021
W. Glatz, C. Hierold
{"title":"Flexible micro thermoelectric generator","authors":"W. Glatz, C. Hierold","doi":"10.1109/MEMSYS.2007.4433021","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433021","url":null,"abstract":"We demonstrate and discuss the performance of a flexible micro thermoelectric generator with Ni/Cu thermocouples in a SU-8 mold. The fabricated devices generate up to 20.68plusmn0.32 muWcm-2K-2 for the case of vanishing thermal interface resistance (K=0). The generator keeps functionality when bent to curvatures with radii down to 7.5 mm. This allows for enhanced thermal contact to non planar surfaces. A specific electrical contact resistance between thermoelectric material and interconnects of 2.11*10-11 Omega m2 have been achieved in average, which is crucial for low generator resistance and hence for improved performance. First model based design optimization predictions are experimentally verified.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"39 1","pages":"89-92"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85266489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 20
Photothermal transducer based on ultrathin bimetal Si resonator 基于超薄双金属硅谐振器的光热传感器
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433165
T. Ono, S. Yoshida, Y. Kawai, M. Esashi
{"title":"Photothermal transducer based on ultrathin bimetal Si resonator","authors":"T. Ono, S. Yoshida, Y. Kawai, M. Esashi","doi":"10.1109/MEMSYS.2007.4433165","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433165","url":null,"abstract":"In this paper, we present a photothermal transducer consisted of an ultrathin Au/Si bimetal cantilever as a resonator with a total thickness of 45 nm and quality factor of -12000. Due to the high quality factor and small size, this transducer is sensitive to photothermal effect and its thermal response frequency can be up to 140 kHz. It is demonstrated that the irradiation of weak laser can enhance the response of the transducer due to the nonlinear photothermal effect. The mechanical FM detection of modulated light is demonstrated using this bimetal transducer.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"47 1","pages":"639-642"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82660110","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of nano stripe carbonized-polymer electrode on high S/N ratio in electrochemical detection 纳米条纹碳化聚合物电极对电化学检测中高信噪比的影响
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433053
K. Naka, H. Hayashi, M. Senda, H. Shiraishi, S. Konishi
{"title":"Effect of nano stripe carbonized-polymer electrode on high S/N ratio in electrochemical detection","authors":"K. Naka, H. Hayashi, M. Senda, H. Shiraishi, S. Konishi","doi":"10.1109/MEMSYS.2007.4433053","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433053","url":null,"abstract":"This paper presents a scaling effect of the nano stripe electrode made of carbonized-polymer on the S/N ratio in electrochemical detections. It is well known that microelectrodes show higher sensitivity and higher S/N ratio. Downsizing of electrode, however, causes a reduction in signal current. Co-author has proposed a novel theoretical concept of a stripe electrode to solve this trade-off. The S/N ratio increases with downsizing the width of the stripe electrode because the noise current exponentially decreases. The nano stripe electrode with 450 nm in width and 15 mum in the center-to-center separation of the electrode could achieve 17.15 times higher S/N ratio than that of a planar electrode having the same corresponding area size. Furthermore, comparisons of experimental and theoretical S/N ratios will be discussed.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"7 1","pages":"195-198"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82059518","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Fabrication and characteristics of MEMS vertical type probe tip for micro sized pads measurement 用于微尺寸焊盘测量的MEMS垂直型探针头的制造与特性
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4432969
Jin Hyuk Kim, S. Chu, H. Seo, J. Ryu, Gye Tae Kim, S. Moon
{"title":"Fabrication and characteristics of MEMS vertical type probe tip for micro sized pads measurement","authors":"Jin Hyuk Kim, S. Chu, H. Seo, J. Ryu, Gye Tae Kim, S. Moon","doi":"10.1109/MEMSYS.2007.4432969","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432969","url":null,"abstract":"In this research we proposed, designed, fabricated, and measured a novel micro electro mechanical system (MEMS) based vertical probe tips which differs from conventional cantilever probe tips. The main idea of the vertical probe design was how to distribute the total forces vertically concentrated on the probe tip in measuring semiconductor devices. To solve the problem, we designed the vertical probe tip with meander structure which could provide enough displacements so that the vertical probe tips could distribute the forces acting on the tips. The structural analyses of the probe tip were accomplished using finite element method (FEM) and compared with actual measurement values. The primary fabrication processes were surface micromachining, wafer bonding technology, and electroplating. The material of the electro-plated probe tip was an Ni-Co alloy. In this study, we demonstrated the potential of the vertical probe tip that could apply to a small area with the over drive (O.D.) of 10~40 mum and the contact force of 1~8 gf. The measured contact resistance was less than 2 Omega and little noise was observed.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"75 1","pages":"283-286"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81432547","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Sequential parylene lift-off process for selective patterning of biological materials 生物材料选择性图像化的序贯聚对二甲苯分离工艺
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433114
K. Kuribayashi, Yuichi Hiratsuka, T. Yamamura, Shoji Takeuchi
{"title":"Sequential parylene lift-off process for selective patterning of biological materials","authors":"K. Kuribayashi, Yuichi Hiratsuka, T. Yamamura, Shoji Takeuchi","doi":"10.1109/MEMSYS.2007.4433114","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433114","url":null,"abstract":"This paper describes a method of selective patterning of various types of biological materials with parylene lift-off process. Multiple parylene thin sheets with a microhole array were formed on a glass substrate, and were then sequentially peeled off during the pattering process. Using this method we have achieved high density patterning of different kinds of beads, lipids and proteins on the same substrate, respectively. We have also patterned proteins on a parylene sheet, and rolled up the sheet to a cylindrical structure as a demonstration of 3D protein chips.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"4 1","pages":"501-504"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85472544","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Alginate micro-bead fabrication on a centrifugal microfluidics platform 离心微流控平台上海藻酸盐微球的制备
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433113
S. Haeberle, L. Naegele, R. Burger, R. Zengerle, J. Ducrée
{"title":"Alginate micro-bead fabrication on a centrifugal microfluidics platform","authors":"S. Haeberle, L. Naegele, R. Burger, R. Zengerle, J. Ducrée","doi":"10.1109/MEMSYS.2007.4433113","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433113","url":null,"abstract":"We present a novel method for the direct, centrifugally induced fabrication of small alginate beads displaying adjustable diameters between 180 mum and 800 mum by polymer-tube micronozzles. The size distribution features a CV of 7 - 16 % for the main peak. Up to 600 beads per second and channel are issued from the micronozzle through an air gap towards a standard lab tube (\"Eppi\") attached to the rotor spinning and containing a curing agent. At spinning frequencies between 5 Hz and 28 Hz, the tubes align horizontally under rotation and return to a vertical position as soon as the rotor is at rest. The hardened beads are collected within the tube for further processing or characterization. This method is considered as a low cost technology for micro encapsulation technologies.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"497-500"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89986002","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Acoustic polarization for optimized implantable power transimittion 优化植入式电力传输的声极化
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433136
P. Shih, W. Weng, W. Shih, P. Chang
{"title":"Acoustic polarization for optimized implantable power transimittion","authors":"P. Shih, W. Weng, W. Shih, P. Chang","doi":"10.1109/MEMSYS.2007.4433136","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433136","url":null,"abstract":"We present a fully-packaged acoustic power receiver which is implantable in the subcutaneous tissue to receive the acoustic energy generated from a compressive wave emitter on the skin. The implanted receiver is a piezoelectric acoustic transducer and is packaged by biocompatible cohesive gels. This specific package is soft enough to absorb the incident wave from the subcutaneous tissue. The receiver employs direct charging to convert the acoustic energy into the extractable electrical energy through piezoelectricity when exposed to the acoustic field. The effects of the scattering package shape and the stiffness ratio between the package and subcutaneous tissue are considered to design the receivers. The energy efficiency of the fabricated receiver is measured inside real streaky pork, which is used to simulate human subcutaneous tissue. The result indicates that the spherical package is more suitable than the cubic one when they are buried in the fatty layer. The maximum efficiency of the power transmission is found to be -40dB.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"879-882"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73225881","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A miniaturised integrated QCM-based electronic nose microsystem 基于qcm的微型化集成电子鼻微系统
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4432979
T. Frisk, L. Eng, Shaohua Guo, Wouter van der Wijngaart, G. Stemme
{"title":"A miniaturised integrated QCM-based electronic nose microsystem","authors":"T. Frisk, L. Eng, Shaohua Guo, Wouter van der Wijngaart, G. Stemme","doi":"10.1109/MEMSYS.2007.4432979","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432979","url":null,"abstract":"We designed, fabricated and successfully tested an integrated miniaturised quartz crystal microbalance (QCM) based electronic nose microsystem. The microsystem is an assembly of four parts: 1. a micromachined gas-liquid interface with integrated fluid channels and electrical conductors, 2. an anisotropically conductive double-sided adhesive film, 3. a QCM crystal and 4. a polymer cap with fluid and electrical ports. The choice of the multifunctional materials and the geometric features of the four-component microsystem allow a functional integration of a QCM crystal, electrical contacts, fluidic contacts and a sample interface in a single system with minimal assembly effort, a potential for low-cost manufacturing, and a few orders of magnitude reduction in system size (12* 12*4 mm3) and weight compared to commercially available instruments. The system detected ecstasy in the 100 ng range within 30 seconds.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"98 1","pages":"417-420"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75047760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Topological layer switch technique for monolithically integrated electrostatic XYZ-stage 单片集成静电xyz级的拓扑层开关技术
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4432992
Kazuhiro Takahashi, M. Mita, Hiroyuki Fujita, H. Toshiyoshi
{"title":"Topological layer switch technique for monolithically integrated electrostatic XYZ-stage","authors":"Kazuhiro Takahashi, M. Mita, Hiroyuki Fujita, H. Toshiyoshi","doi":"10.1109/MEMSYS.2007.4432992","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432992","url":null,"abstract":"We report a monolithic XYZ-stage with electrostatic comb-mechanisms integrated in only two silicon layers and by three photolithography steps that topologically switches the allocation of layer for electrical and elastic components. The XY-stage moved in the X- and the Y-direction by 19 mum independently, and also in the diagonal direction. We have successfully demonstrated maximum 2.12 mum in the Z-direction with applied voltage of 200 V.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"381 1","pages":"651-654"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80220731","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
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