2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献_第8页

Two-phase flow oscillations in microchannel convective boiling 微通道对流沸腾中的两相流振荡

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433164

Man Lee, Yi-Kuen Lee, Y. Zohar

引用次数: 1

Impact of miniaturization on the current handling of electrostatic MEMS resonators 微型化对静电MEMS谐振器电流处理的影响

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433092

M. Agarwal, H. Mehta, R. Candler, S. Chandorkar, Bongsang Kim, M. Hopcroft, R. Melamud, G. Bahl, G. Yama, T. Kenny, B. Murmann

引用次数: 7

gold-nanoparticle-enhanced IGG immunological detection by in-situ fabry-perot sensor 金纳米颗粒增强IGG免疫检测的原位法布里-珀罗传感器

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4432985

Y. Tseng, Shu-Ting Jhuang, Chung-Shi Yang, F. Tseng

{"title":"gold-nanoparticle-enhanced IGG immunological detection by in-situ fabry-perot sensor","authors":"Y. Tseng, Shu-Ting Jhuang, Chung-Shi Yang, F. Tseng","doi":"10.1109/MEMSYS.2007.4432985","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432985","url":null,"abstract":"This paper proposes a needle-type biosensor for immunological application, which combines the abilities of real-time monitoring, in-situ measurement and high sensitivity, by adopting gold-nanoparticles (GNPs) coated with antibody to enhance the signal of Fabry-Perot (F-P) interferometry in an optic fiber sensing system. Strong reflection induced by larger index mismatch and longer optical path from GNPs-protein conjugation are suggested to attribute most to the signal enhancement in F-P interference shift. The experiments carry out the monitoring of immuno-sensing in real-time by the employment of rabbit IgG conjugate to GNPs-anti-rabbit IgG And the detection limit was demonstrated to approach 0.17 nM (-25.5 ng/ml), which was three orders of magnitude better than those of the traditional fiber-based F-P biosensors. Besides, the reproducibility of the sensor has been tested through at least three cycles of detection/surface-regeneration process and demonstrated a reasonable consistency. The relationship between the concentrations of GNPs-antibody and F-P spectrum shift has also been characterized. The time-constant of this sensor to complete one cycle of biomolecule-detection and surface-regeneration can be as low as 4 minutes.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"14 1","pages":"441-444"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75319428","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Environment friendly MEMS fabrication: Proposal of new D-RIE process gases for reduction of green house effect 环境友好型MEMS制造:提出新的D-RIE工艺气体以减少温室效应

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433105

S. Nagano, T. Shibata, K. Sakoda, M. Inoue, S. Hasaka, T. Takano, T. Ikehara, R. Maeda

引用次数: 1

A two-axis piezoelectric tilting micromirror with a newly developed PZT-meandering actuator 两轴压电倾斜微镜与新开发的pzt弯曲驱动器

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4432994

M. Tani, M. Akamatsu, Y. Yasuda, H. Toshiyoshi

引用次数: 54

Localized back-side heating for low-temperature wafer-level bonding 局部背面加热，用于低温晶圆级粘合

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433146

J. Mitchell, K. Najafi

引用次数: 1

A high-resolution amperometric acetylcholine biosensor based on nano self-assembly of carbon nanotubes 基于碳纳米管纳米自组装的高分辨率乙酰胆碱生物传感器

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433151

W. Xue, T. Cui

引用次数: 4

Development of high-resolution intraluminal and intravascular MRI probe using microfabrication on cylindrical substrates 高分辨率腔内和血管内MRI探针在圆柱形基板上的微加工

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433065

S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, Y. Haga

{"title":"Development of high-resolution intraluminal and intravascular MRI probe using microfabrication on cylindrical substrates","authors":"S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, Y. Haga","doi":"10.1109/MEMSYS.2007.4433065","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433065","url":null,"abstract":"The objective of this study is development of high-resolution intraluminal and intravascular MRI probe using microfabrication on cylindrical substrates. MRI holds promise for in vivo characterization due to its potential for obtaining high-resolution images and its sensitivity to the compositional characteristics of lesion. By placing a receive coil in the human body, NMR signals from the tissue surrounding the coil can be detected sensitively and the method enables in vivo high-resolution imaging (high spatial resolution and high spectroscopic resolution). The preferable receive coil has homogeneous RF receptivity around the probe and high-SNR. Novel coil designs and/or multi-coil have capabilities to meet these demands. To connect the tuning/matching circuit and amplifier circuit near the coil is needed to improve SNR of the system. Microfabrication on cylindrical substrate is one of methods for fabricating arbitrary coil pattern and the tuning/matching circuit on the tube with small diameters. Using a maskless lithography technique, solenoid coil, tilted coil and saddle shaped coil have been fabricated on glass tube with 2 mm O.D.. Imaging test of the coils were performed on 3 T MRI in a 2% agar phantom.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"35 1","pages":"329-332"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77272337","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 19

Nanoelectromechanical systems: Potential, progress, & projections 纳米机电系统:潜力、进展与展望

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433022

M. Roukes

{"title":"Nanoelectromechanical systems: Potential, progress, & projections","authors":"M. Roukes","doi":"10.1109/MEMSYS.2007.4433022","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433022","url":null,"abstract":"Nanoelectromechanical systems (NEMS) represent the next regime of size reduction beyond the microscale for mechanical devices. In their tiniest, ultimate realization, NEMS will be formed with sub-nanometer scale precision from atomic- and molecular-scale mechanical elements as first envisaged by Feynman (1). Although nanowire and nanotube based NEMS today verge on this domain, their assembly into functional devices remains more of an art than a science, as they are typically fabricated one-by-one by complicated means with low yield. By contrast, the most robust forms of NEMS are currently patterned by top-down methods; in fact their production is now being scaled to enable large-scale integration over 200 mm wafers with minimum feature sizes that are below 50 nm. In this paper I will describe how nanoscale mechanical elements provide benefits beyond the obvious, that is, benefits in addition to the possibility of increased device density. The reduced size of NEMS enables mechanical functionality that completely transcends what is possible at the microscale with MEMS (2). However, size reduction to the nanoscale may not be a panacea for all applications - for some applications larger may still be better!","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"61 1","pages":"93-94"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85782097","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Microprobe microsystem platform inserted during early metamorphosis to actuate insect flight muscle 微探针微系统平台插入在早期变态，以驱动昆虫飞行肌肉

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4432976

A. Bozkurt, A. Paul, S. Pulla, A. Ramkumar, B. Blossey, J. Ewer, R. Gilmour, A. Lal

{"title":"Microprobe microsystem platform inserted during early metamorphosis to actuate insect flight muscle","authors":"A. Bozkurt, A. Paul, S. Pulla, A. Ramkumar, B. Blossey, J. Ewer, R. Gilmour, A. Lal","doi":"10.1109/MEMSYS.2007.4432976","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432976","url":null,"abstract":"Following from early work demonstrating that early pupal- stage inserts are accepted by insects [9], a microprobe based microsystem platform was designed with respect to the position of the muscle bundles, and was inserted into the thorax at 4 days of the pupal stage. The platform is roughly 8times7times1.5 mm3 in size with probe thickness of 200 mum and weighs 500 mg, which the moth is able to successfully carry in the adult stage. In addition to the microsystem, an anchor to easily manipulate the adults was successfully formed in the insect by placing a glass-capillary through the pupae. The pupae emerged successfully, and the microsystem was used to characterize the potential for flight control. As part of the work to determine the microplatform design, we determined the strength-interval profiles of the pulses needed for direct muscle actuation. Two sets of flight muscles, which are symmetrically present on either side of the thorax, were differentially electrically actuated, which potentially influences the individual wing beat frequency and amplitude resulting in controlled turning behavior during flight.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"9 1","pages":"405-408"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88452805","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 31