微型化对静电MEMS谐振器电流处理的影响

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI:10.1109/MEMSYS.2007.4433092

M. Agarwal, H. Mehta, R. Candler, S. Chandorkar, Bongsang Kim, M. Hopcroft, R. Melamud, G. Bahl, G. Yama, T. Kenny, B. Murmann

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引用次数: 7

摘要

本文研究了双端音叉(DETF) MEMS谐振器中非线性的微型化问题。我们发现，随着波束长度的减小，谐振频率的增加大大改善了电流处理;例如，将波束缩短5倍，可使持续信号电流增加100倍。利用本工作中观察到的非线性模型和尺度，我们提出了优化谐振结构设计和静电间隙尺寸的考虑。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Impact of miniaturization on the current handling of electrostatic MEMS resonators

This paper studies the scaling of nonlinearities with miniaturization in double-ended-tuning-fork (DETF) MEMS resonators. We find that the increase in resonant frequency associated with beam length reduction strongly improves current handling; e.g. shortening the beams by a factor of 5 results in a 100- fold increase in sustainable signal current. Using the nonlinear models and scaling observed in this work, we present considerations for optimization of the resonant structure design and the electrostatic gap size.

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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

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