Sequential parylene lift-off process for selective patterning of biological materials

Abstract

This paper describes a method of selective patterning of various types of biological materials with parylene lift-off process. Multiple parylene thin sheets with a microhole array were formed on a glass substrate, and were then sequentially peeled off during the pattering process. Using this method we have achieved high density patterning of different kinds of beads, lipids and proteins on the same substrate, respectively. We have also patterned proteins on a parylene sheet, and rolled up the sheet to a cylindrical structure as a demonstration of 3D protein chips.