柔性微型热电发电机

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI:10.1109/MEMSYS.2007.4433021

W. Glatz, C. Hierold

{"title":"柔性微型热电发电机","authors":"W. Glatz, C. Hierold","doi":"10.1109/MEMSYS.2007.4433021","DOIUrl":null,"url":null,"abstract":"We demonstrate and discuss the performance of a flexible micro thermoelectric generator with Ni/Cu thermocouples in a SU-8 mold. The fabricated devices generate up to 20.68plusmn0.32 muWcm-2K-2 for the case of vanishing thermal interface resistance (K=0). The generator keeps functionality when bent to curvatures with radii down to 7.5 mm. This allows for enhanced thermal contact to non planar surfaces. A specific electrical contact resistance between thermoelectric material and interconnects of 2.11*10-11 Omega m2 have been achieved in average, which is crucial for low generator resistance and hence for improved performance. First model based design optimization predictions are experimentally verified.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"39 1","pages":"89-92"},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"20","resultStr":"{\"title\":\"Flexible micro thermoelectric generator\",\"authors\":\"W. Glatz, C. Hierold\",\"doi\":\"10.1109/MEMSYS.2007.4433021\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We demonstrate and discuss the performance of a flexible micro thermoelectric generator with Ni/Cu thermocouples in a SU-8 mold. The fabricated devices generate up to 20.68plusmn0.32 muWcm-2K-2 for the case of vanishing thermal interface resistance (K=0). The generator keeps functionality when bent to curvatures with radii down to 7.5 mm. This allows for enhanced thermal contact to non planar surfaces. A specific electrical contact resistance between thermoelectric material and interconnects of 2.11*10-11 Omega m2 have been achieved in average, which is crucial for low generator resistance and hence for improved performance. First model based design optimization predictions are experimentally verified.\",\"PeriodicalId\":6388,\"journal\":{\"name\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"39 1\",\"pages\":\"89-92\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"20\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2007.4433021\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433021","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 20

摘要

我们在SU-8模具上演示并讨论了Ni/Cu热电偶柔性微型热电发电机的性能。在热界面电阻(K=0)消失的情况下，制备的器件产生高达20.68plusmn0.32 muWcm-2K-2。发电机在弯曲到半径低至7.5毫米的曲率时保持功能。这可以增强与非平面表面的热接触。热电材料和互连之间的特定电接触电阻平均为2.11*10-11 ω m2，这对于降低发电机电阻和提高性能至关重要。首先对基于模型的设计优化预测进行了实验验证。

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Flexible micro thermoelectric generator

We demonstrate and discuss the performance of a flexible micro thermoelectric generator with Ni/Cu thermocouples in a SU-8 mold. The fabricated devices generate up to 20.68plusmn0.32 muWcm-2K-2 for the case of vanishing thermal interface resistance (K=0). The generator keeps functionality when bent to curvatures with radii down to 7.5 mm. This allows for enhanced thermal contact to non planar surfaces. A specific electrical contact resistance between thermoelectric material and interconnects of 2.11*10-11 Omega m2 have been achieved in average, which is crucial for low generator resistance and hence for improved performance. First model based design optimization predictions are experimentally verified.

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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

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