3 dimensionally combined pyrolyzed polymer sensor and heater toward all polymeric gas detection system

Abstract

This paper proposes for the first time all polymeric gas detection system consisting of the 3 dimensionally combined carbon structures and the gas regulator with the three-stage pneumatic valves. The pyrolyzed photo-resist structure as an absorbent of nitrogen dioxide sensor and 3D bridge-type resistive heater are fabricated and assembled with the gas regulator. The valve efficiency of the gas regulator and the sensitivity of the gas sensor to NO2 are characterized.