面向全聚合物气体检测系统的三维组合热解聚合物传感器和加热器

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI:10.1109/MEMSYS.2007.4433027

O. Jeong, S. Konishi

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引用次数: 2

摘要

本文首次提出了由三维复合碳结构和带三级气动阀的气体调节器组成的全聚合物气体检测系统。制备了作为二氧化氮传感器和三维桥式电阻加热器吸收剂的热解光抗胶结构，并与气体调节器组装在一起。对气体调节器的阀门效率和气体传感器对NO2的灵敏度进行了表征。

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3 dimensionally combined pyrolyzed polymer sensor and heater toward all polymeric gas detection system

This paper proposes for the first time all polymeric gas detection system consisting of the 3 dimensionally combined carbon structures and the gas regulator with the three-stage pneumatic valves. The pyrolyzed photo-resist structure as an absorbent of nitrogen dioxide sensor and 3D bridge-type resistive heater are fabricated and assembled with the gas regulator. The valve efficiency of the gas regulator and the sensitivity of the gas sensor to NO2 are characterized.

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来源期刊

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

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