Dynamic characterization of nano oscillators by atomic force microscopy

Abstract

We report on the dynamic quantitative characterization of nanoelectromechanical systems (NEMS) through direct coupling with a micromechanical (MEMS) probe. The nanomechanical structures were driven using piezoelectric transducers and the resulting out-of-plane vibrations were monitored with a conventional commercially available atomic force microscope (AFM) probe. Intermittent contact imaging data and non-contact AFM interrogation revealed the initiation of interaction between the two oscillators, providing a description of the resonant response. The vibrational spectra measured through optical detection was in good agreement with the coupled NEMS-AFM system measurement results. The dynamic response of the coupled system was modelled through a combination of long range van der Waals and contact forces using the Derjaguin-Muller-Toporov model.