2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献_第8页

A tunable liquid lens driven by a concentric annular electroactive actuator 由同心环形电致动器驱动的可调液体透镜

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765789

K. Wei, N. W. Domicone, Yi Zhao

引用次数: 13

Out-of-plane micro triple-hot-wire anemometer based on Pyrex bubble for airflow sensing 基于热阻气泡的面外微型三热线风速计

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765756

Shuwei Liu, S. Pan, F. Xue, Nay Lin, Haobing Liu, J. Miao, L. Norford, H. B. Lim

引用次数: 6

Nano-opto-electro-mechanical (NOEM) oscillator with controllable non-linear dynamics 具有可控非线性动力学的纳米光电(NOEM)振荡器

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765878

B. Dong, J. G. Huang, H. Cai, P. Kropelnicki, A. Randles, Y. D. Gu, A. Liu

引用次数: 1

Ultrasound-assited micro-knife for cellular scale surgery 用于细胞规模手术的超声辅助微刀

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765783

Hwapyeong Jeong, Tao Li, Y. Gianchandani, Jaesung Park

引用次数: 4

A tunable optical IRIS based on electromagnetic actuation for a high-performance mini/micro camera 一种用于高性能迷你/微型相机的基于电磁驱动的可调谐光学IRIS

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765849

H. Seo, J. B. Chae, Sung Jin Hong, I. U. Shin, K. Rhee, J. Chang, S. Chung

{"title":"A tunable optical IRIS based on electromagnetic actuation for a high-performance mini/micro camera","authors":"H. Seo, J. B. Chae, Sung Jin Hong, I. U. Shin, K. Rhee, J. Chang, S. Chung","doi":"10.1109/MEMSYS.2014.6765849","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765849","url":null,"abstract":"This paper presents a tunable iris based on electromagnetic actuation for a tiny high-performance camera in mobile devices such as smart phones and pads. To investigate the effect of a magnetic field on a ferrofluid, the contact angle modification and transportation of a sessile ferrofluid droplet are tested using a neodymium magnet and electric coil. The variation of the contact angle of the ferrofluid droplet is 21.3° for the neodymium magnet and 18.1° for the electric coil based on electromagnetic induction. And the transportation of the ferrofluid droplet is also demonstrated using the neodymium magnet and electric coil. As the concept proof, the pretest of a tunable iris operated by electromagnetic actuation is conducted by using a hollow cylinder cell. In the initial state, the ferrofluid is in the relax state, so the cylinder cell shows the largest aperture (4.06 mm). When an electrical current is applied to an electric coil wound around the outside of the cylinder cell, the ferrofluid initially placed in the hydrophobic sidewall inside the cylinder cell is actuated and pulled to the center. The aperture under the current is modified from 4.06 mm at 0 A to 3.2 mm at 2 A. Finally, the envisioned tunable iris consisted of two connected circular microchannels is realized using a MEMS technology. The iris size is 9×9×2 mm3, and the variation of the aperture diameter is from 1.72 mm at 0 A to 1.09 mm at 2.6 A.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133698668","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Thermopile infrared array sensor for human detector application 热电堆红外阵列传感器用于人体探测器

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765866

J. Tanaka, M. Shiozaki, F. Aita, T. Seki, M. Oba

引用次数: 18

Simultaneous detection of linear and coriolis accelerations on a mode-matched MEMS gyroscope 模式匹配MEMS陀螺仪上线性和科里奥利加速度的同时检测

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765566

S. Sonmezoglu, H. D. Gavcar, K. Azgın, S. E. Alper, T. Akin

引用次数: 12

Finfet with fully PH-responsive HFO2 as highly stable biochemical sensor 具有完全ph响应HFO2的Finfet作为高度稳定的生化传感器

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765828

S. Rigante, M. Wipf, A. Bazigos, K. Bedner, D. Bouvet, A. Ionescu

引用次数: 3

100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process 100K q因子环形陀螺仪在晶圆级外延硅封装工艺中实现

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765564

D. Senkal, Sina Askari, M. Ahamed, E. Ng, V. Hong, Yushi Yang, C. Ahn, Thomas W. Kenny, A. Shkel

{"title":"100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process","authors":"D. Senkal, Sina Askari, M. Ahamed, E. Ng, V. Hong, Yushi Yang, C. Ahn, Thomas W. Kenny, A. Shkel","doi":"10.1109/MEMSYS.2014.6765564","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765564","url":null,"abstract":"This paper reports a new type of degenerate mode gyroscope with measured Q-factor of > 100,000 on both modes at a compact size of 1760 μm diameter. The toroidal ring gyroscope consists of an outer anchor ring, concentric rings nested inside the anchor ring and an electrode assembly at the inner core. Current implementation uses n = 3 wineglass mode, which is inherently robust to fabrication asymmetries. Devices were fabricated using high-temperature, ultra-clean epitaxial silicon encapsulation (EpiSeal) process. Over the 4 devices tested, lowest as fabricated frequency split was found to be 8.5 Hz (122 ppm) with a mean of 21 Hz (Δf/f = 300 ppm). Further electrostatic tuning brought the frequency split below 100 mHz (<; 2 ppm). Whole angle mechanization and pattern angle was demonstrated using a high speed DSP control system. Characterization of the gyro performance using force-rebalance mechanization revealed ARW of 0.047°/√hr and an in-run bias stability of 0.65 deg/hr. Due to the high Q-factor and robust support structure, the device can potentially be instrumented in whole angle mechanization for applications which require high rate sensitivity and robustness to g-forces.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"125 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128700164","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 64

Annealing effects on flexible multi-layered parylene-based sensors 柔性多层聚苯乙烯传感器的退火效应

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765768

Brian J. Kim, E. Washabaugh, E. Meng

{"title":"Annealing effects on flexible multi-layered parylene-based sensors","authors":"Brian J. Kim, E. Washabaugh, E. Meng","doi":"10.1109/MEMSYS.2014.6765768","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765768","url":null,"abstract":"To mitigate long term, soaking-induced delamination failure of multi-layered Parylene C devices, a post-process annealing step can be employed to increase adhesion between the Parylene layers. However, it has been shown that annealing of Parylene thin films can alter the bulk properties of the polymer, and thus impact final device performance. To elucidate these effects, the mechanical and electrochemical properties, and sensing performance of untreated and annealed Parylene C-platinum electrochemical impedance-based force sensors were compared. Annealing reduced the height (~3%) and increased the stiffness of the Parylene C sensing channel structure (~1.6x), affecting the sensor's mechanical response. Furthermore, the electrode surface was smoothed as built-in residual stresses were removed during annealing, altering the sensor's electrochemical properties. Together, these phenomena resulted in a 24% reduction in sensor sensitivity. These results indicate that heat-based effects cannot be ignored for Parylene-metal device systems, including neural microelectrode implants, and that mechanical and electrochemical properties and performance must be determined after heat treatment, such as annealing and sterilization.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116725358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 13