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2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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A microbubble pressure transducer with bubble nucleation core 一种带有气泡成核芯的微泡压力传感器
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765584
Lawrence Yu, E. Meng
{"title":"A microbubble pressure transducer with bubble nucleation core","authors":"Lawrence Yu, E. Meng","doi":"10.1109/MEMSYS.2014.6765584","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765584","url":null,"abstract":"A microchannel-based microbubble (μB) transducer (μBPT) having a μB nucleation core (μBNC) was developed to achieve low power operation in wet environments. In this work, we investigate μB dynamics within the transducer structure and pressure transduction. The transducer leverages electrochemical impedance (EI)-based measurement to monitor the instantaneous response of μB size changes induced by hydrostatic pressure changes. We demonstrated on-demand μB nucleation by electrolysis and real-time pressure tracking (-93 Ω/mmHg over 0-350 mmHg). Repeatable, efficient electrolytic generation of stable microbubbles (<; 1.5 nL with <; 2% size variation) was achieved using a μBNC structure attached centrally to the microchannel. Biocompatible construction (only Parylene and Pt), small footprint, low power consumption (<; 60 μW), and liquid-based operation of μBPTs are ideal for in vivo pressure monitoring applications.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"101 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114623195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Formation of cross-shaped Escherichia coli 形成十字形大肠杆菌
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765602
K. Hirayama, Y. Heo, S. Takeuchi
{"title":"Formation of cross-shaped Escherichia coli","authors":"K. Hirayama, Y. Heo, S. Takeuchi","doi":"10.1109/MEMSYS.2014.6765602","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765602","url":null,"abstract":"This paper describes preliminary results of a method to regulate the shapes of a single bacterial cell by confining the cell into a micro chamber. The cell wall of Escherichia coli determines the rod-shape (0.5 μm in width, 2 μm in length) of the bacteria and protects from outer stress. We removed its cell wall by enzyme treatment and confined the cell into cross-shaped microchambers formed on the surface of 2% agar contained the growth media. We believe that our method could contribute to the comprehensive understanding of the shape regulation mechanism of E. coli. This paper focuses on the fabrication of cross-shaped microchambers formed on agar and confinement of the bacteria into the microchambers.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115211563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A nanowire-integrated microfluidic device for hydrodynamic trapping and anchoring of bacterial cells 一种用于细菌细胞水动力学捕获和锚定的纳米线集成微流体装置
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765621
D. Kwon, Jung Kim, Soochan Chung, I. Park
{"title":"A nanowire-integrated microfluidic device for hydrodynamic trapping and anchoring of bacterial cells","authors":"D. Kwon, Jung Kim, Soochan Chung, I. Park","doi":"10.1109/MEMSYS.2014.6765621","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765621","url":null,"abstract":"In this work, we proposed a novel method for facile hydrodynamic trapping and anchoring of bacterial cells using nanowire array with fishnet-like structure in microfluidic channel. Vertically well-aligned ZnO nanowires were directly synthesized onto side walls of microslit structures by hydrothermal method to form mesh-like cage structures. We found that the mesh-like cages were effective in trapping and anchoring of Escherichia coli cells as model bacteria. In addition, we observed two anchoring modes; impaling and wedging, by electron microscopy and they resulted in irreversible and reversible damage to the anchored cells, respectively. We expected that the suggested bacterial cell trapping method can be used as a simple cell-manipulating platform for advanced microfluidic system.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115760952","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Energy harvesting using uniaxially aligned cardiomyocytes 利用单轴排列的心肌细胞收集能量
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765598
Xia Liu, X. Wang, Song Li, Liwei Lin
{"title":"Energy harvesting using uniaxially aligned cardiomyocytes","authors":"Xia Liu, X. Wang, Song Li, Liwei Lin","doi":"10.1109/MEMSYS.2014.6765598","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765598","url":null,"abstract":"This paper presents the concept of energy harvesting from uniaxially-aligned cardiomyocytes (CMs) on a flexible substrate for the first time. Experimentally, synchronously contracting neonatal rat ventricular cardiomyocytes (NRVCMs) at 0.5Hz have been found to cause the mechanical straining of a piezoelectric energy harvester to produce 87.5nA and 92.3mV of peak current and voltage, respectively. This work has been accomplished: (a) fabrication of a bio-hybrid energy harvester combining living cells, bio-compatible PDMS polymer substrate and piezoelectric PVDF films; (b) engineered living cell patterns on PDMS with uniaxially-aligned direction for enhanced mechanical actuation; and (c) up to one month of continuous synchronous contractions from NRVCMs for energy harvesting demonstration. This paper will detail the concept, design, fabrication, and experiments of the bio-hybrid energy harvester.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126405874","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Wrinkle cellomics: Screening bladder cancer cells using an ultra-thin silicone membrane 皱纹细胞组学:使用超薄硅胶膜筛选膀胱癌细胞
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765784
Jennie H. Appel, Mandy L. Y. Sin, J. Liao, J. Chae
{"title":"Wrinkle cellomics: Screening bladder cancer cells using an ultra-thin silicone membrane","authors":"Jennie H. Appel, Mandy L. Y. Sin, J. Liao, J. Chae","doi":"10.1109/MEMSYS.2014.6765784","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765784","url":null,"abstract":"We report a visualization platform, comprised of an ultra-thin silicone membrane, to differentiate between the biophysical properties of cancerous and non-cancerous cells from human patients. Cancerous cells adhere to, spread on, and induce deformation of this membrane to produce wrinkles while non-cancerous cells fail to generate wrinkles. Wrinkle patterns - number, length, and direction of wrinkles - can be visualized by a conventional microscopy. Quantitative measurement of these wrinkling patterns represent a powerful, non-invasive diagnostic tool for prevalent cancers, such as bladder cancer.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126419719","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A microfluidic device for isolation of cell-targeting aptamers 一种用于分离细胞靶向适配体的微流控装置
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765620
Jing Zhu, T. Olsen, R. Pei, M. Stojanović, Q. Lin
{"title":"A microfluidic device for isolation of cell-targeting aptamers","authors":"Jing Zhu, T. Olsen, R. Pei, M. Stojanović, Q. Lin","doi":"10.1109/MEMSYS.2014.6765620","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765620","url":null,"abstract":"This paper presents a microfluidic device for affinity selection and amplification of cell membrane protein-binding strands from a randomized single-strand DNA (ssDNA) oligomer library, thereby isolating specific cell-targeting aptamers. The device consists of the selection and amplification microchambers situated on a temperature control chip. Affinity selection, integrated with cell culturing, of cell-binding ssDNA is performed in the selection chamber; the selected strands are then amplified by bead-based polymerase chain reaction (PCR) in the amplification chamber. Transfer between the selection and amplification microchambers using pressure-driven flow realizes multi-round aptamer isolation on a single chip. Experimental results demonstrate the feasibility of using this device to develop aptamers that specifically bind to target cells.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123504839","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Single-cell 3D Bio-MEMS environment with engineered geometry and physiologically relevant stiffnesses 具有工程几何和生理相关刚度的单细胞3D生物mems环境
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765603
M. Marelli, Neha Gadhari, G. Boero, M. Chiquet, J. Brugger
{"title":"Single-cell 3D Bio-MEMS environment with engineered geometry and physiologically relevant stiffnesses","authors":"M. Marelli, Neha Gadhari, G. Boero, M. Chiquet, J. Brugger","doi":"10.1109/MEMSYS.2014.6765603","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765603","url":null,"abstract":"We present a three dimensional (3D) microenvironment for on-chip cell culture, with engineered geometrical and mechanical properties. The device, named μ-flower, is based on micorfabricated cantilever beams bent out of plane by the intrinsic stresses of a bilayer structure. The use of Ti-SiO2 bilayers with various thicknesses allows spanning a large range of rigidities while keeping the size nearly constant. The geometrical and mechanical properties of the devices are thus decoupled, and the degrees of stiffness of several physiological tissues are matched. These characteristics make μ-flowers a microfabricated cell-culture substrate designed to mimic essential physical properties of the in vivo environment (dimensionality, shape and rigidity) in a precisely controlled way, at the single-cell scale, and with a high degree of parallelization.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121566130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
SUB 3-micron gap microplasma fet with 50 V turn-on voltage 亚3微米间隙微等离子体场效应管，50v导通电压
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765601
P. Pai, M. Tabib-Azar
{"title":"SUB 3-micron gap microplasma fet with 50 V turn-on voltage","authors":"P. Pai, M. Tabib-Azar","doi":"10.1109/MEMSYS.2014.6765601","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765601","url":null,"abstract":"This work reports the smallest microplasma field-effect transistor reported till date that operates with a low turn-on voltage of ~50V dc; a more than 3x reduction in the turn-on voltage compared to earlier reported work. Our previous work used plasma from an external source to operate the transistor while in the present work we use rf or dc voltage to directly generate plasma in the transistor channel and use dc gate field effect to control the device conduction. The reduction in turn-on voltage is achieved by a small plasma cavity of 1.5μm gap width.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"86 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122084604","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
A monolithic Knudsen pump WITH 20 sccm flow rate using through-wafer ONO channels 一个单片克努森泵与20 sccm流量使用通过晶圆ONO通道
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765586
S. An, Yutao Qin, Y. Gianchandani
{"title":"A monolithic Knudsen pump WITH 20 sccm flow rate using through-wafer ONO channels","authors":"S. An, Yutao Qin, Y. Gianchandani","doi":"10.1109/MEMSYS.2014.6765586","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765586","url":null,"abstract":"This paper describes a lithographically microfabricated Knudsen pump for high gas flow. Knudsen pumps operate by thermal transpiration and require no moving parts. To achieve high gas flow, high-density arrays of microchannels (with over 4000 channels/mm2) are used in parallel. These vertically oriented microchannels have 2×120 μm2 openings surrounded by 0.1 μm-thick silicon oxide-nitride-oxide (ONO) sidewalls. The thin ONO sidewalls provide thermal isolation between a heat sink formed within the Si substrate, and a Cr/Pt heater that provides a temperature bias for thermal transpiration. The Knudsen pump is monolithically microfabricated on a single wafer using a four-mask process. It has a footprint of 8×10 mm2. It produces a measured air flow of 20 sccm (i.e., 0.8 sccm/mm2), with typical response times of 0.1-0.4 sec.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126458625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Nanostructured silicon flapping wing with higher strength and low reflectivity for solar powered MEMS aircraft 太阳能MEMS飞机高强度低反射率纳米结构硅扑翼
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765724
Kunal Kashyap, Amarendra Kumar, Chi-Nan Chen, M. T. Hou, J. Yeh
{"title":"Nanostructured silicon flapping wing with higher strength and low reflectivity for solar powered MEMS aircraft","authors":"Kunal Kashyap, Amarendra Kumar, Chi-Nan Chen, M. T. Hou, J. Yeh","doi":"10.1109/MEMSYS.2014.6765724","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765724","url":null,"abstract":"This work presents silicon flapping wings design with higher bending strength and low reflectivity for MEMS aircraft. The design was bio-inspired by the cicada wings which are having numerous nanostructures upon it. The nanostructure on silicon increases the bending strength by ~6 times. The higher strength silicon samples can successfully demonstrate the 100 μm thick bendable silicon by nanostructure surface texturing used for flapping wings. Moreover, same nanostructures act as antireflective layer due to improved light trapping for solar cell. The reflectivity of the nanotextured surface reduces to ~2%.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1984 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125695585","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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