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2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Inductively coupled plasma etching of bulk tungsten for MEMS applications 用于MEMS的体钨电感耦合等离子体刻蚀
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2022-10-01 DOI: 10.1109/MEMSYS.2014.6765687
Lu Song, Nannan Li, Shibin Zhang, Jin Luo, Jia Hu, Yiming Zhang, Shuhui Chen, J. Chen
{"title":"Inductively coupled plasma etching of bulk tungsten for MEMS applications","authors":"Lu Song, Nannan Li, Shibin Zhang, Jin Luo, Jia Hu, Yiming Zhang, Shuhui Chen, J. Chen","doi":"10.1109/MEMSYS.2014.6765687","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765687","url":null,"abstract":"Tungsten based MEMS devices have the potential to be used for many applications, such as tools for micro electrical discharge machining and ultrasonic machining, or mold for inject molding. For the first time, bulk tungsten inductively coupled plasma (ICP) etching was developed and characterized, which is capable of producing high aspect ratio (>13) structures with feature size below 3μm. Etching depth of 230μm has been achieved at an etch rate up to 2.2μm/min. This technology offers big opportunities for MEMS applications.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132412920","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Bionic skins using flexible organic devices 使用柔性有机装置的仿生皮肤
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-11-06 DOI: 10.1109/ESSDERC.2014.6948752
T. Someya
{"title":"Bionic skins using flexible organic devices","authors":"T. Someya","doi":"10.1109/ESSDERC.2014.6948752","DOIUrl":"https://doi.org/10.1109/ESSDERC.2014.6948752","url":null,"abstract":"We have fabricated ultrathin, ultra-lightweight, ultraflexible, organic devices, such as organic thin-film transistors (TFTs), organic photovoltaic (OPV) cells, and organic light-emitting diodes (OLEDs) on polymeric films with the thickness of only 1 μm. The ultrathin organic devices are utilized to fabricate human-machine interfaces such as a touch sensor and wearable electronic systems such as an electromyogram measurement sheet with a two-dimensional array of organic amplifiers. The transistor films exhibit extraordinarily tough mechanical robustness such as minimum bending radius of 5 μm for organic TFTs.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-11-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126045444","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
An X-ray detectable pressure microsensor for monitoring coronary in-stent restenosis 用于监测冠状动脉支架内再狭窄的x射线可检测压力微传感器
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765785
M. Gulari, M. Ghannad-Rezaie, P. Novelli, N. Chronis, T. Marentis
{"title":"An X-ray detectable pressure microsensor for monitoring coronary in-stent restenosis","authors":"M. Gulari, M. Ghannad-Rezaie, P. Novelli, N. Chronis, T. Marentis","doi":"10.1109/MEMSYS.2014.6765785","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765785","url":null,"abstract":"We present a novel implantable X-ray-addressable MEMS Blood Pressure sensor, the X-BP, for the noninvasive and cost-effective surveillance of coronary in-stent restenosis. We successfully fabricated and tested the X-BP sensor and its pressure response curve. We placed the X-BP sensor in a coronary stent and prove adequate visibility in a clinically realistic scenario.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115295813","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
High resolution micro ultrasonic machining (HR-μUSM) for post-fabrication trimming of fused silica 3-D microstructures 高分辨率微超声加工(HR-μUSM)用于熔融石英三维微结构的加工后修整
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765685
A. Viswanath, Tao Li, Y. Gianchandani
{"title":"High resolution micro ultrasonic machining (HR-μUSM) for post-fabrication trimming of fused silica 3-D microstructures","authors":"A. Viswanath, Tao Li, Y. Gianchandani","doi":"10.1109/MEMSYS.2014.6765685","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765685","url":null,"abstract":"This paper presents the design and characterization of a high resolution micro ultrasonic machining (HR-μUSM) process suitable for post-fabrication trimming of 3-D microstructures made from fused silica and other materials. The process targets low machining rates, high resolution, and high surface quality. On flat fused silica substrates, the process achieves machining rates ≤10 nm/sec averaged over 1 minute. The average surface roughness (Sa) achieved is ≤30 nm. The process is successfully demonstrated for trimming hemispherical 3-D microstructures made from fused silica.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127443148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Mesoporous-silica nano-channels integrated in micro-fluidic chip for fast liquid micro-extraction of pesticide residual 微流控芯片集成介孔二氧化硅纳米通道用于农药残留快速液体微萃取
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765811
P. Xu, Chuanzhao Chen, Haitao Yu, Xinxin Li
{"title":"Mesoporous-silica nano-channels integrated in micro-fluidic chip for fast liquid micro-extraction of pesticide residual","authors":"P. Xu, Chuanzhao Chen, Haitao Yu, Xinxin Li","doi":"10.1109/MEMSYS.2014.6765811","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765811","url":null,"abstract":"The paper reports a micro-chip with nano-pore channels integrated in a micro-channel as reservoir for quickly extracting analyt from aqueous solution to water-soluble organic solvents. Using this novel technology, trace-level residual of organophosphorus pesticide in water-solution can be micro-extracted to a common organic-solvent (e.g., ethanol) for subsequent analysis by GC-MS (Gas Chromatography-Mass Spectrometry).","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123284548","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A vertically integrated nanoscale tipped microprobe intracellular electrode array 一种垂直集成的纳米级尖端微探针细胞内电极阵列
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765597
Y. Kubota, H. Oi, H. Sawahata, A. Goryu, Yoriko Ando, R. Numano, M. Ishida, T. Kawano
{"title":"A vertically integrated nanoscale tipped microprobe intracellular electrode array","authors":"Y. Kubota, H. Oi, H. Sawahata, A. Goryu, Yoriko Ando, R. Numano, M. Ishida, T. Kawano","doi":"10.1109/MEMSYS.2014.6765597","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765597","url":null,"abstract":"Here we report integration of nanoscale tipped 120-μm-long vertical microprobe electrode (NTE) array and intracellular recordings using a gastrocnemius muscle of a mouse. The tip diameter and curvature radius of the NTE was <; 200 nm, respectively, and the controlled height of the exposed tip section was 4 μm. The impedance of the fabricated NTE exhibited 3.1 MΩ at 1 kHz in saline, with the output/input signal amplitude ratio of 50%. The penetrated NTE into the muscle of a mouse detected the resting membrane potentials with the amplitude of ~ -200 mV, indicating that the NTE device detected intracellular signals from the mouse's muscle. Although we have demonstrated the intracellular recording capability using a muscle, such nanoscale electrodes with a high aspect ratio can be used for multisite intracellular recordings within numerous neuronal tissues including brain slice.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"139 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122346413","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Harbor seal inspired MEMS artificial micro-whisker sensor 海豹启发MEMS人工微须传感器
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765747
A. Kottapalli, M. Asadnia, H. Hans, J. Miao, M. Triantafyllou
{"title":"Harbor seal inspired MEMS artificial micro-whisker sensor","authors":"A. Kottapalli, M. Asadnia, H. Hans, J. Miao, M. Triantafyllou","doi":"10.1109/MEMSYS.2014.6765747","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765747","url":null,"abstract":"Harbor seal whiskers possess a unique geometry along the length of the whisker which is believed to suppress vortex induced vibrations (VIV) in frontal flows. This paper presents the design, fabrication and experimental underwater characterization of a MEMS artificial whisker sensor. A bio-inspired artificial whisker fabricated by stereolithography is installed on a piezoelectric MEMS sensing membrane. Experimental results demonstrate that the whisker sensor is able to detect minute disturbances underwater with a velocity detection limit as low as 193μm/s.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122677426","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 20
Thin-film magnesium as a sacrificial and biodegradable material 薄膜镁作为一种牺牲和可生物降解的材料
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765726
Yang Liu, Jungwoo Park, Jay Han-Chieh Chang, Y. Tai
{"title":"Thin-film magnesium as a sacrificial and biodegradable material","authors":"Yang Liu, Jungwoo Park, Jay Han-Chieh Chang, Y. Tai","doi":"10.1109/MEMSYS.2014.6765726","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765726","url":null,"abstract":"This work reports the study of ebeam-deposited thin-film magnesium (Mg) as a sacrificial and a biodegradable material. We have tested etchants including diluted hydrochloric acid (HCl), saline, and culture medium. Both vertical etching method and channel undercut method are used to characterize the Mg etching properties. The initial results confirm that thin-film Mg is a promising dual sacrificial and biodegradable material. In addition, an etching model, which fits accurately the etching length vs. time over a wide range of HCl concentrations (0.02-1M) is developed. This model is based on diffusion and a combined first-and-second order chemical reaction mechanism.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122709016","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
A paper-based piezoelectric touch pad integrating zinc oxide nanowires 一种集成氧化锌纳米线的纸质压电触控板
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765757
Yu-Hsuan Wang, Xiao Li, Chen Zhao, Xinyu Liu
{"title":"A paper-based piezoelectric touch pad integrating zinc oxide nanowires","authors":"Yu-Hsuan Wang, Xiao Li, Chen Zhao, Xinyu Liu","doi":"10.1109/MEMSYS.2014.6765757","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765757","url":null,"abstract":"This paper describes a new type of paper-based piezoelectric touch pads integrating zinc oxide nanowires (ZnO-NWs), as user interfaces in paper-based electronics. The functionality of the touch pads is enabled by the piezoelectric property of ZnO-NWs grown on paper using a simple hydrothermal method. A piece of ZnO-NW paper with two screen-printed silver electrodes forms a touch button, and touch-induced electric charges from the button is converted into a voltage signal using a charge amplifier circuit. A touch pad consisting of an array of buttons can be readily integrated into paper-based electronic devices, allowing user input of information for various purposes such as programming, identification checking, and gaming. This novel design features ease of fabrication, low cost, and ultra-thin structure, and good compatibility with techniques in printed electronics, which further enriches the tool set available for developing paper-based electronic devices.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122658229","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Fabrication of thin stencil with buffer reservoir utilizing the combination of AZ4620 and SU-8 electroplating molds 利用AZ4620和SU-8电镀模具组合制备带缓冲槽的薄钢板
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765681
Pi-Hsun Chen, Chun-Wei Huang, Che-Hsin Lin
{"title":"Fabrication of thin stencil with buffer reservoir utilizing the combination of AZ4620 and SU-8 electroplating molds","authors":"Pi-Hsun Chen, Chun-Wei Huang, Che-Hsin Lin","doi":"10.1109/MEMSYS.2014.6765681","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765681","url":null,"abstract":"Screen printing is one of the major techniques for producing printing circuit board (PCB) in electronic industry. However, it is difficult to produce small patterns using conventional screen printing technique due to the limitation of the woven mesh. This work successfully develops a novel process for fabricating ultra-thin stencil with a buffer reservoir utilizing the combination of AZ4620 positive photoresist (PR) and SU-8 negative PR as the electroplating molds. The developed ultra-thin stencil is 2.5 μm in thickness, which is much thinner than the typical thickness of the conventional stencils. The stencil is produced with nickel plating process with the hardness and tensile strength of 250 HV and 70 kgf/mm2, respectively. The printing result shows that the developed stencil capable to print high resolution and thin pattern. Good printing results will present in this paper. Silver paste line with the width of around 20 μm can be successfully printed on PET substrate. The method developed in this study provides a simple and low-cost way to produce high resolution metal stencil.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128420874","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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