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2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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An 880 MHz ladder filter formed by arrays of laterally vibrating thin film Lithium Niobate resonators 由横向振动薄膜铌酸锂谐振器阵列构成的880 MHz阶梯滤波器
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765873
S. Gong, G. Piazza
{"title":"An 880 MHz ladder filter formed by arrays of laterally vibrating thin film Lithium Niobate resonators","authors":"S. Gong, G. Piazza","doi":"10.1109/MEMSYS.2014.6765873","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765873","url":null,"abstract":"This paper reports on the first implementation of a ladder filter using Lithium Niobate based laterally vibrating resonator arrays. This demonstration is made possible by optimizing the device design parameters and using a distributed configuration of resonator arrays to simultaneously reduce spurious vibrations and insertion loss in a low impedance RF system. The designed distributed ladder filter, with a chip footprint of 0.5 mm2, consists of 37 resonators that are divided into 3 series and 2 shunt resonator arrays. The fabricated ladder filter based on LN LVRs showed an insertion loss of 3.5 dB and fractional bandwidth of 2.2%.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128483703","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 22
An electret-biased resonant radiation sensor 驻极体偏置谐振辐射传感器
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765738
Seung Seob Lee, C. K. Yoon, S. Song, B. Ziaie
{"title":"An electret-biased resonant radiation sensor","authors":"Seung Seob Lee, C. K. Yoon, S. Song, B. Ziaie","doi":"10.1109/MEMSYS.2014.6765738","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765738","url":null,"abstract":"Resonance-based microcantilevers have been widely explored for various sensing applications. Subjecting the cantilever to an electrets-generated electrostatic field allows for self-resonant sensing of ionizing radiation. This paper reports the development of the resonant radiation sensor consisting of a ZnO microcantilever and a Teflon electret. The electrostatic force generated by the electric field shifts the self-resonant frequency of the cantilever. For a 125 (L), 55 (W), and 4 (T) μm (length) cantilever, the sensor displayed a sensitivity of 24.24Hz/Gy when exposed to 2Gy of gamma radiation.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"103 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128584252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Liquid-filled sealed MEMS capsules fabricated by fluidic self-assembly 流体自组装制备充液密封MEMS胶囊
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765572
M. Mastrangeli, L. Jacot-Descombes, M. Gullo, J. Brugger
{"title":"Liquid-filled sealed MEMS capsules fabricated by fluidic self-assembly","authors":"M. Mastrangeli, L. Jacot-Descombes, M. Gullo, J. Brugger","doi":"10.1109/MEMSYS.2014.6765572","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765572","url":null,"abstract":"We present a new method to encapsulate functional liquids into sealed MEMS capsules by fluidic self-assembly. Self-assembly of 200 μm SU-8 cargos and picoliter liquid co-encapsulation are driven by the interplay of global fluidic drag and short-range capillary forces. The latter ensues from the localized surface-selective precipitation of a photopolymerizable adhesive onto the capsules' rim. Assembly yield higher than 50% is achieved, and can be improved by optimized agitation and shape matching. The method is massively parallel, scalable and compatible with batch MEMS fabrication. It can address a variety of applications, including distributed MEMS, cell encapsulation and drug delivery.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124657310","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Multifunctional integrated sensor in A 2×2 mm epitaxial sealed chip operating in a wireless sensor node 一个2×2毫米外延密封芯片的多功能集成传感器，在无线传感器节点中工作
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765755
C. Roozeboom, V. Hong, C. Ahn, E. Ng, Y. Yang, B. E. Hill, M. Hopcroft, B. Pruitt
{"title":"Multifunctional integrated sensor in A 2×2 mm epitaxial sealed chip operating in a wireless sensor node","authors":"C. Roozeboom, V. Hong, C. Ahn, E. Ng, Y. Yang, B. E. Hill, M. Hopcroft, B. Pruitt","doi":"10.1109/MEMSYS.2014.6765755","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765755","url":null,"abstract":"We present multifunctional integrated sensors (abbreviated MFISES) that combine temperature, humidity, pressure, air speed, chemical gas, magnetic, and acceleration sensing on a single 2×2 mm chip. We fabricate MFISES in a wafer scale encapsulation process (called epi-seal) to hermetically seal the sensor functions with moving parts at low vacuum, and then surface micromachine the environmental sensors on top of the sealed layer. The encapsulation process provides very stable conditions for the pressure, magnetic, and acceleration sensors and enables the deployment of MFISES in dynamic environmental conditions without special packaging post-process. We demonstrate MFISES in a sensor node that combines energy harvesting, power management, and low power electronics to wirelessly transmit sensor data using a cloud-based service. The data can be processed and stored using server-side internet tools and then shared with any internet connected device. MFISES combined with the sensor node hardware demonstrates pivotal enabling technology in the emerging areas of wireless sensor networks and the Internet of Things.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129438050","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Electret-based low power resonator for robust pressure sensor 稳健性压力传感器用驻极体低功率谐振器
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765741
H. Mitsuya, H. Ashizawa, T. Sugiyama, M. Kumemura, M. Ataka, H. Fujita, G. Hashiguchi
{"title":"Electret-based low power resonator for robust pressure sensor","authors":"H. Mitsuya, H. Ashizawa, T. Sugiyama, M. Kumemura, M. Ataka, H. Fujita, G. Hashiguchi","doi":"10.1109/MEMSYS.2014.6765741","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765741","url":null,"abstract":"We have developed a membrane-less pressure sensor based on squeeze-film damping in a 2-μm driving/sensing gap of a silicon ring-shaped resonator. Its sensing range is from sub-atmospheric to over 1MPa; very wide-range pressure measurement is possible with one sensor element. An electret film having the 200-V-bias voltage was incorporated to the resonator; this allows the excitation of the resonator at very low AC voltage. This membrane-less pressure sensor has robust and low power consumption (nW-range) characteristics.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126903657","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
On-chip control of pneumatic-based bistable valve switch 片上控制气动双稳阀开关
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765818
Arnold Chen, T. Pan
{"title":"On-chip control of pneumatic-based bistable valve switch","authors":"Arnold Chen, T. Pan","doi":"10.1109/MEMSYS.2014.6765818","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765818","url":null,"abstract":"Bistable valves are of particular interest due to its capability of remaining in open or closed states without energy consumption. This aspect is appealing for microfluidics transferring from benchside to bedside as input access and controls are limited. In this paper, we present pneumatic-based, bistable valve (BSV) switches for immediate on-chip fluid-flow manipulation without the requirement of external microcontroller circuitries. The applicability of the on-chip controller is demonstrated in a 4-to-1 microfluidic multiplexor. Furthermore, clinical relevance of on-chip BSV switches is displayed in point-of-care ABO blood-typing diagnostic chips.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124203783","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Single proof-mass tri-axial pendulum accelerometers operating in vacuum 在真空中工作的单质量证明三轴摆加速度计
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765565
D. Serrano, Y. Jeong, V. Keesara, W. Sung, F. Ayazi
{"title":"Single proof-mass tri-axial pendulum accelerometers operating in vacuum","authors":"D. Serrano, Y. Jeong, V. Keesara, W. Sung, F. Ayazi","doi":"10.1109/MEMSYS.2014.6765565","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765565","url":null,"abstract":"This paper reports on the design, fabrication and characterization of single proof-mass tri-axial capacitive accelerometers coexisting in a low-pressure environment with high-frequency gyroscopes, for the implementation of monolithic 6-degree-of-freedom inertial measurement units. The accelerometers are designed to operate as quasi-static devices (i.e. non-resonant sensors) in mid vacuum levels (1-10 Torr) by increasing squeeze-film air damping through the use of capacitive nano-gaps (<; 300 nm). Reduced die area is achieved utilizing a pendulum-like structure composed of a 450×450×40 μm3 proof-mass anchored to the substrate by a cross-shaped polysilicon spring. The small capacitive gaps, allow for the design of devices with high resonance frequency (~ 15 kHz) that provide large shock and vibration immunity.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123527314","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Mirrored anodized dielectric for reliable electrowetting 镜面阳极化电介质可靠的电润湿
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765815
Supin Chen, C. Kim
{"title":"Mirrored anodized dielectric for reliable electrowetting","authors":"Supin Chen, C. Kim","doi":"10.1109/MEMSYS.2014.6765815","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765815","url":null,"abstract":"Anodized dielectrics in a mirrored arrangement are proposed and evaluated for the parallel-plate electrowetting-on-dielectric (EWOD) configuration. As valve metal oxides with current rectifying effects, anodized dielectrics previously could only be used for EWOD under a restricted range of voltages. However, in a mirrored configuration, one side of the anodized dielectric pair is expected to always be under the correct bias to restrict current. Both the mirrored and typical configurations were tested with current leakage measurements on anodized alumina samples under cycles of negative and positive bias and a range of electric fields. The mirrored configuration was effective in limiting current leakage over all voltages applied.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"105 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116330306","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A continuous optically-induced cell electroporation device with on-chip medium exchange mechanisms 一种具有片上介质交换机制的连续光诱导细胞电穿孔装置
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765618
Chia-Jung Chang, Ming-Yu Lu, Gwo-Bin Lee
{"title":"A continuous optically-induced cell electroporation device with on-chip medium exchange mechanisms","authors":"Chia-Jung Chang, Ming-Yu Lu, Gwo-Bin Lee","doi":"10.1109/MEMSYS.2014.6765618","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765618","url":null,"abstract":"We present a new design for continuous optically-induced electroporation (OIE) on a microfluidic device, which is capable of replacing culture medium and electroporation buffer in a seamless fashion. The seamless on-chip integration of medium exchange mechanisms and optically-induced electroporation device could avoid critical issues such as cell losses and cell damage during manual operation in the traditional centrifuge system, and is therefore suitable for handling small or rare cell population. Furthermore, the survival rate of the cells could be greatly improved due to this fast, automatic procedure.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116486000","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Etch-hole-assisted energy dispersion for enhancing quality factor in silicon bulk acoustic resonators 提高硅体声谐振器质量因子的蚀刻孔辅助能量色散
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765877
Cheng Tu, Joshua E-Y Lee
{"title":"Etch-hole-assisted energy dispersion for enhancing quality factor in silicon bulk acoustic resonators","authors":"Cheng Tu, Joshua E-Y Lee","doi":"10.1109/MEMSYS.2014.6765877","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765877","url":null,"abstract":"This paper empirically demonstrates how the quality factor (Q) of a width-extensional mode single-crystal silicon bulk-acoustic-resonator (SiBAR) can be enhanced by three times by strategic placement of holes on the structure. The holes serve to disperse the strain energy field concentrated primarily around the nodal lines, ultimately re-distributing strain energy away from the anchors. This in turn reduces anchor loss and thus enhances Q. These results agree well with our finite-element (FE) simulations. We envisage that the concepts reported herein can be extended to even higher performance resonators like piezoelectric aluminum nitride contour mode resonators.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"89 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126321301","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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