An electret-biased resonant radiation sensor

Abstract

Resonance-based microcantilevers have been widely explored for various sensing applications. Subjecting the cantilever to an electrets-generated electrostatic field allows for self-resonant sensing of ionizing radiation. This paper reports the development of the resonant radiation sensor consisting of a ZnO microcantilever and a Teflon electret. The electrostatic force generated by the electric field shifts the self-resonant frequency of the cantilever. For a 125 (L), 55 (W), and 4 (T) μm (length) cantilever, the sensor displayed a sensitivity of 24.24Hz/Gy when exposed to 2Gy of gamma radiation.