2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献_第3页

Dissolvable material for high-aspect-ratio flexible silicon-microwire penetrations 用于高纵横比柔性硅微线渗透的可溶解材料

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765713

S. Yagi, S. Yamagiwa, T. Imashioya, H. Oi, Y. Kubota, M. Ishida, T. Kawano

{"title":"Dissolvable material for high-aspect-ratio flexible silicon-microwire penetrations","authors":"S. Yagi, S. Yamagiwa, T. Imashioya, H. Oi, Y. Kubota, M. Ishida, T. Kawano","doi":"10.1109/MEMSYS.2014.6765713","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765713","url":null,"abstract":"High-aspect-ratio microwire array devices, which penetrates into a biological tissue, have widely been used in neuroscience, offering in vivo/in vitro electrophysiological stimulation and recording, drug delivery (e.g., DNA), and optogenetics applications. As low invasive and safe penetrations, these microwire devices are required to be further miniaturized and flexibility. However, tissue penetration with such high-aspect-ratio and flexible wires is problematic, because the wire buckles during the penetration. Here, we improve the penetration capability of high-aspect-ratio flexible wires by coating a dissolvable material of “silk fibroin” (Fig.1). The silk-fibroin is a material, which dissolves when the surface contacts with a wet biological tissue, resulting in that embedded wires are appeared and penetrated. We demonstrated the silk fibroin coating over high-aspect-ratio silicon-microwires (~720 μm in length), which was fabricated by vapor-liquid-solid (VLS) growth. The 420-μm-long silicon-wire with a ~200-μm-thick silk film exited the stiffness of 4.03 N/m, which is 72% improved value compared to that of the silicon-wires without silk (2.34 N/m). The effects of the silk support on the wire penetration were confirmed by demonstrating the gelatin penetrations. These results suggest that the numerous high-aspect-ratio flexible bioprobes can be penetrated by using the silk support.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126455284","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Micro devices integration with large-area 2D chip-network using stretchable electroplating copper spring 微器件集成与大面积二维芯片网络采用可拉伸电镀铜弹簧

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765846

W. Sung, W. Lai, Chih-Chung Chen, Kevin Huang, W. Fang

引用次数: 4

Integration of heat-transfer resistance measurements onto a digital microfluidic platform towards the miniaturized and automated label-free detection of biomolecular interactions 将传热阻力测量集成到数字微流控平台上，以实现生物分子相互作用的小型化和自动化无标记检测

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765628

E. Pérez-Ruiz, T. Vandenryt, D. Witters, D. Decrop, B. van Grinsven, D. Spasic, P. Wagner, J. Lammertyn

引用次数: 0

Electrostatic generator with free micro-ball and elastic stoppers for low-frequency vibration harvesting 静电发生器与自由微球和弹性塞低频振动收集

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765657

F. Cottone, P. Basset, F. Marty, D. Galayko, L. Gammaitoni, T. Bourouina

引用次数: 12

Increased thermal conductivity polycrystalline diamond for low-dissipation micromechanical resonators 用于低耗散微机械谐振器的高导热多晶金刚石

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765719

H. Najar, A. Thron, C. Yang, S. Fung, K. van Benthem, L. Lin, D. Horsley

引用次数: 7

Multiple size-oriented passive droplet sorting device and basic approach for digital chemical synthesis 面向多粒径的被动液滴分选装置及数字化化学合成的基本方法

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765581

S. Numakunai, Afshan Jamsaid, D. Yoon, T. Sekiguchi, S. Shoji

引用次数: 1

A micro-scale microbial supercapacitor 微型微生物超级电容器

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765651

Hao Ren, H. Tian, T. Ren, J. Chae

引用次数: 1

Micro liquid-based thermo-acoustic transmitter for emitting ultrasound in liquid medium 用于在液体介质中发射超声波的微型液体热声发射机

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765753

Dinh Hoang-Giang, N. Thanh-Vinh, K. Noda, Phan Hoang-Phuong, N. Binh-Khiem, T. Takahata, Kiyoshi Matsumoto, I. Shimoyama

{"title":"Micro liquid-based thermo-acoustic transmitter for emitting ultrasound in liquid medium","authors":"Dinh Hoang-Giang, N. Thanh-Vinh, K. Noda, Phan Hoang-Phuong, N. Binh-Khiem, T. Takahata, Kiyoshi Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2014.6765753","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765753","url":null,"abstract":"We proposed a thermo-acoustic transmitter in liquid using a metal heater covered with silicone oil. Our experiments showed that the structure of silicone oil on metal heater emitted stronger ultrasound compared to the structure of water on metal heater. However, when used in other liquid, the silicone oil must be encapsulated to prevent the mixing of the two liquids. We therefore proposed the device structure of silicone oil on metal heater encapsulated by a thin film of Parylene (1 μm). The acoustic impedance gap between the silicone oil and liquid medium is small, resulting in the reduction of ultrasound reflection at the interface of the two liquids. Therefore, the thermal induction mechanism can emit short ultrasonic pulse without acoustic ringing. Our prototype device was confirmed to be able to emit short ultrasonic pulses (20 μs) over the range of 50-150 kHz. We also confirmed that, compared to the structure of metal heater put directly in water, the proposed structure enhanced the amplitude of the emitted ultrasound by 3 times.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124268973","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Wafer scale fabrication of highly integrated rubidium vapor cells 高集成铷蒸气电池的晶片级制造

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765700

T. Overstolz, J. Haesler, G. Bergonzi, A. Pezous, Pierre-André Clerc, S. Ischer, J. Kaufmann, M. Despont

引用次数: 18

Transient inertial flows: A new degree of freedom for particle focusing in microfluidic channels 瞬态惯性流动:微流体通道中粒子聚焦的新自由度

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765825

Michael H. Winer, A. Ahmadi, K. Cheung

引用次数: 3