驻极体偏置谐振辐射传感器

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI:10.1109/MEMSYS.2014.6765738

Seung Seob Lee, C. K. Yoon, S. Song, B. Ziaie

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引用次数: 3

摘要

基于共振的微悬臂梁已被广泛探索用于各种传感应用。将悬臂置于驻极体产生的静电场中，可以实现电离辐射的自共振传感。本文报道了由氧化锌微悬臂梁和聚四氟乙烯驻极体组成的谐振式辐射传感器的研制。电场产生的静电力使悬臂梁的自谐振频率发生位移。对于长度为125 (L)、55 (W)和4 (T) μm的悬臂梁，当暴露于2Gy的伽马辐射时，传感器的灵敏度为24.24Hz/Gy。

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An electret-biased resonant radiation sensor

Resonance-based microcantilevers have been widely explored for various sensing applications. Subjecting the cantilever to an electrets-generated electrostatic field allows for self-resonant sensing of ionizing radiation. This paper reports the development of the resonant radiation sensor consisting of a ZnO microcantilever and a Teflon electret. The electrostatic force generated by the electric field shifts the self-resonant frequency of the cantilever. For a 125 (L), 55 (W), and 4 (T) μm (length) cantilever, the sensor displayed a sensitivity of 24.24Hz/Gy when exposed to 2Gy of gamma radiation.

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2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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