Simultaneous detection of linear and coriolis accelerations on a mode-matched MEMS gyroscope

Abstract

This paper presents a novel “in operation acceleration sensing and compensation method” for a single-mass mode-matched MEMS gyroscope. In this method, the amplitudes of the sustained residual quadrature signals on the differential sense-mode electrodes are compared to measure the linear acceleration acting on the sense-axis of the gyroscope. By measuring the acceleration acting along the sense-axis, the g-sensitivity of the gyroscope output to these accelerations is mitigated without using a dedicated accelerometer. It has been experimentally demonstrated that the g-sensitivity of the studied gyroscope is substantially reduced from 1.08°/s/g to 0.04°/s/g, and the effect of the linear acceleration on the gyroscope output is highly-suppressed (by 96%) with the use of the compensation method proposed in this work.