Thermopile infrared array sensor for human detector application

This paper reports the design of thermopile infrared sensor for human detector application. Sensitivity and response time of thermopile infrared sensor element are important for human detector application. In order to fulfill the specification, we developed S-shaped structure for thermopile infrared sensor element and fabrication process of chip scale vacuum package for mass production of the thermopile infrared sensors. As the result, 140V/W sensitivity and 17msec response time of the thermopile infrared sensor element are achieved. The thermopile infrared sensor is all fabricated by CMOS processes.