具有可控非线性动力学的纳米光电(NOEM)振荡器

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI:10.1109/MEMSYS.2014.6765878

B. Dong, J. G. Huang, H. Cai, P. Kropelnicki, A. Randles, Y. D. Gu, A. Liu

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引用次数: 1

摘要

本文介绍了一种具有可控非线性动力学特性的纳米光电振荡器。由于光力的非线性特性，光学梯度力驱动的悬臂梁具有很高的非线性。研究了利用光-机械相互作用的振荡器的非线性动力学，并通过改变光信号(包括功率和波长)来控制振荡器的非线性动力学。通过改变光机械系统的失谐条件，振荡器的谐振频率可调谐达50 KHz。它具有潜在的应用，如光学导航传感器，致动器和光开关。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Nano-opto-electro-mechanical (NOEM) oscillator with controllable non-linear dynamics

In this paper, a nano-opto-electro-mechanical (NOEM) oscillator with controllable non-linear dynamics is demonstrated. An optical gradient force driven cantilever shows high non-linearity due to non-linear behavior of the optical force. The non-linear dynamics of the oscillator which utilizes opto-mechanical interaction is well studied and controlled by varying the optical signal, including the power and wavelength. The resonance frequency of the oscillator can be tuned by up to 50 KHz by changing the detuning condition of the opto-mechanical system. It has potential applications such as optical navigation sensors, actuators and optical switches.

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2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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