Finfet with fully PH-responsive HFO2 as highly stable biochemical sensor

Abstract

In this work, highly scaled FinFETs (Fin Field Effect Transistors) are proposed as both sensing and circuit units of a lab-on-a-chip platform. The FinFET-based sensors with an HfO₂ gate oxide demonstrate full pH-response with ΔV_th ≈ 56 mV/pH. High readout sensitivity S_out = ΔI_d/I_d ≈ 43% is achieved in combination with excellent device electronic properties, i.e. SS = 77 mV/dec and I_on/I_off =1.5×10⁶. High long-term stability is proven over 4.5 days with a drift in time limited at 0.14 mV/h.