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2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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2D Photonic-crystals for high spectral conversion efficiency in solar thermophotovoltaics 用于太阳能热光伏高光谱转换效率的二维光子晶体
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765706
A. Lenert, V. Rinnerbauer, D. Bierman, Y. Nam, I. Celanovic, M. Soljačić, E. Wang
{"title":"2D Photonic-crystals for high spectral conversion efficiency in solar thermophotovoltaics","authors":"A. Lenert, V. Rinnerbauer, D. Bierman, Y. Nam, I. Celanovic, M. Soljačić, E. Wang","doi":"10.1109/MEMSYS.2014.6765706","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765706","url":null,"abstract":"We present a novel solar thermophotovoltaic (STPV) device, which for the first time, incorporates a two-dimensional photonic-crystal (2D PhC) absorber-emitter to achieve spectral conversion efficiencies >10%. These results were achieved by tailoring the spectral properties of the absorber-emitter through surface nanostructuring of tantalum (Ta) and minimizing parasitic thermal losses through an innovative vacuum-enclosed experimental setup. By incorporating a sub-bandgap photon reflecting filter on the PV surface and optimizing the absorber-emitter ratio, we present how the demonstrated 2D Ta PhCs enable a realistic STPV configuration to exceed the Shockley-Queisser ultimate efficiency of a 0.55 eV cell.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121058957","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Nano-opto-mechanical memory based on optical gradient force induced bistability 基于光梯度力诱导双稳性的纳米光机械记忆
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765835
B. Dong, J. G. Huang, H. Cai, P. Kropelnicki, A. Randles, Y. D. Gu, A. Liu
{"title":"Nano-opto-mechanical memory based on optical gradient force induced bistability","authors":"B. Dong, J. G. Huang, H. Cai, P. Kropelnicki, A. Randles, Y. D. Gu, A. Liu","doi":"10.1109/MEMSYS.2014.6765835","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765835","url":null,"abstract":"A bistable nano-opto-mechanical memory is designed, fabricated and experimentally demonstrated. A doubly-clamped silicon beam is deformed by optical gradient force generated from the ring resonator. The doubly-clamped silicon beam can be bended due to attractive optical gradient force generated by ring resonator. Due to the non-linear behavior of optical gradient force, the silicon beam has two stable positions which can be switched by controlling the light power transmitted inside the ring resonator. The nano-size of the memory enable for large scale integration, high speed operation and low power consumption. It has other potential applications such as optical switch, logic gate and actuator.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"80 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116338343","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Submicron three-terminal SiGe-based electromechanical ohmic relay 亚微米三端硅基机电欧姆继电器
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765836
M. Ramezani, S. Cosemans, J. de Coster, X. Rottenberg, V. Rochus, H. Osman, H. Tilmans, S. Severi, K. De Meyer
{"title":"Submicron three-terminal SiGe-based electromechanical ohmic relay","authors":"M. Ramezani, S. Cosemans, J. de Coster, X. Rottenberg, V. Rochus, H. Osman, H. Tilmans, S. Severi, K. De Meyer","doi":"10.1109/MEMSYS.2014.6765836","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765836","url":null,"abstract":"This paper demonstrates functional NEM cantilever relays fabricated in a CMOS-compatible low-T (400°C) CVD SiGe process flow. Devices with a length in the micrometer range (<;3μm), a width in the range 0.2-1μm, a thickness and a gap of below 100nm were successfully fabricated and characterized. A high on/off current ratio (of better than 10<sup>8</sup>:1), a subthreshold swing (S) better than 150μV/decade and “essentially zero” off-state leakage current were experimentally observed. A life time of minimum 10<sup>3</sup> switching cycles was demonstrated. A maximum current density of around 10μA/μm<sup>2</sup> without causing stiction due to Joule-heating was found.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"543 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126633630","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Fabrication and characterization of all hydrogel cantilevers for atomic force microscopy applications 用于原子力显微镜应用的所有水凝胶悬臂梁的制造和表征
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765745
I. Lee, Jungchul Lee
{"title":"Fabrication and characterization of all hydrogel cantilevers for atomic force microscopy applications","authors":"I. Lee, Jungchul Lee","doi":"10.1109/MEMSYS.2014.6765745","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765745","url":null,"abstract":"This paper reports a novel method for fabricating hydrogel based microcantilevers by using dynamic mask lithography. A hydrogel, polyethyleneglycol diacrylate (PEGDA), was introduced between two parallel polydimethylsiloxane (PDMS) guides then cured with ultra-violet (UV) exposure to intended shape and size defined by the dynamic mask; an image sent from a PC to a liquid crystal display projector. One PDMS guide has an embedded glass piece which serves as a handle for the microcantilever and the other guide is with or without an inverted pyramid tip mold to fabricate tip-integrated or tipless microcantilevers, respectively. After fabricated hydrogel microcantilevers were thoroughly characterized by using a stylus profilometer and an atomic force microscope (AFM), they were employed for both contact and non-contact mode AFM imaging. In case of non-contact mode, the imaging performance of hydrogel AFM cantilevers was comparable to that of commercial silicon AFM cantilevers.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127201083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Bi-chamber electromagnetic fluidic pump 双腔电磁流控泵
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765703
C. Gudeman, Paul J. Rubel, J. Foster
{"title":"Bi-chamber electromagnetic fluidic pump","authors":"C. Gudeman, Paul J. Rubel, J. Foster","doi":"10.1109/MEMSYS.2014.6765703","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765703","url":null,"abstract":"This paper reports the design, fabrication and characterization of valve and piston motion for a novel bi-chamber fluidic micropump that is electromagnetically actuated. Unique properties of this pump include the ability to pump liquids over a very broad viscosity range (1-5000 mPa-s), extremely small size (0.3mm × 0.6mm × 0.6mm), the capability to be driven by a remote oscillating magnetic field source, fully integrated passive valving, large, straight fluidic paths for low clogging, integrated magnetic flux guides, and a completely monolithic wafer level process to enable low cost manufacturing.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125452189","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Tunable THz filter based on random access metamaterial with liquid metal droplets 基于随机存取金属液滴超材料的可调谐太赫兹滤波器
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765728
Q. Song, W. M. Zhu, W. Zhang, M. Ren, E. M. Chia, A. Liu
{"title":"Tunable THz filter based on random access metamaterial with liquid metal droplets","authors":"Q. Song, W. M. Zhu, W. Zhang, M. Ren, E. M. Chia, A. Liu","doi":"10.1109/MEMSYS.2014.6765728","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765728","url":null,"abstract":"Here we report a tunable THz filter based on random access metamaterial with liquid metal droplet, which is tuned through electrical bias controlled electrowetting effects. The random access metamaterial consists of 80 × 80 micro droplets, which are self-assembled in micro holes array due to lotus effect. The simulation results indicate resonant dip frequency shift of about 0.01THz induced by changing of the droplets shape via electrowetting effect and about 0.6 THz frequency shift when the droplets are connected in different forms. The random access metamaterial is realized through simple fabrication processes and can be tuned easily, which has potential application on tunable filters, tunable beam steering and flat lens.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121506686","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Microfluidic bubble-based gas sensor 微流控气泡气体传感器
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765616
A. Bulbul, Hao-Chieh Hsieh, Hanseup Kim
{"title":"Microfluidic bubble-based gas sensor","authors":"A. Bulbul, Hao-Chieh Hsieh, Hanseup Kim","doi":"10.1109/MEMSYS.2014.6765616","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765616","url":null,"abstract":"This paper reports a new class of a gas sensor that utilizes the variation in bubble sizes when different gases are introduced into a liquid flow to identify gas types. The fabricated device enabled the detection of pentane (3μL) by producing the average bubble size of 130μm3, which showed size reduction by 2.4μm (1.7%) from the background bubble sizes (132.4μm) of nitrogen. The measurement also showed a preliminary correlation between the injection volume and the bubble size: increase in the injection volume of pentane from 3μL to 5μL (66.7% increases) resulted in the bubble size reduction from 1.7% to 2.1% (24% decreases) and the time span increase from 5s to 10s (100% increases).","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127918060","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Interrogating contact-mode silicon carbide (SiC) nanoelectromechanical switching dynamics by ultrasensitive laser interferometry 用超灵敏激光干涉法研究接触模式碳化硅纳米机电开关动力学
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765832
Tina He, Jaesung Lee, Zenghui Wang, P. Feng
{"title":"Interrogating contact-mode silicon carbide (SiC) nanoelectromechanical switching dynamics by ultrasensitive laser interferometry","authors":"Tina He, Jaesung Lee, Zenghui Wang, P. Feng","doi":"10.1109/MEMSYS.2014.6765832","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765832","url":null,"abstract":"We report on initial experimental demonstration of probing the dynamics of nanoscale contacts in robust nanoelectromechanical switches based on silicon carbide (SiC) nanocantilevers. For the first time, we measure the dynamical behavior of contact-mode SiC nanoscale electromechanical switches by directly probing the vibrating tips of the SiC nanocantilevers, using ultrasensitive laser interferometric techniques. First, we devise a novel `pump-and-probe'-type optical technique in which we use an RF-modulated 405nm (blue) laser to excite the SiC cantilevers, while using a 633nm (red) laser interferometer to probe the dynamics of their tips. Second, we directly actuate the SiC devices via their electrostatic gates, while monitoring the cantilevers' motions optically. By actuating the SiC cantilever switches near resonance with increasing amplitudes, we reveal new characteristics in motion dynamics when the devices are making contacts periodically. We demonstrate milli-Volt actuated SiC NEMS with cantilever tips tapping on the contact electrodes periodically, for >10 billion cycles (in `cold' switching mode).","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129145503","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Improved acoustic coupling of air-coupled micromachined ultrasonic transducers 改进空气耦合微机械超声换能器的声耦合
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765750
Stefon E. Shelton, O. Rozen, A. Guedes, Richard J. Przybyla, B. Boser, D. Horsley
{"title":"Improved acoustic coupling of air-coupled micromachined ultrasonic transducers","authors":"Stefon E. Shelton, O. Rozen, A. Guedes, Richard J. Przybyla, B. Boser, D. Horsley","doi":"10.1109/MEMSYS.2014.6765750","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765750","url":null,"abstract":"Phased array imaging with micromachined ultrasound transducer (MUT) arrays is widely used in applications such as ranging, medical imaging, and gesture recognition. In a phased array, the maximum spacing between elements must be less than half of the wavelength to avoid large sidelobes. This places a limit on the maximum transducer size which is not attractive since the acoustic coupling drops rapidly for MUT diameters less than a wavelength. Here, we present a new approach to increase the acoustic coupling of small radius MUTs using an impedance matching resonant tube etched beneath the MUT. Impedance, laser Doppler vibrometer (LDV), and acoustic burst measurements confirm a 350% increase in SPL and 8x higher bandwidth compared to transducers without the impedance matching tube, enabling compact arrays with high fill-factor and efficiency.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133516318","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 33
Magnetostrictive type tactile sensor based on metal embedded polymer architecture 基于金属嵌入聚合物结构的磁致伸缩触觉传感器
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765860
H.C. Chang, W. Sung, H. Hsieh, Jung-Hung Wen, C. Fu, S. Liao, C.-H Lai, W.-C Lai, C.H. Chang, C.-P. Chang, C.-H. Chen, W. Fang
{"title":"Magnetostrictive type tactile sensor based on metal embedded polymer architecture","authors":"H.C. Chang, W. Sung, H. Hsieh, Jung-Hung Wen, C. Fu, S. Liao, C.-H Lai, W.-C Lai, C.H. Chang, C.-P. Chang, C.-H. Chen, W. Fang","doi":"10.1109/MEMSYS.2014.6765860","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765860","url":null,"abstract":"This study presents new process scheme to fabricate polymer structure with embedded metal on silicon substrate. The primary merit of presented process scheme is: simple approach for the integration of 3D structures with different materials (e.g. metal, glass, polymer) on substrate. To demonstrate the feasibility of the proposed process scheme, a tactile sensor design consisting of polymer structure with embedded 3D Ni coil winding is implemented. As the polymer diaphragm deformed by tactile force, the magnetostriction effect of the 3D Ni coil inductor will induce the permeability change. Thus, the permeability change as well as the tactile force can be detected by the inductance variation. Preliminary measurements show the sensitivity of magnetostrictive type tactile sensor based on the proposed metal embedded polymer architecture is near 1.33%/N at the sensing range of 0~1N.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130364120","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
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