Bi-chamber electromagnetic fluidic pump

Abstract

This paper reports the design, fabrication and characterization of valve and piston motion for a novel bi-chamber fluidic micropump that is electromagnetically actuated. Unique properties of this pump include the ability to pump liquids over a very broad viscosity range (1-5000 mPa-s), extremely small size (0.3mm × 0.6mm × 0.6mm), the capability to be driven by a remote oscillating magnetic field source, fully integrated passive valving, large, straight fluidic paths for low clogging, integrated magnetic flux guides, and a completely monolithic wafer level process to enable low cost manufacturing.