Nano-opto-mechanical memory based on optical gradient force induced bistability

Abstract

A bistable nano-opto-mechanical memory is designed, fabricated and experimentally demonstrated. A doubly-clamped silicon beam is deformed by optical gradient force generated from the ring resonator. The doubly-clamped silicon beam can be bended due to attractive optical gradient force generated by ring resonator. Due to the non-linear behavior of optical gradient force, the silicon beam has two stable positions which can be switched by controlling the light power transmitted inside the ring resonator. The nano-size of the memory enable for large scale integration, high speed operation and low power consumption. It has other potential applications such as optical switch, logic gate and actuator.