{"title":"双腔电磁流控泵","authors":"C. Gudeman, Paul J. Rubel, J. Foster","doi":"10.1109/MEMSYS.2014.6765703","DOIUrl":null,"url":null,"abstract":"This paper reports the design, fabrication and characterization of valve and piston motion for a novel bi-chamber fluidic micropump that is electromagnetically actuated. Unique properties of this pump include the ability to pump liquids over a very broad viscosity range (1-5000 mPa-s), extremely small size (0.3mm × 0.6mm × 0.6mm), the capability to be driven by a remote oscillating magnetic field source, fully integrated passive valving, large, straight fluidic paths for low clogging, integrated magnetic flux guides, and a completely monolithic wafer level process to enable low cost manufacturing.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Bi-chamber electromagnetic fluidic pump\",\"authors\":\"C. Gudeman, Paul J. Rubel, J. Foster\",\"doi\":\"10.1109/MEMSYS.2014.6765703\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports the design, fabrication and characterization of valve and piston motion for a novel bi-chamber fluidic micropump that is electromagnetically actuated. Unique properties of this pump include the ability to pump liquids over a very broad viscosity range (1-5000 mPa-s), extremely small size (0.3mm × 0.6mm × 0.6mm), the capability to be driven by a remote oscillating magnetic field source, fully integrated passive valving, large, straight fluidic paths for low clogging, integrated magnetic flux guides, and a completely monolithic wafer level process to enable low cost manufacturing.\",\"PeriodicalId\":312056,\"journal\":{\"name\":\"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-03-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2014.6765703\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2014.6765703","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper reports the design, fabrication and characterization of valve and piston motion for a novel bi-chamber fluidic micropump that is electromagnetically actuated. Unique properties of this pump include the ability to pump liquids over a very broad viscosity range (1-5000 mPa-s), extremely small size (0.3mm × 0.6mm × 0.6mm), the capability to be driven by a remote oscillating magnetic field source, fully integrated passive valving, large, straight fluidic paths for low clogging, integrated magnetic flux guides, and a completely monolithic wafer level process to enable low cost manufacturing.
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