{"title":"Direct laser writing of 3D protein structures with nanoscale feature sizes","authors":"D. Serien, S. Takeuchi","doi":"10.1109/MEMSYS.2014.6765679","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765679","url":null,"abstract":"We report preliminary results of three-dimensional (3D) protein structures with nanoscale feature sizes fabricated by two-photon direct laser writing (DLW). For this fabrication technology, we combine the established DLW technology with previously reported 3D protein structure fabrication by photosensitized crosslinking. We demonstrate the fabrication of 2D and 3D protein structures with nm-sized features. We report dependency of line height and independency of line width on writing parameters within the investigated range. Further, we demonstrate the biocompatibility of protein structures with nanoscale features to NIH/3T3 fibroblasts. This fabrication method enables the creation of biocompatible protein scaffolds down to the nm-range for cell studies and medical application.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115297384","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Nanoelectroporation and controllable intracellular delivery into localized single cell with high transfection and cell viability","authors":"T. Santra, J. Borana, Pen-Cheng Wang, F. Tseng","doi":"10.1109/MEMSYS.2014.6765778","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765778","url":null,"abstract":"Physical introduction of foreign biomolecules such as genes, proteins, DNA and RNA into living cells with high efficiency is a challenging task for biological and therapeutic research. Bulk electroporation technique, where high electric field pulses were applied to millions of cells together in-between two large electrodes, though widely employed, however is nonspecific resulting in variable efficiency with low cell viability. Here we demonstrate controllable nano-electroporation platform for HeLa cell and human Caucasian Gastric Adenocarcinoma (AGS) cell to achieve high efficient bimolecular delivery with high cell viability. Our system consists of 40nm triangular Indium Tin Oxide (ITO) metal tip with 60nm electrode gap to provide high intense electric filed into the local region of the single cell membrane. Therefore biomolecules can be delivered by much enhance electrophoresis and diffusion effects during pulsing process through a small specific nano-region of the single cell, where remaining other area of the cell membrane unaffected. This microfluidic device has great ability to offer spatial, temporal and qualitative dosage control as well as very high transfection efficiency and high cell viability.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"282 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123376343","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Free surface propulsion by electrowetting-assisted ‘Cheerios effect’","authors":"Junqi Yuan, S. Cho","doi":"10.1109/MEMSYS.2014.6765810","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765810","url":null,"abstract":"This paper presents how “Cheerios effect” is combined with EWOD (electrowetting on dielectric) in order to propel floating objects. Cheerios effect is a common phenomenon in which small floating objects are either attracted or repelled by the sidewall. This behavior is known to be highly dependent on the hydrophobicity of the walls. By electrically controlling the hydrophobicity (contact angle) of the sidewalls in the canal and thus distorting the adjacent interfaces, cheerios effect can be electrically controlled to manipulate floating objects. This work first verifies EWOD-assisted cheerios effect on propulsion. Using this effect, a linear propulsion of millimeter-sized floating objects in a canal is achieved. By sequentially applying a voltage to the arrayed EWOD electrodes on the sidewalls and by carefully controlling the time interval between electrode switching, floating objects can be propelled continuously along the mini canals. In addition, the similar propulsion is achieved in an even smaller canal whose dimension is comparable to the capillary length. Finally, circular rotation of floating objects is realized by arranging EWOD electrodes along a circular path and applying electrical signal sequentially.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124967662","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Batch release of monodisperse liposomes triggered by pulsed voltage stimulation","authors":"T. Osaki, K. Kamiya, R. Kawano, S. Takeuchi","doi":"10.1109/MEMSYS.2014.6765675","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765675","url":null,"abstract":"This paper describes a batch release technique for monodisperse liposomes immobilized on a substrate (Fig. 1). A single short-time pulsed voltage to the substrate induced detachment of the arrayed liposomes previously developed. Simultaneous release was observed shortly after the electrical stimulation. The release technique produced monodisperse and solvent-free liposomes freely suspended on the substrate, and allowed manipulation of the liposomes. The technique extends the application of our liposome array platform regarding collection/selection of the liposomes interested.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124586281","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Polymer micromachining based on Cu On Polyimide substrate and its application to flexible MEMS sensor","authors":"Yosuke Niimi, S. Shibata, M. Shikida","doi":"10.1109/MEMSYS.2014.6765694","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765694","url":null,"abstract":"As a way of making a variety of flexible MEMS sensors, we developed a process that uses a Cu On Polyimide (COP) substrate as a starting material and sacrificial Cu etching to produce a cavity and electrical feed-through structures on the substrate. The Cu etching characteristics of an iron (II) chloride solution were studied, and the results confirmed that etching in the depth and side directions strongly depended on the mask pattern and the etching time. A strip-shaped flexible thermal sensor was designed on the basis of the obtained etching results. One heater and two temperature sensors were designed for flow and acceleration sensors applications. The sensing metal on the polyimide thin membrane and the feed-through were successfully fabricated on the COP substrate.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130946918","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope (WA-BRG)","authors":"J. Woo, J. Cho, C. Boyd, K. Najafi","doi":"10.1109/MEMSYS.2014.6765563","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765563","url":null,"abstract":"We present the fused-silica micromachined birdbath resonator gyroscope (μ-BRG) operating in the whole-angle (WA) mode. The key advantages of the whole angle mode operation is rotation angle measurement, large bandwidth, and full-scale range which is needed in detecting the motion of fast-moving objects. The μ-BRG is made with fused silica using a micro blow-torching process and has n = 2 wineglass modes at 10.46 kHz with a small frequency mismatch (Δf = 10 Hz) and a decay time (τ) of 2.2s. The WA-BRG achieves a stable angular gain (Ag) and a large full scale range (700°/s).","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127275261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Subramaniyan, M. Tarhan, S. Karsten, H. Fujita, H. Shintaku, H. Kotera, R. Yokokawa
{"title":"Detection of mutations in the binding domain of tau protein by kinesin-microtubule gliding assay","authors":"S. Subramaniyan, M. Tarhan, S. Karsten, H. Fujita, H. Shintaku, H. Kotera, R. Yokokawa","doi":"10.1109/MEMSYS.2014.6765639","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765639","url":null,"abstract":"Tau protein is a biomarker for neurodegeneration. The microtubule (MT)-tau binding affinity varies according to the type of tau isoform and their degree of phosphorylation. We have utilized the difference in binding affinity of tau protein to MT to be evaluated by kinesin motor protein based MT gliding system, in order to detect and differentiate tau isoforms and their mutants. Evaluation parameters are landing rate and density of MTs on a kinesin-coated surface, and their strong correlation enables us to measure only landing rate to distinguish 2N3R and 2N4R (tau isoforms) and mutants. Secondly; we designed and fabricated a microstructure to detect tau-attached MTs, which is composed of a reservoir, parallel channels and collectors. Increase of fluorescent intensity by accumulation of MTs over time was successfully detected at the collector areas. Sensitive and rapid MT-kinesin based detection of tau isoforms (3R/4R) and mutated tau proteins on a microchip format will aid in differential diagnosis and early detection of neurodegenerative condition such as Alzheimer disease (AD).","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121630007","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Takei, T. Kaneko, K. Noda, Kiyoshi Matsumoto, I. Shimoyama
{"title":"Measuring flow velocity of swallowed liquid in the human pharynx by tongue pressure sensor and swallowing sound sensor","authors":"Y. Takei, T. Kaneko, K. Noda, Kiyoshi Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2014.6765774","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765774","url":null,"abstract":"We measured flow velocity of swallowed liquid passing through pharynx. We put a pressure sensor on a palate to measure tongue pressure when swallowing the liquid. And we put two acoustic sensors on the neck skin in order to measure swallowing sound when liquid passes through the pharynx. From the output of these three sensors, we can know the timing of the liquid passing through each sensor points and can calculate the flow velocity of the swallowed liquid at the pharynx. In this paper, we compare the flow velocity between two swallowing positions, “look forward position” and “look upward position.” As a result, we found that the flow velocity of the “look upward position” was 2.5 times faster than that of “look forward position.”.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121658150","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. Meng, W. Tang, X. Zhang, M. Han, X. M. Sun, W. Liu, H. X. Zhang
{"title":"A high performance triboelectric generator for harvesting low frequency ambient vibration energy","authors":"B. Meng, W. Tang, X. Zhang, M. Han, X. M. Sun, W. Liu, H. X. Zhang","doi":"10.1109/MEMSYS.2014.6765647","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765647","url":null,"abstract":"We present a novel triboelectric generator for vibration energy harvesting based on the mass production manufacture of flexible printed circuit (FPC). 10 pairs of friction surfaces were integrated on the zigzag-shaped FPC structure, which served as an elastic spring in the mass-spring system. This design makes the triboelectric generator simple and easy to be stimulated. Using industrial FPC manufacture makes the fabrication efficient, low-cost and with high yield. Load circuits can be integrated with the generator without additional assembly. The generator can be operated within a large frequency range from 1 Hz to 200 Hz. Low resonant frequency of 16 Hz and wide bandwidth of 37 Hz were achieved. The maximum effective output power of 77.3 μW was obtained with an optimal load of 10 MΩ at 16 Hz with an oscillation amplitude of 2 mm.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"123 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122483383","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
G. Fiorentino, S. Vollebregt, F. Tichelaar, R. Ishihara, P. Sarro
{"title":"3D solid-state supercapacitors obtained by ALD coating of high-density carbon nanotubes bundles","authors":"G. Fiorentino, S. Vollebregt, F. Tichelaar, R. Ishihara, P. Sarro","doi":"10.1109/MEMSYS.2014.6765646","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765646","url":null,"abstract":"A three-dimensional solid-state miniaturized supercapacitor based on double conformal coating of Multiwalled Carbon Nanotubes (MWCNTs) bundles is presented. Atomic Layer Deposition (ALD) is used to deposit Al<sub>2</sub>O<sub>3</sub> as dielectric layer and TiN as high aspect-ratio conformal counter-electrode on 2μm long MWCNTs bundles. The devices are realized using an IC wafer-scale manufacturing process and show a remarkable volumetric capacitance density value of 12mF/cm<sup>3</sup> with high reproducibility (≤0.3E-12F deviation). The small footprint (100μm<sup>2</sup> to 625μm<sup>2</sup>), a thickness of only 2μm, the extremely high capacitance density and the novel and easy-to-integrate fabrication process make it possible to realize high performance energy storage micro-devices.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"148 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122919731","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}