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2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Fully printed, large-scale, high sensitive strain sensor array for stress monitoring of infrastructures 用于基础设施应力监测的全印刷、大型、高灵敏度应变传感器阵列
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765746
Shingo Harada, Wataru Honda, T. Arie, S. Akita, K. Takei
{"title":"Fully printed, large-scale, high sensitive strain sensor array for stress monitoring of infrastructures","authors":"Shingo Harada, Wataru Honda, T. Arie, S. Akita, K. Takei","doi":"10.1109/MEMSYS.2014.6765746","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765746","url":null,"abstract":"We demonstrate a macroscale sensor sheet by fabricating the fully printed, large-scale, and high sensitive strain sensor array on mechanically flexible substrates. This sensor sheet can conformally cover any surfaces for the application of real-time infrastructure stress monitoring as the first proof-of-concept. To realize this concept, a screen printing method is proposed to use by developing an ink for strain sensor. Printed strain sensor array exhibits impressively high sensitivity, and successfully detects two-dimensional strain distribution of small deformation <;10μm.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"159 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132028944","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microfabricated implantable wireless microsystems: Permanent and biodegradable implementations 微制造可植入无线微系统:永久性和可生物降解的实现
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765558
M. Allen
{"title":"Microfabricated implantable wireless microsystems: Permanent and biodegradable implementations","authors":"M. Allen","doi":"10.1109/MEMSYS.2014.6765558","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765558","url":null,"abstract":"The tremendous technological convergence of microfabrication technology, wireless communication technology, and low-power circuitry has opened the possibility of widespread use of microfabricated implantable wireless microsystems. A typical operational mode for these microsystems is to transduce a physiological parameter relevant to a disease state of interest, and wirelessly communicate this parameter external to the body to guide therapy. For chronic disease states, long-term, permanent sensors are of interest; while for acute disease states, biodegradable wireless microsystems may be of interest. Two microsystem examples, permanent pressure sensors for chronic monitoring of patients with congestive heart failure, and biodegradable pressure sensors for acute monitoring of patients with transient conditions, are given.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132044059","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
Micropatterning of bacterial cellulose as degradable substrate for cell culture 细菌纤维素作为细胞培养的可降解底物的微图案
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765691
Yuya Karita, K. Hirayama, H. Onoe, S. Takeuchi
{"title":"Micropatterning of bacterial cellulose as degradable substrate for cell culture","authors":"Yuya Karita, K. Hirayama, H. Onoe, S. Takeuchi","doi":"10.1109/MEMSYS.2014.6765691","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765691","url":null,"abstract":"This paper describes microfabrication of bacterial cellulose membrane. Bacterial cellulose is a nanofibrous cellulosic material produced by the bacteria called Acetobacter xylinum. We micropatterned a bacterial cellulose membrane by utilizing MEMS process. This patterned bacterial cellulose worked as a scaffold for mouse embryonic fibroblast cells: The cells attached and grew on the patterned bacterial cellulose membrane. Moreover, formation of cell cluster was observed by the treatment of cellulose degrading enzyme. We believe that this micropatterned cellulose membrane would be useful as degradable microscaffolds for cell culture.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114251184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Wetting dynamics study of underwater superhydrophobic surfaces through direct meniscus visualization 通过直接半月板可视化研究水下超疏水表面的润湿动力学
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765729
Muchen Xu, Guang-Yi Sun, C. Kim
{"title":"Wetting dynamics study of underwater superhydrophobic surfaces through direct meniscus visualization","authors":"Muchen Xu, Guang-Yi Sun, C. Kim","doi":"10.1109/MEMSYS.2014.6765729","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765729","url":null,"abstract":"We study wetting of an air-filled micro-cavity on hydrophobic surface submerged in water by developing an optically clear sample that makes the location of the liquid-air meniscus inside the cavity visible. The plastron state, i.e., the state of the trapped air under water, is a central issue for the superhydrophobic surface research today because of its importance for many important applications, such as drag reduction. By continuously observing the meniscus on and inside a single trench during the wetting process, we obtain deterministic dynamics of the meniscus for the first time, as opposed to the probabilistic data in the recent studies. Our results confirm that the meniscus is in one of two states - pinned at the mouth of the trench or sliding on the sidewall of the trench, the latter leading to the fully-wetting (i.e., Wenzel) state. Furthermore, the results reveal that the dewetted (i.e., Cassie-Baxter) state can (or cannot) be indefinite if (or unless) the water is saturated with air and the hydrostatic pressure is low enough.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"361 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120961230","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
High aspect ratio, Large area silicon-based gratings for X-ray phase contrast imaging 用于x射线相衬成像的高纵横比、大面积硅基光栅
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765684
J. Baborowski, V. Revol, C. Kottler, R. Kaufmann, P. Niedermann, F. Cardot, A. Dommann, A. Neels, M. Despont
{"title":"High aspect ratio, Large area silicon-based gratings for X-ray phase contrast imaging","authors":"J. Baborowski, V. Revol, C. Kottler, R. Kaufmann, P. Niedermann, F. Cardot, A. Dommann, A. Neels, M. Despont","doi":"10.1109/MEMSYS.2014.6765684","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765684","url":null,"abstract":"This paper reports on the latest developments in the manufacturing of high aspect ratio silicon-based gratings used for X-ray phase contrast imaging (XPCI). Grating-based XPCI provides, in one measurement, unique information about the absorption coefficient, the index of refraction and the microscopic structure of a sample at hard X-ray frequencies. For this reason, XPCI can potentially overcome the limitations of classical absorption-based radiography, notably for weakly absorbing materials. New micro-fabrication processes were developed to manufacture full set of large area and high aspect ratio X-ray gratings with few defects. The complementarity of XPCI with conventional absorption-based radiography was experimentally demonstrated.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121845436","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Concurrent reactive ion etching employing micromachined ionic liquid ion source array
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765677
Ryo Yoshida, M. Hara, H. Oguchi, Tatsuya Suzuki, H. Kuwano
{"title":"Concurrent reactive ion etching employing micromachined ionic liquid ion source array","authors":"Ryo Yoshida, M. Hara, H. Oguchi, Tatsuya Suzuki, H. Kuwano","doi":"10.1109/MEMSYS.2014.6765677","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765677","url":null,"abstract":"This paper describes concurrent reactive ion etching using micro ionic liquid ion source (ILIS) array. The system consists of micro needle emitters and a reservoir for the ionic liquid (IL) of 1-ethyl-3-methylimidazolium tetrafluoroborate ([EMIM]-[BF4]). The ion beam etching of a (100) silicon substrate using the fabricated ILIS array was demonstrated. As a result of mass spectroscopy during the etching, the peaks of SiF+, SiF2+, and SiF3+ were observed. The chemical reaction between the silicon and fluorine based ions from the IL was confirmed. Also, etching rate of the silicon using the ILIS array applying 5.1 kV ion-acceleration voltage was calculated from the etched dimple on the substrate and was 1.5 times larger than that of a conventional focused Ga+ ion beam applying 30 kV ion-acceleration voltage.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125005720","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Dual-mode vertical membrane resonant pressure sensor 双模垂直膜谐振压力传感器
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765588
R. Tabrizian, F. Ayazi
{"title":"Dual-mode vertical membrane resonant pressure sensor","authors":"R. Tabrizian, F. Ayazi","doi":"10.1109/MEMSYS.2014.6765588","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765588","url":null,"abstract":"This paper presents a novel dual-mode resonant pressure sensor operating based on mass loading of air molecules on transversely resonating vertical silicon membranes. Two silicon bulk acoustic resonators (SiBAR) are acoustically coupled through thin vertical membranes, resulting in two high-g resonance modes with small frequency split, but large difference in pressure sensitivity. The membranes are designed to couple 180° out-of-phase vibrations of piezoelectrically-transduced SiBARs through pressure-insensitive extensional Lamb waves and without changing their resonance frequency. The in-phase vibrations, on the other hand, induce a high-order pressure-sensitive transverse flexural resonance in vertical membranes while slightly changing the resonance frequency of SiBAR due to stiffness and mass loading. A combinatorial of the two modes is used as a pressure sensor with an amplified sensitivity. A proof-of-concept device implemented on a 20 μm silicon substrate and activated by a thin aluminum nitride film shows a combinatorial beat frequency (fb) of 1.3 MHz with a linear pressure sensitivity of 346 ppm/kPa over 0-100kPa range.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125151800","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Combined electrical and mechanical coupling for mode-reconfigurable CMOS-MEMS filters 模式可重构CMOS-MEMS滤波器的机电耦合
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765875
Chao-Yu Chen, Ming-Huang Li, C. Chin, Cheng-Syun Li, Sheng-Shian Li
{"title":"Combined electrical and mechanical coupling for mode-reconfigurable CMOS-MEMS filters","authors":"Chao-Yu Chen, Ming-Huang Li, C. Chin, Cheng-Syun Li, Sheng-Shian Li","doi":"10.1109/MEMSYS.2014.6765875","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765875","url":null,"abstract":"This work presents a novel filter scheme which combines both electrical and mechanical coupling mechanisms implemented in a CMOS-MEMS filter to simultaneously attain small percent bandwidth through weakly mechanical link and decent stopband rejection via differentially electrical configuration. As compared to the traditional parallel-class (i.e., electrically-coupled) filters and mechanically-coupled filters, the proposed oxide-rich filter structure features flexible electrical routing and non-conductive mechanical filter couplers, hence enabling common-mode to differential (CIDO) and differential to common-mode (DICO) reconfigurable modes all within a single device. The proposed 8.6-MHz CMOS-MEMS filter has been successfully demonstrated with a narrow passband of 35 kHz (0.41% bandwidth) and stopband rejection more than 20 dB under proper termination.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122421329","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
“assist-free”assembly technique of standing optical devices on soft spring actuator stages 站立式光学器件在软弹簧作动器台上的“无辅助”装配技术
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765669
Y. Oka, R. Shinozaki, K. Terao, Takaaki Suzuki, F. Shimokawa, F. Oohira, H. Takao
{"title":"“assist-free”assembly technique of standing optical devices on soft spring actuator stages","authors":"Y. Oka, R. Shinozaki, K. Terao, Takaaki Suzuki, F. Shimokawa, F. Oohira, H. Takao","doi":"10.1109/MEMSYS.2014.6765669","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765669","url":null,"abstract":"In this study, a new assembly technique of separately fabricated MEMS optical devices on fragile MEMS actuator stages has been developed to realize novel functional optical-MEMS devices. This technique realizes the “assist-free” alignment and fixing of vertically mounted optical devices by combination of “micro spring slider” and “trapezoidal alignment slit”. Various kinds of optical devices can be precisely aligned and stably fixed even on movable actuator stages supported by soft spring suspensions. In the experiments, micro mirrors were attached on electrostatic linear actuators and rotational actuators using this assembly technique, and a small average value of relative-angle error around 4/100 ° was successfully obtained.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132559627","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Very low power consumption MEMS scanner with alkali electret comb drive 极低功耗微机电系统扫描器与碱驻极体梳状驱动
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI: 10.1109/MEMSYS.2014.6765870
T. Sugiyama, M. Aoyama, K. Kawai, G. Hashiguchi
{"title":"Very low power consumption MEMS scanner with alkali electret comb drive","authors":"T. Sugiyama, M. Aoyama, K. Kawai, G. Hashiguchi","doi":"10.1109/MEMSYS.2014.6765870","DOIUrl":"https://doi.org/10.1109/MEMSYS.2014.6765870","url":null,"abstract":"This paper reports the very low power consumption MEMS scanner that utilizes the electrostatic field generated by alkali-ion electret. The alkali-ion electret formed on comb electrodes of the scanner provides built-in potential for the electro-static actuator so that no bias voltage is necessary. The power consumption of prototype MEMS scanner was 0.57 μW (bias voltage: DC 0 V, driving voltage: AC 9 Vpp, deflection angle: 12°, resonance frequency: 1.4 kHz,). It is possible to realize further low power consumption by increasing the force factor of comb-electrodes.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"209 0 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114119350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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