全角模微加工熔融硅水盆谐振陀螺仪(WA-BRG)

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI:10.1109/MEMSYS.2014.6765563

J. Woo, J. Cho, C. Boyd, K. Najafi

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引用次数: 35

摘要

提出了一种全角(WA)工作模式的熔融硅微机械水浴谐振陀螺仪(μ-BRG)。全角度模式操作的关键优点是旋转角度测量、大带宽和全尺寸范围，这是检测快速运动物体运动所需的。μ-BRG采用微吹炬工艺制备，在10.46 kHz具有n = 2个葡萄酒杯模式，频率失配较小(Δf = 10 Hz)，衰减时间为2.2s。WA-BRG实现了稳定的角增益(Ag)和大的满量程(700°/s)。

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Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope (WA-BRG)

We present the fused-silica micromachined birdbath resonator gyroscope (μ-BRG) operating in the whole-angle (WA) mode. The key advantages of the whole angle mode operation is rotation angle measurement, large bandwidth, and full-scale range which is needed in detecting the motion of fast-moving objects. The μ-BRG is made with fused silica using a micro blow-torching process and has n = 2 wineglass modes at 10.46 kHz with a small frequency mismatch (Δf = 10 Hz) and a decay time (τ) of 2.2s. The WA-BRG achieves a stable angular gain (Ag) and a large full scale range (700°/s).

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来源期刊

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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