Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope (WA-BRG)

Abstract

We present the fused-silica micromachined birdbath resonator gyroscope (μ-BRG) operating in the whole-angle (WA) mode. The key advantages of the whole angle mode operation is rotation angle measurement, large bandwidth, and full-scale range which is needed in detecting the motion of fast-moving objects. The μ-BRG is made with fused silica using a micro blow-torching process and has n = 2 wineglass modes at 10.46 kHz with a small frequency mismatch (Δf = 10 Hz) and a decay time (τ) of 2.2s. The WA-BRG achieves a stable angular gain (Ag) and a large full scale range (700°/s).