12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094)最新文献

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Comparison of high-frequency performance of quasi-SOI and conventional SOI power MOSFETs 准SOI和传统SOI功率mosfet的高频性能比较
Y. Hiraoka, S. Matsumoto, T. Sakai
{"title":"Comparison of high-frequency performance of quasi-SOI and conventional SOI power MOSFETs","authors":"Y. Hiraoka, S. Matsumoto, T. Sakai","doi":"10.1109/ISPSD.2000.856796","DOIUrl":"https://doi.org/10.1109/ISPSD.2000.856796","url":null,"abstract":"We have compared the radio-frequency performance of quasi-SOI and conventional SOI power MOSFETs based on experimentally obtained results and numerical simulation. The quasi-SOI power MOSFET proved to be superior because the activation of the parasitic bipolar transistor was suppressed. We clarified, through a numerical simulation, that the parasitic bipolar effect causes harmonics generation. Especially, the third-order intermodulation distortion of the quasi-SOI device was about 15 dBc lower than that of the conventional SOI device under 2 GHz operation.","PeriodicalId":260241,"journal":{"name":"12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125657462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-density low on-resistance trench MOSFETs employing oxide spacers and self-align technique for DC/DC converter 采用氧化物间隔片和自对准技术的高密度低导通沟槽mosfet用于DC/DC变换器
Jongdae Kim, T. Rob, Sang-Gi Kim, Q. Song, J. Koo, K. Nam, K. Cho, D. Ma
{"title":"High-density low on-resistance trench MOSFETs employing oxide spacers and self-align technique for DC/DC converter","authors":"Jongdae Kim, T. Rob, Sang-Gi Kim, Q. Song, J. Koo, K. Nam, K. Cho, D. Ma","doi":"10.1109/ISPSD.2000.856848","DOIUrl":"https://doi.org/10.1109/ISPSD.2000.856848","url":null,"abstract":"A new process technique for fabricating very high-density trench MOSFETs using 4 mask layers with oxide spacers and self-align technique is realized. This technique reduces the process steps, trench width, and source and p-body region with a resulting increase in cell density and current driving capability, and decrease in on-resistance as well as cost-effective production capability. Specific on-resistance of 0.41 m/spl Omega/.cm/sup 2/ with a blocking voltage of 43 is obtained.","PeriodicalId":260241,"journal":{"name":"12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132759246","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
The monolithic bidirectional switch (MBS) 单片双向交换机(MBS)
F. Heinke, R. Sittig
{"title":"The monolithic bidirectional switch (MBS)","authors":"F. Heinke, R. Sittig","doi":"10.1109/ISPSD.2000.856815","DOIUrl":"https://doi.org/10.1109/ISPSD.2000.856815","url":null,"abstract":"A new power semiconductor device is introduced which facilitates bidirectional operation. Numerical simulations predict excellent stationary characteristics up to high temperatures. Moreover under all operation conditions the device allows one to adjust the distribution of the electron hole plasma. For instance during turn-off it is possible to control the rate of current decay and the corresponding overvoltage peak.","PeriodicalId":260241,"journal":{"name":"12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133280326","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
A high voltage IGBT and diode chip set designed for the 2.8 kV DC link level with short circuit capability extending to the maximum blocking voltage 一种高压IGBT和二极管芯片组,设计用于2.8 kV直流链路级,具有扩展到最大阻塞电压的短路能力
F. Bauer, N. Kaminski, S. Linder, H. Zeller
{"title":"A high voltage IGBT and diode chip set designed for the 2.8 kV DC link level with short circuit capability extending to the maximum blocking voltage","authors":"F. Bauer, N. Kaminski, S. Linder, H. Zeller","doi":"10.1109/ISPSD.2000.856766","DOIUrl":"https://doi.org/10.1109/ISPSD.2000.856766","url":null,"abstract":"This paper presents the experimental characteristics of a high voltage IGBT and diode chip set designed for safe operation under hard switching conditions at the 2.8 kV DC link level. The fundamental goal of the design is a low cosmic ray induced failure rate for diodes as well as IGBTs at the DC link level. At the same time all the common requirements of low static and dynamic losses as well as wide SOA under turn-off, reverse recovery and short-circuit conditions are fulfilled. The blocking capability of these devices exceeds 4.5 kV by far.","PeriodicalId":260241,"journal":{"name":"12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131517373","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Advantages of thick CVD gate oxide for trench MOS gate structures 厚CVD栅极氧化物用于沟槽MOS栅极结构的优点
K. Nakamura, S. Kusunoki, H. Nakamura, M. Harada
{"title":"Advantages of thick CVD gate oxide for trench MOS gate structures","authors":"K. Nakamura, S. Kusunoki, H. Nakamura, M. Harada","doi":"10.1109/ISPSD.2000.856778","DOIUrl":"https://doi.org/10.1109/ISPSD.2000.856778","url":null,"abstract":"We have done research for the purpose of improving the reliability of trench MOS gate devices that utilize trench gate oxide over 10 nm in thickness. This paper reports, for the first time, that the CVD gate oxide (CGO) film is much more effective as a gate dielectric for use in trench MOS gate devices than the thermal oxide widely used in the SiO/sub 2/ gate dielectric of MOS gate devices. Our results show that the electrical characteristics (leakage characteristic and Time-Zero Dielectric Breakdown characteristic), the reliability and current drivability of trench MOS gate devices can be dramatically improved by CVD gate oxide (especially oxynitride CGO). These improvements are caused by the excellent uniformity of thickness and the good quality of gate oxide which formed on an inner trench with the specific geometrical factor. From the viewpoint of insuring the reliability for large trench capacitor area, this new CGO dielectric is a promising candidate for trench MOS gate power devices.","PeriodicalId":260241,"journal":{"name":"12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094)","volume":"2015 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127777837","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Comparison between finite-element and analytical calculations for the lifetime estimation of bond wires in IGBT modules IGBT模块中键合导线寿命估算的有限元计算与解析计算的比较
C. Hager, A. Stuck, Y. Tronel, R. Zehringer, W. Fichtner
{"title":"Comparison between finite-element and analytical calculations for the lifetime estimation of bond wires in IGBT modules","authors":"C. Hager, A. Stuck, Y. Tronel, R. Zehringer, W. Fichtner","doi":"10.1109/ISPSD.2000.856828","DOIUrl":"https://doi.org/10.1109/ISPSD.2000.856828","url":null,"abstract":"Coffin-Manson fatigue law based lifetime estimations of aluminum bond wires in IGBT modules under field conditions were performed. The models were calibrated with fatigue data obtained from accelerated lifetime tests and plastic strain computations corresponding to test conditions. The calibrated laws were then used to predict the bond wire lifetime under field conditions. To evaluate the influence of the plastic strain calculations, finite-element and analytical computations were performed and the resulting lifetimes compared.","PeriodicalId":260241,"journal":{"name":"12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133657811","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
High performance 300 V IGBTs 高性能300v光管
P. Shenoy, J. Yedinak, J. Gladish
{"title":"High performance 300 V IGBTs","authors":"P. Shenoy, J. Yedinak, J. Gladish","doi":"10.1109/ISPSD.2000.856810","DOIUrl":"https://doi.org/10.1109/ISPSD.2000.856810","url":null,"abstract":"In this paper, we report for the first time, the measured characteristics of a low loss, high speed IGBT designed for 300 V operation. The optimized 300 V IGBTs exhibit a low Vce/sub (sat)/ of 1.35 V and an extremely fast fall time of less than 20 ns at a current density of 120 A/cm/sup 2/ and a junction temperature of 150/spl deg/C. This extremely fast switching results in an E/sub off/ of less than 5 /spl mu/J/A at 150/spl deg/C which is comparable to that of a MOSFET. The IGBT has a maximum operating frequency of greater than 400 kHz at rated current. These new 300 V IGBTs exhibit lower total losses than a 250 V MOSFET at operating frequencies as high as 350 kHz. The IGBT is also optimized for UIS capability and has a single pulse avalanche energy capability in excess of 3 J/cm/sup 2/ at rated current.","PeriodicalId":260241,"journal":{"name":"12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094)","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132281235","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A 0.35 /spl mu/m CMOS based smart power technology for 7 V-50 V applications 基于CMOS的智能电源技术,适用于7 V-50 V的应用
V. Parthasarathy, R. Zhu, M. Ger, V. Khemka, A. Bose, R. Baird, T. Roggenbauer, D. Collins, S. Chang, P. Hui, M. Zunino
{"title":"A 0.35 /spl mu/m CMOS based smart power technology for 7 V-50 V applications","authors":"V. Parthasarathy, R. Zhu, M. Ger, V. Khemka, A. Bose, R. Baird, T. Roggenbauer, D. Collins, S. Chang, P. Hui, M. Zunino","doi":"10.1109/ISPSD.2000.856834","DOIUrl":"https://doi.org/10.1109/ISPSD.2000.856834","url":null,"abstract":"This paper describes a 0.35 /spl mu/m smart power technology that enables integration of a diverse set of analog and high-voltage power components in a 0.35 /spl mu/m CMOS logic platform for a broad range of voltage applications from 7 V to 50 V.","PeriodicalId":260241,"journal":{"name":"12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132761611","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
A novel free wheeling diode for 1700 V IGBT module 一种用于1700 V IGBT模块的新型自由旋转二极管
N. Iwamuro, F. Nagaune, T. Iwaana, Y. Seki
{"title":"A novel free wheeling diode for 1700 V IGBT module","authors":"N. Iwamuro, F. Nagaune, T. Iwaana, Y. Seki","doi":"10.1109/ISPSD.2000.856829","DOIUrl":"https://doi.org/10.1109/ISPSD.2000.856829","url":null,"abstract":"A novel free wheeling diode with its blocking capability of 1700 V is presented to realize an excellent trade-off characteristic between a forward voltage drop and a reverse recovery loss, for the first time. A superior forward voltage drop (Vf) of 1.85 V with the reverse recovery loss (Err) of 13.0 mJ is successfully achieved (a rated current is set at 100 amperes). These values of Vf and Err indicate the much superior trade-off characteristic to the conventional FWD. Furthermore, it should be noted that the newly developed FWD achieves a positive temperature coefficient of Vf, which is more advantageous for parallel connection of an IGBT module.","PeriodicalId":260241,"journal":{"name":"12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114257294","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Low voltage CMOS compatible power MOSFET for on-chip DC/DC converters 用于片上DC/DC转换器的低压CMOS兼容功率MOSFET
S. Nassif-Khalil, S. Honarkhah, C. Salama
{"title":"Low voltage CMOS compatible power MOSFET for on-chip DC/DC converters","authors":"S. Nassif-Khalil, S. Honarkhah, C. Salama","doi":"10.1109/ISPSD.2000.856769","DOIUrl":"https://doi.org/10.1109/ISPSD.2000.856769","url":null,"abstract":"1 A lateral Power MOSFET switch, implemented in a 0.25 /spl mu/m-5 metal CMOS process and suitable for high-frequency switch mode on-chip DC/DC converters is described in this paper. The fabricated device has an active chip area of 130 /spl mu/m/spl times/130 /spl mu/m and exhibits an on-resistance of 40.37 m/spl Omega/ (a specific on-resistance of 6.82 /spl mu//spl Omega/cm/sup 2/) and a total gate charge of 0.105 nC at V/sub GS/=3.3 V.","PeriodicalId":260241,"journal":{"name":"12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114365104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
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