Thin Solid FilmsPub Date : 2025-02-19DOI: 10.1016/j.tsf.2025.140635
Myung Mo Ahn , Se Jun Park , Boyoung Shim , Seungmin Moon , Song Yi Baek , Changsoo Lee , Jaehyun Kim , Chulhwan Choi
{"title":"Stress control in thick hydrogenated amorphous carbon films to mitigate stress-induced defects in semiconductor processes","authors":"Myung Mo Ahn , Se Jun Park , Boyoung Shim , Seungmin Moon , Song Yi Baek , Changsoo Lee , Jaehyun Kim , Chulhwan Choi","doi":"10.1016/j.tsf.2025.140635","DOIUrl":"10.1016/j.tsf.2025.140635","url":null,"abstract":"<div><div>This study addresses stress-induced defects in hydrogenated amorphous carbon layers (ACL) used as hard masks in Vertical NAND (VNAND) memory fabrication. The addition of N<sub>2</sub> gas during ACL deposition enabled precise control of stress in ACL films deposited at high temperatures. This stress control reduced the film's tensile stress, thereby mitigating arcing defects and delamination issues caused by high stress. It was confirmed that film stress was controlled by changes in hydrogen content and adjustments to the coefficient of thermal expansion without adversely affecting other film properties from the analyses of Raman spectroscopy and Fourier transform infrared spectroscopy. This approach has been demonstrated to enhance productivity and yield in high-volume semiconductor manufacturing. Our findings provide valuable insights for managing film stress in next-generation semiconductor devices, including High Bandwidth Memory and Bonding VNAND.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"814 ","pages":"Article 140635"},"PeriodicalIF":2.0,"publicationDate":"2025-02-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143452919","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thin Solid FilmsPub Date : 2025-02-18DOI: 10.1016/j.tsf.2025.140629
Yang Xiang , Xinru Zhang , Chan Yang , Shuanglong Feng
{"title":"Electrochemical modulation of Te material morphology and performance of Si/Te photodetectors","authors":"Yang Xiang , Xinru Zhang , Chan Yang , Shuanglong Feng","doi":"10.1016/j.tsf.2025.140629","DOIUrl":"10.1016/j.tsf.2025.140629","url":null,"abstract":"<div><div>Silicon (Si) material has a lower cost and mature preparation process, epitaxial growth of tellurium (Te) material with narrow bandgap on Si substrate and preparation of Si-based detector can not only broaden the response band of silicon material but also improve the device response speed. In this paper, electrochemical deposition was used to grow Te materials inside a patterned silicon window to prepare Si/Te photodetectors. By regulating the pH of precursor solution and deposition time, the chemical reaction of Te during deposition and the crystal structure under relative conditions were investigated, as well as growing nanowire-type, feather-type, nanosheet-type, and nanorod-type Te materials. Finally, scanning electron microscopy, transmission electron microscopy, and X-ray diffraction methods characterized the Te with different morphologies. Our results illustrate that the higher the pH of the Te material, the slower the reduction reaction rate, and the alkaline condition requires a larger deposition voltage. After photovoltaic testing, all three conditions responded to lasers at 635 nm and 1550 nm wavelengths, which lays the foundation for dual-band Si/Te photodetectors.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"814 ","pages":"Article 140629"},"PeriodicalIF":2.0,"publicationDate":"2025-02-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143471593","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thin Solid FilmsPub Date : 2025-02-18DOI: 10.1016/j.tsf.2025.140632
Khaoula Rahmouni , Ilyas Bensalem , Abdelhamid Benhaya , Nicolas Martin
{"title":"Electrical resistivity, wettability, and structural properties of oriented columnar Mo thin films","authors":"Khaoula Rahmouni , Ilyas Bensalem , Abdelhamid Benhaya , Nicolas Martin","doi":"10.1016/j.tsf.2025.140632","DOIUrl":"10.1016/j.tsf.2025.140632","url":null,"abstract":"<div><div>This work reports on the effects of oblique angle deposition on the microstructure, electrical resistivity, and wettability of molybdenum (Mo) thin films. DC magnetron sputtering deposits Mo on silicon wafers while the substrate inclination angle varies from a = 10° to 80°. A constant film thickness of 800 nm is prepared, whereas the deposition angle α is systematically changed from 0 to 80°. Thin film crystalline structure is analyzed by X-ray diffraction and shows that for a substrate inclination angle lower than 60°, the (110) peak of the bcc Mo phase becomes more pronounced. Grain size and crystallinity decrease as the deposition angle increases, particularly for α higher than 60°, from 12.4 to 8.9 nm. Morphological characteristics of Mo thin films show a significant voided architecture as the substrate inclination angle rises. Oxygen enrichment is also obtained, and Mo films become less conductive with an electrical resistivity increasing by two orders of magnitude as the substrate inclination angle reaches 80°. Using the contact angle technique, it is found that Mo films are hydrophobic with an improved wettability as an angle tends to be glancing, the values of surface free energy were increased from 48.1 and 62.1 mN m<sup>−1</sup>. Results indicate that rather than adjusting the composition of thin films, it is possible to affect their properties by modifying their nanostructured design.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"814 ","pages":"Article 140632"},"PeriodicalIF":2.0,"publicationDate":"2025-02-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143474178","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thin Solid FilmsPub Date : 2025-02-18DOI: 10.1016/j.tsf.2025.140631
Çağrı Durmuş , Uğur Demirkol , Tamer Akan
{"title":"Deposition of zinc oxide/vanadium pentoxide composite thin films by thermionic vacuum arc plasma","authors":"Çağrı Durmuş , Uğur Demirkol , Tamer Akan","doi":"10.1016/j.tsf.2025.140631","DOIUrl":"10.1016/j.tsf.2025.140631","url":null,"abstract":"<div><div>The study involved the deposition of Zinc oxide/vanadium pentoxide (ZnO/V<sub>2</sub>O<sub>5</sub>) composite thin films on the glass substrates using the Thermionic Vacuum Arc (TVA) plasma process. Three methods were employed: (1) ZnO and V<sub>2</sub>O<sub>5</sub> powders were mixed in a 50:50 molar ratio, and plasma was generated in the same crucible (V + <em>Z</em>), (2) V<sub>2</sub>O<sub>5</sub> plasma was deposited first, followed by ZnO (VZ), and (3) ZnO plasma was deposited first, followed by V<sub>2</sub>O<sub>5</sub> (ZV). These deposition processes were performed entirely within the TVA system without removing the samples from the vacuum environment. This approach significantly reduced the risk of contamination and minimized processing time compared to conventional techniques. The structural, elemental, surface morphological, optical, and antibacterial properties of the deposited thin films were extensively investigated. The thin films exhibited primarily amorphous structures with some crystalline formations. Optical analysis revealed a single bandgap of 3.63 eV for the V + <em>Z</em> sample, while VZ and ZV samples displayed dual bandgaps (2.40 eV & 3.48 eV for VZ; 2.48 eV & 3.15 eV for ZV). Antibacterial tests showed that VZ and ZV thin films had superior activity, completely inhibiting <em>Staphylococcus aureus</em> and <em>Escherichia coli</em> after 2 h, compared to the lower inhibition observed with V + <em>Z</em> films. These findings demonstrate the potential of ZnO/ V<sub>2</sub>O<sub>5</sub> composite thin films, particularly layered structures, for applications requiring enhanced antibacterial properties.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"814 ","pages":"Article 140631"},"PeriodicalIF":2.0,"publicationDate":"2025-02-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143445537","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thin Solid FilmsPub Date : 2025-02-14DOI: 10.1016/j.tsf.2025.140630
Daniel Ellis , Maryam Eslami , Daniel V. Krogstad , R. Mohan Sankaran
{"title":"Zirconia-based coatings on mild steel fabricated by atmospheric-pressure plasma processing for corrosion protection","authors":"Daniel Ellis , Maryam Eslami , Daniel V. Krogstad , R. Mohan Sankaran","doi":"10.1016/j.tsf.2025.140630","DOIUrl":"10.1016/j.tsf.2025.140630","url":null,"abstract":"<div><div>Corrosion mitigation of steel by coatings produced from benign and environmentally-friendly alternatives to the toxic and carcinogenic hexavalent chromium systems remains a critical challenge. Here, we demonstrate that zirconia-based coatings can be produced by initially depositing a film from a precursor solution, and subsequently converted to a functional coating using an atmospheric-pressure microwave-powered plasma. The effects of processing parameters including microwave power, precursor concentration, pass spacing, and repetitions were studied by characterizing the morphology and chemical composition of the fabricated coatings using scanning electron microscopy and Fourier transform infrared spectroscopy, respectively. Results show that changing the processing conditions has a complex effect on aspects of the coating including defects and degree of precursor conversion. From our parametric study, we found that the coatings could be optimized by multiple treatment repetitions, small pass spacing, lower precursor concentration in the solution, and higher plasma power. The ability of the coatings to prevent corrosion was assessed by linear polarization resistance measurements. We find six-fold decrease in the corrosion rate compared to a blank test, indicating that our approach is a promising candidate for the creation of corrosion-protective conversion coatings on steel that minimizes the use of harmful chemicals and chemical waste.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"814 ","pages":"Article 140630"},"PeriodicalIF":2.0,"publicationDate":"2025-02-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143452918","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thin Solid FilmsPub Date : 2025-02-13DOI: 10.1016/j.tsf.2025.140627
Chin-Tai Chen, Ya-Han Lee
{"title":"Crossed sprays forming composite thin films and heterogeneous structures for the fabrication of an organic solar cell","authors":"Chin-Tai Chen, Ya-Han Lee","doi":"10.1016/j.tsf.2025.140627","DOIUrl":"10.1016/j.tsf.2025.140627","url":null,"abstract":"<div><div>Nanomaterials and composite thin films at nanometer scales have been studied over decades as electron/hole transport layers and heterogeneous structures of organic solar cells using different manufacturing methods such as blade coating, spin coating, inkjet printing, and spray coating. The optoelectronic performances for fabricating thin-film devices on glass substrates involve the solid nanofilms' electrical and optical properties. Recently, research on composite nanofilms has progressed in pursuit of further enhancing these properties. This paper reports a crossed-spray deposition method to implement it using two atomizers. With the crossed sprays of hole transport layers (HTL) and photoactive layers (PL), the structured nanofilms with multiple components were produced with a higher electrical conductivity and optical absorptance than that formed by a single spray only. The experimental results showed that an organic solar cell comprising the HTL and PL from the crossed sprays was produced with better performances than the single spray. Using crossed sprays employing the composite deposition method, the layer interfaces of the spray deposition films with a high series resistance still need to be reduced to improve the device performance, posing a challenge to the uniform film-forming process.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"814 ","pages":"Article 140627"},"PeriodicalIF":2.0,"publicationDate":"2025-02-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143427712","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thin Solid FilmsPub Date : 2025-02-11DOI: 10.1016/j.tsf.2025.140626
Ding Chen , Wei Dai , Daoxuan Liang , Qimin Wang , Jun Yan
{"title":"Effect of pulse width on the mechanical properties and high-temperature steam oxidation resistance of Cr coatings deposited by high-power impulse magnetron sputtering","authors":"Ding Chen , Wei Dai , Daoxuan Liang , Qimin Wang , Jun Yan","doi":"10.1016/j.tsf.2025.140626","DOIUrl":"10.1016/j.tsf.2025.140626","url":null,"abstract":"<div><div>This study investigates the influence of pulse width parameters on the structural characteristics, mechanical properties, and high-temperature steam oxidation resistance of Cr coatings deposited on Zr-4 alloy using high-power impulse magnetron sputtering (HiPIMS). The findings reveal that all Cr coatings deposited by HiPIMS exhibit a (200) crystal plane preferential growth. Cr coatings deposited with narrow pulse widths possess dense structures with minimal columnar growth. As pulse width increases, the fiber texture of the coating becomes more pronounced, leading to a gradual decrease in hardness and scratch resistance. During steam oxidation at 1200 °C, Cr coatings deposited with wider pulse widths facilitate O diffusion due to enhanced columnar growth. This results in complete oxidation at an early stage, forming a dense oxide layer that impedes further inward O diffusion and outward Zr diffusion. In contrast, Cr coatings deposited with narrower pulse widths effectively slow down internal O diffusion owing to their denser structure. Consequently, a dense oxide layer forms on the surface, further restricting oxygen ingress. However, the remaining Cr layer fails to prevent the outward diffusion of Zr, resulting in the formation of ZrO<sub>2</sub> channels in a lattice pattern, which exacerbates the oxidation of the Zr substrate.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"814 ","pages":"Article 140626"},"PeriodicalIF":2.0,"publicationDate":"2025-02-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143422701","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thin Solid FilmsPub Date : 2025-02-11DOI: 10.1016/j.tsf.2025.140618
Yevhenii Havryliuk , Volodymyr Dzhagan , Oleksandra Ivakhno-Tsehelnyk , Anatolii Karnaukhov , Julia Hann , Oleksandr Selyshchev , Dietrich R.T. Zahn
{"title":"Raman spectra and Seebeck coefficient of Cu2ZnSnS4 nanocrystals/PEDOT:PSS composite films","authors":"Yevhenii Havryliuk , Volodymyr Dzhagan , Oleksandra Ivakhno-Tsehelnyk , Anatolii Karnaukhov , Julia Hann , Oleksandr Selyshchev , Dietrich R.T. Zahn","doi":"10.1016/j.tsf.2025.140618","DOIUrl":"10.1016/j.tsf.2025.140618","url":null,"abstract":"<div><div>Cu<sub>2</sub>ZnSnS<sub>4</sub> (CZTS), especially in the form of nanocrystals (NCs), is very promising as absorber material for thin-film solar cells. Recent studies on CZTS showed thermoelectric (TE) properties as well, making this material attractive for hybrid energy harvesting applications. Here, we investigate composites of CZTS NCs with poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), a widely used conductive polymer with TE properties, which potentially may help to improve the inherently low electrical conductivity of NC films. We focus on the investigation of the Seebeck coefficient of pure PEDOT:PSS and CZTS NCs/PEDOT:PSS composites subject to thermal or flash lamp annealing (FLA). The surface morphology of the obtained films was studied using atomic force microscopy, while structural changes in both the CZTS NCs and the polymer were monitored simultaneously using Raman spectroscopy. For both FLA and thermal annealing, the composite films show improved Seebeck coefficients (20–200 μV/K) compared to pure PEDOT:PSS films (10–18 μV/K) or NCs films (10–30 μV/K).</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"815 ","pages":"Article 140618"},"PeriodicalIF":2.0,"publicationDate":"2025-02-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143480364","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Characterization and comparison of hydrogenated and unhydrogenated amorphous boron carbon nitride films deposited via radio frequency magnetron sputtering","authors":"Ryu Taniguchi, Yusuke Hayashi, Tatsuya Nishida, Yoshiharu Enta, Yushi Suzuki, Yasuyuki Kobayashi, Hideki Nakazawa","doi":"10.1016/j.tsf.2025.140624","DOIUrl":"10.1016/j.tsf.2025.140624","url":null,"abstract":"<div><div>We have prepared amorphous boron carbon nitride (BCN) and hydrogenated amorphous BCN (BCN:H) films via radio frequency magnetron sputtering without and with H<sub>2</sub> and investigated the effects of hydrogen on the properties of the BCN and BCN:H films. The carbon content of the BCN:H films increased slightly with increasing H<sub>2</sub> flow ratio. Raman measurements clarified that the hydrogen dilution prevented the formation of sp<sup>2</sup> carbon clusters. The Fourier transform infrared absorption peaks corresponding to C<img>H<sub>n</sub> stretching vibration modes increased gradually with the hydrogen flow ratio. The optical bandgap and electrical resistivity of the BCN:H films were larger than those of the BCN films. Additionally, the optical bandgap and electrical resistivity of the BCN:H films increased as the H<sub>2</sub> flow ratio increased, probably due to a decrease in sp<sup>2</sup> C<img>C bonding caused by the introduction of hydrogen during deposition, as shown by X-ray photoelectron spectroscopy. It was found that the BCN:H film exhibited a higher resistivity than the BCN film under almost the same optical bandgap. This result suggests that introducing hydrogen reduces defect density in the BCN:H film. The critical load decreased with the H<sub>2</sub> flow ratio owing to increased internal stress. The tribological properties of the BCN:H films were improved with the H<sub>2</sub> flow ratio. The root-mean-square roughness of the films, as estimated from atomic force microscope images, decreased with an increase in the hydrogen flow ratio.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"813 ","pages":"Article 140624"},"PeriodicalIF":2.0,"publicationDate":"2025-02-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143403645","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thin Solid FilmsPub Date : 2025-02-09DOI: 10.1016/j.tsf.2025.140622
Jorge Wanderson Barbosa , Paulo Sérgio Martins , Ernane Rodrigues da Silva , Elhadji Cheikh Talibouya Ba , Pedro Miraglia Firpe , Rubens Lucas de Freitas Filho , Soraia Sandra Pires , Pedro Américo Almeida Magalhães Júnior , André Barros de Mello Oliveira
{"title":"Analysis of the tribological behavior of diamond-like carbon coatings applied to AISI M2 high-speed steel","authors":"Jorge Wanderson Barbosa , Paulo Sérgio Martins , Ernane Rodrigues da Silva , Elhadji Cheikh Talibouya Ba , Pedro Miraglia Firpe , Rubens Lucas de Freitas Filho , Soraia Sandra Pires , Pedro Américo Almeida Magalhães Júnior , André Barros de Mello Oliveira","doi":"10.1016/j.tsf.2025.140622","DOIUrl":"10.1016/j.tsf.2025.140622","url":null,"abstract":"<div><div>Amorphous carbon coatings, known as Diamond-like Carbon (DLC), are thin coatings comprising amorphous carbon with sp<sup>2</sup> (graphite) and sp<sup>3</sup> (diamond) bonds in varying proportions. These coatings are characterized by their high hardness and chemical inertness. Their application aims to effectively enhance the chemical, physical, and mechanical properties of conventional metals used as substrates, providing protection against abrasive and adhesive wear. The development of other DLC coatings is being studied for application under various conditions and on different non-ferrous metal alloys. This study proposes to evaluate and characterize DLC (Type A) and DLC with CrN interlayer (Type B) coatings using techniques such as Raman spectroscopy, X-ray Diffraction, Rockwell C adhesion test, and micro-abrasive wear test. Results showed that the total thickness of the Type B coating was approximately twice that of the Type A coating. Both showed a DLC layer of the a-C:H class. Comparing the crystallinity spectra, a higher level of amorphization was observed in the Type B DLC. In the adhesion test, classes HF2 and HF1, based on VDI 3198 standard, were assigned to the Type A and Type B coatings, respectively. Analyzing the cutting tools, changes in the surface texture on the rake face were observed, where the feed marks were completely covered when the Type B coating was applied. In the micro-abrasive wear test, it was found that the wear coefficients obtained with the coatings represented only 27 % of the value obtained on the high-speed steel substrate, which shows a difference of 63 % in the wear coefficient.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"813 ","pages":"Article 140622"},"PeriodicalIF":2.0,"publicationDate":"2025-02-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143388388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}