Ti-6Al-4V钛合金偏压优化高效低温有源屏等离子体渗氮

IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS
Tao Lai , Hong Gao , Yan Gao
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引用次数: 0

摘要

低温渗氮可以防止基体晶粒长大导致的力学性能劣化。然而,由于固有的缓慢扩散动力学,在这些条件下形成足够厚的氮化物层仍然具有挑战性。本研究提出了一种高效的主动屏等离子体氮化(ASPN)技术,该技术应用于Ti-6Al-4V钛合金,温度为500-600℃,无需任何补充变形处理。在500 ~ 600℃的温度范围内,综合评价了不同偏置电压(400 V和800 V)对渗氮行为的影响。在600℃低温渗氮20 h后,Ti-6Al-4V钛合金表面形成了厚度超过6 μm的化合物层,显著优于传统的等离子体渗氮工艺。对偏置电压的优化大大提高了ASPN工艺的效率。本研究还探讨了偏置电压对ASPN过程的影响。适当的偏置电压有利于氮化物质向样品表面迁移,促进氮化层的生长。然而,过高的偏置电压加剧了离子轰击,增加了对TiN沉积层的蚀刻效果。在对Ti-6Al-4V钛合金进行ASPN处理时,400 V的最优偏置电压最能平衡氮化物的沉积和溅射蚀刻。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High-efficiency low-temperature active screen plasma nitriding by bias voltage optimization of Ti-6Al-4V titanium alloy
Nitriding at low temperatures can prevent the deterioration of mechanical properties by grain growth of metal substrate. However, the formation of a sufficiently thick nitride layer under these conditions remains challenging because of the inherently slow diffusion kinetics. This study presents an efficient active screen plasma nitriding (ASPN) technique applied to a Ti-6Al-4V titanium alloy at low temperatures of 500–600 °C without requiring any supplementary deformation processes. The effects of different bias voltages (400 V and 800 V) on the nitriding behavior within the temperature range of 500–600 °C were comprehensively assessed. A compound layer exceeding 6 μm was formed on the surface of the Ti-6Al-4V titanium alloy after 20 h of nitriding at a low temperature of 600 °C, significantly outperforming conventional plasma nitriding techniques. The optimization of bias voltage greatly enhanced the efficiency of the ASPN process. The study also investigated how the bias voltage influences the ASPN process. Appropriate bias voltages facilitated the migration of nitriding species toward the sample surface and promoted nitride layer growth. However, excessively high bias voltages intensified the ion bombardment, increasing the etching effect on the TiN deposition layer. An optimal bias voltage of 400 V best balanced the deposition and sputter-etching of nitride species during the ASPN treatment of the Ti-6Al-4V titanium alloy.
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来源期刊
Thin Solid Films
Thin Solid Films 工程技术-材料科学:膜
CiteScore
4.00
自引率
4.80%
发文量
381
审稿时长
7.5 months
期刊介绍: Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.
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