{"title":"Ti-6Al-4V钛合金偏压优化高效低温有源屏等离子体渗氮","authors":"Tao Lai , Hong Gao , Yan Gao","doi":"10.1016/j.tsf.2025.140717","DOIUrl":null,"url":null,"abstract":"<div><div>Nitriding at low temperatures can prevent the deterioration of mechanical properties by grain growth of metal substrate. However, the formation of a sufficiently thick nitride layer under these conditions remains challenging because of the inherently slow diffusion kinetics. This study presents an efficient active screen plasma nitriding (ASPN) technique applied to a Ti-6Al-4V titanium alloy at low temperatures of 500–600 °C without requiring any supplementary deformation processes. The effects of different bias voltages (400 V and 800 V) on the nitriding behavior within the temperature range of 500–600 °C were comprehensively assessed. A compound layer exceeding 6 μm was formed on the surface of the Ti-6Al-4V titanium alloy after 20 h of nitriding at a low temperature of 600 °C, significantly outperforming conventional plasma nitriding techniques. The optimization of bias voltage greatly enhanced the efficiency of the ASPN process. The study also investigated how the bias voltage influences the ASPN process. Appropriate bias voltages facilitated the migration of nitriding species toward the sample surface and promoted nitride layer growth. However, excessively high bias voltages intensified the ion bombardment, increasing the etching effect on the TiN deposition layer. An optimal bias voltage of 400 V best balanced the deposition and sputter-etching of nitride species during the ASPN treatment of the Ti-6Al-4V titanium alloy.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"825 ","pages":"Article 140717"},"PeriodicalIF":2.0000,"publicationDate":"2025-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High-efficiency low-temperature active screen plasma nitriding by bias voltage optimization of Ti-6Al-4V titanium alloy\",\"authors\":\"Tao Lai , Hong Gao , Yan Gao\",\"doi\":\"10.1016/j.tsf.2025.140717\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Nitriding at low temperatures can prevent the deterioration of mechanical properties by grain growth of metal substrate. However, the formation of a sufficiently thick nitride layer under these conditions remains challenging because of the inherently slow diffusion kinetics. This study presents an efficient active screen plasma nitriding (ASPN) technique applied to a Ti-6Al-4V titanium alloy at low temperatures of 500–600 °C without requiring any supplementary deformation processes. The effects of different bias voltages (400 V and 800 V) on the nitriding behavior within the temperature range of 500–600 °C were comprehensively assessed. A compound layer exceeding 6 μm was formed on the surface of the Ti-6Al-4V titanium alloy after 20 h of nitriding at a low temperature of 600 °C, significantly outperforming conventional plasma nitriding techniques. The optimization of bias voltage greatly enhanced the efficiency of the ASPN process. The study also investigated how the bias voltage influences the ASPN process. Appropriate bias voltages facilitated the migration of nitriding species toward the sample surface and promoted nitride layer growth. However, excessively high bias voltages intensified the ion bombardment, increasing the etching effect on the TiN deposition layer. An optimal bias voltage of 400 V best balanced the deposition and sputter-etching of nitride species during the ASPN treatment of the Ti-6Al-4V titanium alloy.</div></div>\",\"PeriodicalId\":23182,\"journal\":{\"name\":\"Thin Solid Films\",\"volume\":\"825 \",\"pages\":\"Article 140717\"},\"PeriodicalIF\":2.0000,\"publicationDate\":\"2025-06-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Thin Solid Films\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0040609025001178\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, COATINGS & FILMS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Solid Films","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0040609025001178","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}
High-efficiency low-temperature active screen plasma nitriding by bias voltage optimization of Ti-6Al-4V titanium alloy
Nitriding at low temperatures can prevent the deterioration of mechanical properties by grain growth of metal substrate. However, the formation of a sufficiently thick nitride layer under these conditions remains challenging because of the inherently slow diffusion kinetics. This study presents an efficient active screen plasma nitriding (ASPN) technique applied to a Ti-6Al-4V titanium alloy at low temperatures of 500–600 °C without requiring any supplementary deformation processes. The effects of different bias voltages (400 V and 800 V) on the nitriding behavior within the temperature range of 500–600 °C were comprehensively assessed. A compound layer exceeding 6 μm was formed on the surface of the Ti-6Al-4V titanium alloy after 20 h of nitriding at a low temperature of 600 °C, significantly outperforming conventional plasma nitriding techniques. The optimization of bias voltage greatly enhanced the efficiency of the ASPN process. The study also investigated how the bias voltage influences the ASPN process. Appropriate bias voltages facilitated the migration of nitriding species toward the sample surface and promoted nitride layer growth. However, excessively high bias voltages intensified the ion bombardment, increasing the etching effect on the TiN deposition layer. An optimal bias voltage of 400 V best balanced the deposition and sputter-etching of nitride species during the ASPN treatment of the Ti-6Al-4V titanium alloy.
期刊介绍:
Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.