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2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems最新文献

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Measurement Results of the First Two Chip Silicon Microphone with Low Stress Nickel Membrane Covering Full Audio Range 全音域低应力镍膜双片硅麦克风的测量结果
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805498
S. Junge, F. Jakobs, W. Lang
{"title":"Measurement Results of the First Two Chip Silicon Microphone with Low Stress Nickel Membrane Covering Full Audio Range","authors":"S. Junge, F. Jakobs, W. Lang","doi":"10.1109/MEMSYS.2009.4805498","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805498","url":null,"abstract":"This paper provides an overview of the development, fabrication and measurement results of a new type of silicon microphone. It mainly consists of a low stress nickel membrane with a nonlinear frequency response and a gold backplate electrode. The microphone can be used as condenser or electret microphone. A sensitivity of -64dBV/Pa at 52V bias was obtained with an air gap of 20¿m and membrane resonance at 20kHz.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"551 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115309584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A New Micro-Four-Point Probe Design for Various Applications 一种适用于各种应用的新型微四点探头设计
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805325
Ji-Kwan Kim, Yan Zhang, Dong-weon Lee
{"title":"A New Micro-Four-Point Probe Design for Various Applications","authors":"Ji-Kwan Kim, Yan Zhang, Dong-weon Lee","doi":"10.1109/MEMSYS.2009.4805325","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805325","url":null,"abstract":"In this paper, we proposed a new micro-four-point-probe (¿4PP) with sharp tips arranged in squire and spacing 20¿m. The ¿4PP consists of a main cantilever and four sub-cantilevers. A thermal actuator based on the bimorph effect is integrated on each sub-cantilever. The four-terminal configuration affords to versatile applications to measure electrical properties. Alternatively, the modified ¿4PP structure can be also used as a micro-gripper to move micro/nano-objects. A spring constant of the fabricated sub-cantilevers is less than 1.5N/m which is suitable for fragile materials. Resistivity measurement on a metal particle is successfully performed using ¿4PP.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"317 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115444621","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
CMOS-Compatible 2-Axis Self-Aligned Vertical Comb-Driven Micromirror for Large Field-of-View Microendoscopes 用于大视场显微内窥镜的cmos兼容两轴自对准垂直梳状驱动微镜
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805558
K. Kumar, X.J. Zhang
{"title":"CMOS-Compatible 2-Axis Self-Aligned Vertical Comb-Driven Micromirror for Large Field-of-View Microendoscopes","authors":"K. Kumar, X.J. Zhang","doi":"10.1109/MEMSYS.2009.4805558","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805558","url":null,"abstract":"A CMOS-compatible 3-mask process for 2-axis self-aligned vertical comb-driven micromirror fabrication is described. Our 1024¿m diameter mirrors exhibit resonance at 2.81kHz, 669Hz, and maximum scan angles of 22°, 12° and 5.0°, 4.5° for resonant and static voltage operation on inner and outer axes. Reflectance confocal images of USAF1951 resolution target and epithelial breast tissue obtained at 3.0fps with 0.49¿m, 4.18¿m lateral and axial resolution over 200×125¿m field of view indicate the potential of these devices for large field-of-view microendoscopes.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"149 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122724943","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Electrodeposition of Permalloy in Deep Silicon Trenches Without Edge-Overgrowth Utilizing Dry Film Photoresist 利用干膜光刻胶在无边缘生长的深硅沟槽中电沉积坡莫合金
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805476
Sangwon Park, D. Senesky, A. Pisano
{"title":"Electrodeposition of Permalloy in Deep Silicon Trenches Without Edge-Overgrowth Utilizing Dry Film Photoresist","authors":"Sangwon Park, D. Senesky, A. Pisano","doi":"10.1109/MEMSYS.2009.4805476","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805476","url":null,"abstract":"An electrodeposition process for embedding NiFe alloys in deep silicon trenches (100 ¿m) without edge-overgrowth was developed by utilizing dry film photoresist as a sacrificial trench top. The dry film photoresist prevented high concentration of current flux at the trench edges during electrodeposition leading to planar deposition topographies. In addition, the effect of the applied current density on material composition of the electrodeposited NiFe film was investigated, and the composition for permalloy (Ni80Fe20) was obtained with a current density of 100 mA/cm2. Furthermore, the B-H response of the electrodeposited permalloy films exhibited a saturation magnetic flux density and relative permeability of 1.23 Tesla and 82, respectively. The electrodeposition technique developed in this work was utilized to fabricate a free-standing MEMS electromagnetic linear actuator composed of silicon and permalloy structures.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122898396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Biomimetic Design and Fabrication of Components for Artificial Hair Cell Sensor 人造毛细胞传感器元件的仿生设计与制造
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805501
H. Lee, B. Lee, T.H. Kwon
{"title":"Biomimetic Design and Fabrication of Components for Artificial Hair Cell Sensor","authors":"H. Lee, B. Lee, T.H. Kwon","doi":"10.1109/MEMSYS.2009.4805501","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805501","url":null,"abstract":"As a part of effort to develop an artificial hair cell (AHC) sensor, we designed and fabricated a high-aspect-ratio/single cilium structure and a mechanoreceptor since they are the most important components for AHC sensor. The high-aspect-ratio single/cilium structure was successfully replicated by means of a hot embossing process with a help of a double-sided mold system. Especially for the high-aspect-ratio microstructure, we have proposed a new concept of a separated micro mold system utilizing LIGA process. A multi-wall carbon nanotube polydimethylsiloxane (MWNT-PDMS) composite was used as a force sensitive resistive of a mechanoreceptor. The top-bottom electrodes type mechanoreceptor was designed since it is more effective than in-plane electrodes type. The performance of the mechanoreceptor was characterized by a nano indentation system.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125265953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A Micromachined Quartz and Steel Pressure Sensor Operating Upto 1000°C and 2000 Torr 微机械石英和钢压力传感器操作高达1000°C和2000 Torr
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805514
S. Wright, Y. Gianchandani
{"title":"A Micromachined Quartz and Steel Pressure Sensor Operating Upto 1000°C and 2000 Torr","authors":"S. Wright, Y. Gianchandani","doi":"10.1109/MEMSYS.2009.4805514","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805514","url":null,"abstract":"This paper describes microdischarge-based pressure sensors which operate by measuring the change, with pressure, in the spatial current distribution of pulsed DC microdischarges. These devices are well-suited for high temperature operation because of the inherently high temperatures of the ions and electrons in the microdischarges, and are designed to allow for unequal expansion of electrodes and substrate during high temperature operation. These sensors use three-dimensional arrays of horizontal bulk metal electrodes embedded in quartz substrates with electrode diameters of 1-2 mm and 50-100 ¿m inter-electrode spacing. The sensors were operated in nitrogen over a range of 10-2,000 Torr, at temperatures as high as 1,000°C. The maximum measured sensitivity was 5,420 ppm/Torr at the low end of the dynamic range and 500 ppm/Torr at the high end, while the temperature coefficient of sensitivity ranged from -925 ppm/K to -550 ppm/K.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129287367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Suspended Membrane Single Crystal Silicon Micro Hotplate for Differential Scanning Calorimetry 悬浮膜单晶硅微热板差示扫描量热法
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805517
J. Lee, C. Spadaccini, E. Mukerjee, W. King
{"title":"Suspended Membrane Single Crystal Silicon Micro Hotplate for Differential Scanning Calorimetry","authors":"J. Lee, C. Spadaccini, E. Mukerjee, W. King","doi":"10.1109/MEMSYS.2009.4805517","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805517","url":null,"abstract":"This paper introduces an array of single crystal silicon micro hotplates for differential scanning calorimetry. Based on heat transfer analysis considering tradeoffs between response time, temperature uniformity, and measurement sensitivity, suspended membrane micro hotplates with full backside release were found to be optimal designs. Due to the requirements of routine sample loading, the size of the heater is 100 or 200 ¿m while the size of the backside membrane cavity is 400 ¿m. Our design achieves a combination of time constant, temperature sensitivity, and heating efficiency that are comparable or superior to previously reported microcalorimeters.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"316 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128865539","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Selectivity and Long-Term Reliability of Resonant Explosive-Vapor-Trace Detection based on Antigen-Antibody Binding 基于抗原-抗体结合的共振爆炸-蒸汽-痕量检测的选择性和长期可靠性
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805382
A. Lin, E. S. Kim
{"title":"Selectivity and Long-Term Reliability of Resonant Explosive-Vapor-Trace Detection based on Antigen-Antibody Binding","authors":"A. Lin, E. S. Kim","doi":"10.1109/MEMSYS.2009.4805382","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805382","url":null,"abstract":"This paper reports experimental results on the selectivity and long-term reliability of the explosive-vapor-trace detection based on antigen-antibody binding on a film bulk acoustic resonator (FBAR). An FBAR coated with specific antibody was shown to be able to detect vapor trace of TNT (Trinitrotoluene) or RDX (Cyclotrimethylenetrinitramine) without any pre-concentrator [1], but its false alarm rate and long-term reliability have never been experimentally investigated. This paper confirms that the anti-TNT coated FBAR sensor indeed responds to TNT vapor very selectively with permanent resonant frequency shift, as expected since an antigen binds only to its specific antibody. Also experimentally obtained is a surprisingly long lifetime (up to a month) of the anti-TNT at room temperature.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"16 22","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120862158","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Stretchable Substrates for the Measurement of Intracellular Calcium Ion Concentration Responding to Mechanical Stress 用于测量细胞内钙离子浓度响应机械应力的可拉伸底物
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805321
Y. Heo, E. Iwase, K. Matsumoto, I. Shimoyama
{"title":"Stretchable Substrates for the Measurement of Intracellular Calcium Ion Concentration Responding to Mechanical Stress","authors":"Y. Heo, E. Iwase, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2009.4805321","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805321","url":null,"abstract":"This paper presents the design, fabrication, and the characterization of a stretchable substrate, achieving the change of intracellular calcium ion concentration by mechanical stress. We propose the stretchable substrate integrated with the air chambers of the pneumatic actuator. We have measured the areal strain depending on input pressure and the intracellular calcium ion concentration increase in response to the mechanical stress. The present stretchable substrate is able to provide the areal strain of 5.21%~12.3% for the input pressure of 34.5kPa~103kPa. We also verified that the present stretchable substrate is able to stimulate cells by the mechanical stress applied through integrins, showing potential feasible application for monitoring the calcium ion influx caused by the mechanical stress.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"187 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121047903","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Lever-Based CMOS-MEMS Probes for Reconfigurable RF IC's 用于可重构射频集成电路的杠杆式CMOS-MEMS探针
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805582
J. Liu, M. Noman, J. Bain, T. E. Schlesinger, G. Fedder
{"title":"Lever-Based CMOS-MEMS Probes for Reconfigurable RF IC's","authors":"J. Liu, M. Noman, J. Bain, T. E. Schlesinger, G. Fedder","doi":"10.1109/MEMSYS.2009.4805582","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805582","url":null,"abstract":"We report on new lever-based CMOS-MEMS electrothermal probes for Memory-Intensive Self-Configuring Integrated Circuits (MISCICs). The MISCIC vision is to use MEMS conductive probes to reconfigure ICs, mainly RF ICs such as inductors, by mechanically addressing and passing current through resistance change (RC) vias embedded within the chip circuitry. The lever-based actuation causes the probe tips to move away from the probe substrate and toward the RC via substrate, which is in contrast to the previous design where actuation caused the tips to move away from the RC via substrate. Two independently actuated probes are located 3 ¿m apart to provide two simultaneous contacts that form a reconfiguration current return path. Thermal management such as dummy heater beams and thermal isolation structures are employed to improve the temperature uniformity and drive efficiency. A statistic semi-sphere model is employed to model the contact.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121291229","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
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