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2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems最新文献

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CMOS-Compatible Surface-Micromachined Test Structure for Determination of Thermal Conductivity of Thin Film Materials based on Seebeck Effect 基于塞贝克效应的薄膜材料热导率测定的cmos兼容表面微加工测试结构
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805459
Z. Wang, P. Fiorini, C. van Hoof
{"title":"CMOS-Compatible Surface-Micromachined Test Structure for Determination of Thermal Conductivity of Thin Film Materials based on Seebeck Effect","authors":"Z. Wang, P. Fiorini, C. van Hoof","doi":"10.1109/MEMSYS.2009.4805459","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805459","url":null,"abstract":"This paper reports the design, modeling, fabrication and measurement of a CMOS-compatible surface-micromachined test structure for the determination of the thermal conductivity of thin films based on the Seebeck effect. The Seebeck effect-based temperature sensing is more advantageous for thin film materials with a relatively large Seebeck coefficient, such as lightly doped poly-Si and poly-SiGe. In this paper, the conceptual design is first analyzed and then verified with finite element modeling. The test structure is fabricated with poly-Si70% Ge30%. Its functionality is demonstrated from experimental results. The sources of the measurement error are discussed and the solutions to minimize the measurement error are proposed.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121923929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Bead-Based Microfluidic Platform Integrated with Optical Detection Devices for Rapid Detection of Genetic Deletion from Saliva 基于微流控平台集成光学检测装置的唾液基因缺失快速检测
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805388
K. Lien, Chien-Ju Liu, P. Kuo, Gwo-Bin Lee
{"title":"Bead-Based Microfluidic Platform Integrated with Optical Detection Devices for Rapid Detection of Genetic Deletion from Saliva","authors":"K. Lien, Chien-Ju Liu, P. Kuo, Gwo-Bin Lee","doi":"10.1109/MEMSYS.2009.4805388","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805388","url":null,"abstract":"This study presents a new magnetic bead-based microfluidic platform for genomic DNA (gDNA) extraction and rapid detection of genetic deletion from saliva samples by using micro-electro-mechanical-systems (MEMS)-based technologies. With the incorporation of several microfluidic devices, a charge-switchable, magnetic bead was used to extract gDNA released from the buccal cells in the saliva samples and collected by a built-in microcoils array. A new normally-closed micropump for liquid delivery and a new self-compensated micro temperature control module for on-chip PCR were all integrated into a single chip. Successful demonstration for detection of the patients with genetic deletion has been achieved by using the proposed microfluidic platform. Consequently, the integrated miniature saliva-based microfluidic system can provide a promising platform for rapid DNA extraction and fast detection of genetic diseases in a shorter period of time automatically.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"247 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123390198","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Surface-Temperature Control of Silicon Nanowires in Dry and Liquid Conditions 干燥和液体条件下硅纳米线的表面温度控制
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805445
Shoichi Akiyama, Y. T. Cheng, J. Fattaccioli, N. Takama, Peter Löw, C. Bergaud, Beomjoon Kim
{"title":"Surface-Temperature Control of Silicon Nanowires in Dry and Liquid Conditions","authors":"Shoichi Akiyama, Y. T. Cheng, J. Fattaccioli, N. Takama, Peter Löw, C. Bergaud, Beomjoon Kim","doi":"10.1109/MEMSYS.2009.4805445","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805445","url":null,"abstract":"In this paper we present the results of surface temperature control of silicon nanowires by using fluorescent thermometry at the nanometer scale. Rhodamine B is one of the stable fluorescent molecules, which rely on the characteristic of temperature-dependent change in fluorescent intensity, and it was used for nano-scale surface temperature sensing interface. The resistive heating on Si nanowires was carried out with applying voltage potential of 6 ~ 12 V. Surface-temperature measurement was performed by converting the changes in fluorescent intensity with calibration curve of Rhodamine B. The temperature at the central line along nanowires increasing from 30 degrees to 35~70 degrees was observed.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123560802","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Piezoresistive Cantilever-based Force-Clamp System for the Study of Mechanotransduction in C. Elegans 基于压阻悬臂力夹紧系统的秀丽隐杆线虫力学转导研究
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805350
S.-J. Park, B. Petzold, M. Goodman, B. Pruitt
{"title":"Piezoresistive Cantilever-based Force-Clamp System for the Study of Mechanotransduction in C. Elegans","authors":"S.-J. Park, B. Petzold, M. Goodman, B. Pruitt","doi":"10.1109/MEMSYS.2009.4805350","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805350","url":null,"abstract":"Understanding how the mechanoreceptor neurons of Caenorhabditis elegans mediate mechanotransduction can unravel how touch works, but new tools are required to quantitatively analyze the relationship between mechanical loading and the physiological response. Here we present a piezoresistive cantilever-based force clamp system that can apply user-defined force profiles to C. elegans. We present a novel MEMS force-clamp system and demonstrate a piezoresistive cantilever with low 1/f noise, low noise floor and high force resolution suitable for these measurements. Initial studies enabled by the system are also discussed.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128297672","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A 2D Electret-Based Resonant Micro Energy Harvester 基于驻极体的二维谐振微能量采集器
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805565
U. Bartsch, J. Gaspar, O. Paul
{"title":"A 2D Electret-Based Resonant Micro Energy Harvester","authors":"U. Bartsch, J. Gaspar, O. Paul","doi":"10.1109/MEMSYS.2009.4805565","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805565","url":null,"abstract":"This paper reports on the integration of several technologies to realize, to our knowledge, the first two-dimensional (2D) electrostatic resonant micro energy generator. In the generator, ambient vibrations lead to the oscillation of the movable parts of two micromachined and assembled substrates. Charged Cytop-based electret structures patterned on these parts and arranged in a variable capacitor configuration translate the oscillations into a displacement current whose energy is harvested. The device results from (i) the design, fabrication and characterization of low-frequency 2D resonators to extract energy from ambient vibrations, (ii) processing, charging and long-term characterization of Cytop as an electret material and (iii) development of a packaging technology based on adhesive bonding using Cytop as well.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123342428","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 34
Pricise Titration Microfluidic System using Sub-Picoliter Droplet Injection 亚皮升液滴滴入微流控系统
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805433
K. Kawai, Masaru Fujii, S. Shoji
{"title":"Pricise Titration Microfluidic System using Sub-Picoliter Droplet Injection","authors":"K. Kawai, Masaru Fujii, S. Shoji","doi":"10.1109/MEMSYS.2009.4805433","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805433","url":null,"abstract":"Precise titration using sub-picoliter droplet injection microfluidic system is proposed. This system can to measure less than 1 picoliter of reagent and to deliver to the micro chamber without diffusion which becomes major concern when the reagent volume is smaller. A prototype device can generate a droplet of 0.8 picoliter (800 femtoliter) in the metering channel of 40 ¿m × 5 ¿m × 4 ¿m, and step-by-step titration by precise reagent injection per two hundred thousand (2.0 × 10¿5) in volume of the micro chamber (157 nanoliter: 1 mm in diameter × 200 ¿m in height).","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114935941","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
TIR-Based Dynamic Liquid-Level and Flow-Rate Sensing and its Application on Centrifugal Microfluidic Platforms 基于红外的动态液位与流量传感及其在离心微流控平台上的应用
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805438
J. Hoffmann, L. Riegger, D. Mark, F. von Stetten, R. Zengerle, J. Ducrée
{"title":"TIR-Based Dynamic Liquid-Level and Flow-Rate Sensing and its Application on Centrifugal Microfluidic Platforms","authors":"J. Hoffmann, L. Riegger, D. Mark, F. von Stetten, R. Zengerle, J. Ducrée","doi":"10.1109/MEMSYS.2009.4805438","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805438","url":null,"abstract":"For the first time we present a technique for the spatio-temporally resolved localization of liquid-gas interfaces on centrifugal microfluidic platforms based on total internal reflection (TIR) at the channel wall. The simple setup consists of a line laser and a linear image sensor array mounted in a stationary instrument. Apart from identifying the presence of (usually unwanted) gas bubbles, the here described online meniscus detection allows to measure liquid volumes with a high precision of 1.9%. Additionally, flow rates and viscosities (range: 1 - 10.7 mPa s) can be sensed even during rotation at frequencies up to 30 Hz with a precision of 4.7% and 4.3 %, respectively.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130641260","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A MEMS Sensor for Continuous Monitoring of Glucose in Subcutaneous Tissue 用于皮下组织葡萄糖连续监测的MEMS传感器
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805391
X. Huang, S. Li, J. Schultz, Q. Wang, Q. Lin
{"title":"A MEMS Sensor for Continuous Monitoring of Glucose in Subcutaneous Tissue","authors":"X. Huang, S. Li, J. Schultz, Q. Wang, Q. Lin","doi":"10.1109/MEMSYS.2009.4805391","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805391","url":null,"abstract":"We present a MEMS sensor for continuous glucose monitoring for diabetes management. The device consists of a microcantilever, which is driven by remote magnetic field and situated in a microchamber separated from the sensing environment by a semi-permeable membrane. As glucose concentration varies, viscosity changes induced by glucose/copolymer binding in a poly(acrylamide-ran-3-acrylamidophenylboronic acid) (PAA-ran-PAAPBA) copolymer solution produce a measurable change in cantilever vibration. The device has been used to measure physiologically relevant glucose concentrations from 0 to 324 mg/dL. The response time of the sensor to glucose concentration changes was 3 minutes and can be further improved with optimized device designs.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131190049","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
A Novel Stress-Gradient-Robust Metal-Contact Switch 一种新型应力梯度坚固金属触点开关
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805310
Hojr Sedaghat-Pisheh, Jung-Mu Kim, Gabriel M. Rebeiz
{"title":"A Novel Stress-Gradient-Robust Metal-Contact Switch","authors":"Hojr Sedaghat-Pisheh, Jung-Mu Kim, Gabriel M. Rebeiz","doi":"10.1109/MEMSYS.2009.4805310","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805310","url":null,"abstract":"This paper presents the design, fabrication and measurements on a new metal-contact RF MEMS switch with low sensitivity to stress gradients and temperature variations. The switch is based on a circular geometry with arc type springs, and results in high contact force, fast switching time, and has excellent microwave performance to ≫ 40 GHz.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"640 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132958505","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Simple and Robust Air Gap-Based MEMS Switch Technology for RF-Applications 射频应用中基于气隙的简单稳健MEMS开关技术
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805518
P. Ekkels, X. Rottenberg, P. Czarnecki, R. Puers, H. Tilmans
{"title":"Simple and Robust Air Gap-Based MEMS Switch Technology for RF-Applications","authors":"P. Ekkels, X. Rottenberg, P. Czarnecki, R. Puers, H. Tilmans","doi":"10.1109/MEMSYS.2009.4805518","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805518","url":null,"abstract":"This paper presents a simple and robust process for fabrication of functional electrostatic RF-MEMS switching devices with lifetimes easily exceeding 108 cycles with unipolar actuation at 100Hz. The device implements a switchable air gap capacitor and is therefore not limited in lifetime by dielectric charging as opposed to contact-type capacitive switches implementing high-k dielectrics. It is shown how these switched capacitors, even though having a capacitance ratio of only 2.8, can still form adequate switching devices and RF-circuits by proper design and combining of these devices with high-Q inductors and transmission lines. The novelty of the proposed process is that it combines a sacrificial layer consisting of a single layer with a single dry etching step for the dimples which define the air gap in the down-state. This airgap is switched by electrostatic actuation of a thick electroplated Nickel bridge-structure. The device is realized in a 4-lithographic steps process with low complexity and high robustness.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130825213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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