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2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems最新文献

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Molecular Muscle based Nano-Electro-Mechanical-Systems (NEMS) 分子肌肉纳米机电系统(NEMS)
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805452
B. K. Juluri, Ajeet Kumar, Yi Liu, T. Ye, Ying-Wei Yang, A. Flood, Lei Fang, J. Stoddart, P. Weiss, T. Huang
{"title":"Molecular Muscle based Nano-Electro-Mechanical-Systems (NEMS)","authors":"B. K. Juluri, Ajeet Kumar, Yi Liu, T. Ye, Ying-Wei Yang, A. Flood, Lei Fang, J. Stoddart, P. Weiss, T. Huang","doi":"10.1109/MEMSYS.2009.4805452","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805452","url":null,"abstract":"Created by a bottom-up approach based on self-assembly and molecular recognition, molecular motors and muscles such as bistable rotaxanes are recognized as promising actuation materials for Micro/Nano Electro-Mechanical-Systems (MEMS/NEMS). In this work, we report a hybrid NEMS actuation device based on electrochemical activation of surface-bound bistable rotaxanes (molecular muscles). This NEMS actuator consists of a micro-cantilever coated with a self-assembled monolayer of redox-active palindromic bistable [3]rotaxane R8+ molecules, and when subjected to oxidizing and reducing electrochemical potential undergoes controllable and reversible bending. This work represents an important step towards the practical realization of artificial molecular muscle based actuators for various NEMS/MEMS applications.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"542 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115114472","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
MEMS Optical Logic NOR Gate using Integrated Tunable Lasers 集成可调谐激光器的MEMS光逻辑NOR门
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805547
B. Liu, H. Cai, X. Zhang, J. Tamil, Q. Zhang, A. Liu
{"title":"MEMS Optical Logic NOR Gate using Integrated Tunable Lasers","authors":"B. Liu, H. Cai, X. Zhang, J. Tamil, Q. Zhang, A. Liu","doi":"10.1109/MEMSYS.2009.4805547","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805547","url":null,"abstract":"This paper presents an optical logic NOR gate constructed by two MEMS tunable lasers and a Fabry-Pérot (FP) laser chip. The key idea is that the FP chip is directly controlled by two tunable optical signals via the physical mechanism of injection locking. Compared with other fiber-based gating mechanisms, this logic operation only depends on the optical power without need for accurate phase matching or polarization control. In experiment, the logic NOR function is demonstrated successfully at 100 Mb/s with an extinction ratio of more than 20 dB, and it has a potential to reach higher speed of 10 Gb/s level. The work demonstrates a MEMS single-chip solution for optical logic gates with the advantages of compact footprint, simple optical alignment and easy integration, and may find potential applications in high-speed all-optical communication networks.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"110 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115726391","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
A 3-D Microfluidic Combinatorial Cell Culture Array 三维微流控组合细胞培养阵列
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805410
M. Liu, Y. Tai
{"title":"A 3-D Microfluidic Combinatorial Cell Culture Array","authors":"M. Liu, Y. Tai","doi":"10.1109/MEMSYS.2009.4805410","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805410","url":null,"abstract":"We present the development of a three-dimensional (3-D), on-glass combinatorial cell culture array chip featured with integrated three-input, eight-output combinatorial mixers and cell culture chambers. The device is designed to simultaneously screen for the effects of multiple compounds and concentrations on cultured cells. Experimentally, we first developed a precise way to characterize the combined compound concentration profile at each chamber with a fluorescence method. We then successfully demonstrated the functionality of the cell assay by culturing neuron cells on this device and screening the ability of three chemicals to attenuate cell death caused by cytotoxic hydrogen peroxide. Based on the same technology, the number of inputs and outputs of the combinatorial mixer can be scaled-up to construct labon-chip devices for performing high-throughput cell-based assay and highly parallel and combinatorial chemical or biochemical reactions with reduced labors, reagents, and time.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124459991","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Development of New Biochemical IC Chip-Set for Real-Time PCR 新型实时PCR生化IC芯片组的研制
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805390
K. Ikuta, Toshio Sasao, Y. Okuda, Kenji Watamura, M. Ikeuchi
{"title":"Development of New Biochemical IC Chip-Set for Real-Time PCR","authors":"K. Ikuta, Toshio Sasao, Y. Okuda, Kenji Watamura, M. Ikeuchi","doi":"10.1109/MEMSYS.2009.4805390","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805390","url":null,"abstract":"We have developed new biochemical IC chip-set which realizes real-time PCR in the finger top size. Unlike conventional ¿-TAS approach, our chip-set has great versatility and portability since all chips are designed in standardized micro-architecture and the fabrication process can be combined with conventional MEMS processes. Combining this chip-set with existing Biochemical IC chip-set family, researchers can easily develop order-made palm-top system for proteomics research, on-site diagnosis, and tailor-made medicine.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124286623","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Electrohydrodynamic Jet Printing Capable of Removing Substrate Effects and Modulating Printing Characteristics 能够消除承印物影响和调节印刷特性的电流体动力喷射印刷
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805425
Jun-sung Lee, Youngjae Kim, B. Kang, Sang-Yoon Kim, Jaehong Park, Jungho Hwang, Yong-Jun Kim
{"title":"Electrohydrodynamic Jet Printing Capable of Removing Substrate Effects and Modulating Printing Characteristics","authors":"Jun-sung Lee, Youngjae Kim, B. Kang, Sang-Yoon Kim, Jaehong Park, Jungho Hwang, Yong-Jun Kim","doi":"10.1109/MEMSYS.2009.4805425","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805425","url":null,"abstract":"Electrohydrodynamic jet printing (EHDP) technique is widely used for the direct writing. However, in the existing EHDP method, the printing characteristics are affected by the printing substrate used, and the printed line width is determined by the geometry of the nozzle. We propose an EHDP method which is capable of (1) removing the effect from the substrate, and (2) controlling the line width through the ON/OFF control of the each nozzle in the nozzle array. Printing characteristics of our EHDP system were examined and successful ON/OFF control of the nozzle array were demonstrated. By using the proposed EHDP, it is expected that stable meniscus regardless of the effect from substrate and different line widths even using the same nozzle can be achieved.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116973926","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A Flexible Regeneration Microelectrode with Cell-Growth Guidance 具有细胞生长引导的柔性再生微电极
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805367
R. Gojo, N. Kotake, Takafumi Suzuki, K. Mabuchi, S. Takeuchi
{"title":"A Flexible Regeneration Microelectrode with Cell-Growth Guidance","authors":"R. Gojo, N. Kotake, Takafumi Suzuki, K. Mabuchi, S. Takeuchi","doi":"10.1109/MEMSYS.2009.4805367","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805367","url":null,"abstract":"In this study we fabricate a cell-guide on a thin disc-shaped probe with numerous microholes to be implanted between the severed stumps of axons; the cell-guide directs the regenerating axons though the holes in our probe (Fig. 1(a)). Since cell growth is greatly influenced by the topography of the substrate [1-3] we design a SU8 microfluidic cell-guide with a particular shape (Fig. 1(b)) to prevent the random spreading of cells by directing cell growth through the holes. This guide may reduce the chance of short-circuits of the probe by cells that span two different electrodes. Furthermore, as the cells are directed to grow through the holes, we can measure their electrical potential with gold electrodes that we micro-fabricate.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117268435","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Micro Liquid Prism 微液棱镜
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805546
Y. Yoshihata, A. Takei, N. Binh-Khiem, T. Kan, E. Iwase, K. Matsumoto, I. Shimoyama
{"title":"Micro Liquid Prism","authors":"Y. Yoshihata, A. Takei, N. Binh-Khiem, T. Kan, E. Iwase, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2009.4805546","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805546","url":null,"abstract":"This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400¿m in diameter and whole size was smaller than 1mm3 was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127079456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Part-to-Part and Part-to-Substrate Magnetic Self-Assembly of Millimeter Scale Components with Angular Orientation 具有角取向的毫米级元件的零件到零件和零件到衬底的磁性自组装
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805471
S. B. Shetye, I. Eskinazi, David P. Arnold
{"title":"Part-to-Part and Part-to-Substrate Magnetic Self-Assembly of Millimeter Scale Components with Angular Orientation","authors":"S. B. Shetye, I. Eskinazi, David P. Arnold","doi":"10.1109/MEMSYS.2009.4805471","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805471","url":null,"abstract":"This paper presents multifunctional self-assembly of millimeter scale components using magnetic forces between permanent micromagnets integrated on the component surfaces. Part-to-part assembly is demonstrated by batch assembly of free-floating 1mm × 1mm × 0.5mm silicon parts in a liquid environment with the assembly yield varying from 88% to 90%. Part-to-substrate assembly is demonstrated by assembling an ordered array on a substrate in a dry environment with the assembly yield varying from 87% to 98%. In both cases, diverse magnetic shapes/patterns are used to control the alignment and angular orientation of the components and assembly times range from 15 - 240 s.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125025913","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
A Novel Telescope with Micromirror for Observation of Transient Luminous Events from Space 一种用于空间瞬变发光事件观测的新型微镜望远镜
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805550
J. H. Park, S. Nam, G. Garipov, J. Jeon, J. Y. Jin, B. Khrenov, J. Kim, M. Kim, Y. Kim, J. Lee, G. Na, I. H. Park, Y. Park, B. Yoo
{"title":"A Novel Telescope with Micromirror for Observation of Transient Luminous Events from Space","authors":"J. H. Park, S. Nam, G. Garipov, J. Jeon, J. Y. Jin, B. Khrenov, J. Kim, M. Kim, Y. Kim, J. Lee, G. Na, I. H. Park, Y. Park, B. Yoo","doi":"10.1109/MEMSYS.2009.4805550","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805550","url":null,"abstract":"A novel type of telescope, a pinhole-like camera with a micromirror array, is introduced for space observation of Transient Luminous Events (TLEs) like gigantic lightning occurring at upper atmosphere currently under question or investigation. The presented telescope has a unique feature of wide field of view (FOV) of surveillance, fast zoom-in and tracking. A high-fill factor, two-axis rotational micromirror array is proposed for the key component of the telescope. To obtain a large static deflection of a mirror, the self-aligned vertical comb-drive actuator is used. Multi-layered structures of a micromirror are fabricated using bulk micromachining techniques, such as deep reactive ion etching and wafer bonding on the full wafer-scale.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126115232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Development of Calibration Standards for the Optical Measurement of In-Plane Displacements of Micromechanical Components 微机械元件面内位移光学测量标定标准的研制
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805305
J. Gaspar, J. Held, G. Pedrini, W. Osten, O. Paul
{"title":"Development of Calibration Standards for the Optical Measurement of In-Plane Displacements of Micromechanical Components","authors":"J. Gaspar, J. Held, G. Pedrini, W. Osten, O. Paul","doi":"10.1109/MEMSYS.2009.4805305","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805305","url":null,"abstract":"The goal of this work is to develop miniaturized reference standards for the optical measurement of inplane displacements serving for the calibration of optical systems used in the production and characterization of MEMS. The proposed devices consist of SOI-based inplane microactuators. The displacements resulting from both mechanical and electrostatic actuations are measured by means of optical techniques such as stroboscopic illumination, laser-deflection method and digital speckle interferometry.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125374734","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
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