Y. Yoshihata, A. Takei, N. Binh-Khiem, T. Kan, E. Iwase, K. Matsumoto, I. Shimoyama
{"title":"Micro Liquid Prism","authors":"Y. Yoshihata, A. Takei, N. Binh-Khiem, T. Kan, E. Iwase, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2009.4805546","DOIUrl":null,"url":null,"abstract":"This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400¿m in diameter and whole size was smaller than 1mm3 was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"74 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2009.4805546","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9
Abstract
This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400¿m in diameter and whole size was smaller than 1mm3 was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.