A Novel Telescope with Micromirror for Observation of Transient Luminous Events from Space

J. H. Park, S. Nam, G. Garipov, J. Jeon, J. Y. Jin, B. Khrenov, J. Kim, M. Kim, Y. Kim, J. Lee, G. Na, I. H. Park, Y. Park, B. Yoo
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引用次数: 1

Abstract

A novel type of telescope, a pinhole-like camera with a micromirror array, is introduced for space observation of Transient Luminous Events (TLEs) like gigantic lightning occurring at upper atmosphere currently under question or investigation. The presented telescope has a unique feature of wide field of view (FOV) of surveillance, fast zoom-in and tracking. A high-fill factor, two-axis rotational micromirror array is proposed for the key component of the telescope. To obtain a large static deflection of a mirror, the self-aligned vertical comb-drive actuator is used. Multi-layered structures of a micromirror are fabricated using bulk micromachining techniques, such as deep reactive ion etching and wafer bonding on the full wafer-scale.
一种用于空间瞬变发光事件观测的新型微镜望远镜
摘要介绍了一种新型望远镜——微镜阵列针孔相机,用于空间观测高层大气中发生的巨大闪电等瞬态发光事件,目前正在研究中。该望远镜具有大视场监视、快速变焦和跟踪等特点。针对望远镜的关键部件,提出了一种高填充系数的双轴旋转微镜阵列。为了获得大的镜面静态偏转,采用了自对准垂直梳状驱动作动器。在全晶圆尺度上,采用深度反应离子刻蚀和晶圆键合等大块微加工技术制备了微镜的多层结构。
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