{"title":"一种适用于各种应用的新型微四点探头设计","authors":"Ji-Kwan Kim, Yan Zhang, Dong-weon Lee","doi":"10.1109/MEMSYS.2009.4805325","DOIUrl":null,"url":null,"abstract":"In this paper, we proposed a new micro-four-point-probe (¿4PP) with sharp tips arranged in squire and spacing 20¿m. The ¿4PP consists of a main cantilever and four sub-cantilevers. A thermal actuator based on the bimorph effect is integrated on each sub-cantilever. The four-terminal configuration affords to versatile applications to measure electrical properties. Alternatively, the modified ¿4PP structure can be also used as a micro-gripper to move micro/nano-objects. A spring constant of the fabricated sub-cantilevers is less than 1.5N/m which is suitable for fragile materials. Resistivity measurement on a metal particle is successfully performed using ¿4PP.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"317 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"A New Micro-Four-Point Probe Design for Various Applications\",\"authors\":\"Ji-Kwan Kim, Yan Zhang, Dong-weon Lee\",\"doi\":\"10.1109/MEMSYS.2009.4805325\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we proposed a new micro-four-point-probe (¿4PP) with sharp tips arranged in squire and spacing 20¿m. The ¿4PP consists of a main cantilever and four sub-cantilevers. A thermal actuator based on the bimorph effect is integrated on each sub-cantilever. The four-terminal configuration affords to versatile applications to measure electrical properties. Alternatively, the modified ¿4PP structure can be also used as a micro-gripper to move micro/nano-objects. A spring constant of the fabricated sub-cantilevers is less than 1.5N/m which is suitable for fragile materials. Resistivity measurement on a metal particle is successfully performed using ¿4PP.\",\"PeriodicalId\":187850,\"journal\":{\"name\":\"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems\",\"volume\":\"317 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-03-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2009.4805325\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2009.4805325","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A New Micro-Four-Point Probe Design for Various Applications
In this paper, we proposed a new micro-four-point-probe (¿4PP) with sharp tips arranged in squire and spacing 20¿m. The ¿4PP consists of a main cantilever and four sub-cantilevers. A thermal actuator based on the bimorph effect is integrated on each sub-cantilever. The four-terminal configuration affords to versatile applications to measure electrical properties. Alternatively, the modified ¿4PP structure can be also used as a micro-gripper to move micro/nano-objects. A spring constant of the fabricated sub-cantilevers is less than 1.5N/m which is suitable for fragile materials. Resistivity measurement on a metal particle is successfully performed using ¿4PP.