2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems最新文献_第6页

Bead-Immobilized Molecular Beacons for High Throughput SNP Genotyping Via a Microfluidic System 微流控系统用于高通量SNP基因分型的珠状固定化分子信标

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805379

R. Sochol, A. Mahajerin, B. Casavant, P. Singh, M. Dueck, L. Lee, L. Lin

引用次数: 6

Fabrication of Biodegradable Microcapsules Utilizing 3D, Surface Modified PDMS Microfluidic Devices 利用三维、表面改性PDMS微流控装置制备可生物降解微胶囊

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805477

C. Liao, Y. Su

引用次数: 0

Stretchable Yarn of Display Elements 显示元件的可拉伸纱线

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805560

S. Takamatsu, Kiyoshi Matsumoto, I. Shimoyama

{"title":"Stretchable Yarn of Display Elements","authors":"S. Takamatsu, Kiyoshi Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2009.4805560","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805560","url":null,"abstract":"We developed the processing technique to form three-dimensionally coiled yarns of display elements from microfabricated organic displays on flat plastic foils in order to realize stretchable electronics. Three dimensional fabrics like sweaters have been much attention as elastic substrates for stretchable electronic devices, but the deposition and patterning of functional materials on the fabric are incompatible to planar process technique of MEMS. To solve this problem, we propose the fabrication technique where firstly display components are constructed on flat plastic foils and the foils are, then, processed to form them into coiled yarns. In detail of the process, organic electrochromic displays are fabricated on the releasable parylene films above the glass. The foils with displays are cut into yarns with dicing cutters and released from the glass. To make yarns stretchable, the resultant foils are spirally rolled around elastic core fibers, forming helical coiled structure. The stretch ratio of the fabricated yarn is tuned with its pitch angle, ranging from 1 to 2. Finally, we demonstrate the projection of the selected one pixel out of 4 pixels both before and after the yarn is stretched at its ratio of 1.3.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"967 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132593540","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

An Electrically-Driven, Large-Deflection, High-Force, Micro Piston Hydraulic Actuator Array for Large-Scale Microfluidic Systems 一种用于大型微流体系统的电驱动、大偏转、高力、微活塞液压执行器阵列

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805424

Hanseup Kim, K. Najafi

引用次数: 22

Piezoelectric PZT Thin Films in the 100nm Range: A Solution for Actuators Embedded in Low Voltage Devices 100nm范围的压电PZT薄膜:嵌入在低压器件中的执行器的解决方案

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805458

E. Defay, G. Le Rhun, F. Perruchot, P. Rey, A. Suhm, M. Aid, L.J. Liu, S. Pacheco, M. Miller

引用次数: 9

Frequency Drift Compensation in Mass-Sensitive Chemical Sensors based on Periodic Stiffness Modulation 基于周期刚度调制的质量敏感化学传感器频率漂移补偿

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805374

K. S. Demirci, Jae Hyeong Seo, S. Truax, L. Beardslee, Y. Luzinova, B. Mizaikoff, O. Brand

引用次数: 5

Electrodeposition of Permalloy in Deep Silicon Trenches Without Edge-Overgrowth Utilizing Dry Film Photoresist 利用干膜光刻胶在无边缘生长的深硅沟槽中电沉积坡莫合金

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805476

Sangwon Park, D. Senesky, A. Pisano

引用次数: 4

Accuracy Enhancement in the In-Plane Dynamic Measurement of MEMS Actuators using a Laser Doppler Vibrometer with a 45°-Angled Optical Fiber 45°角光纤激光多普勒测振仪提高MEMS致动器平面内动态测量精度

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805545

M. G. Kim, K. Jo, Y. S. Park, W. Jang, J. Lee

引用次数: 1

StarJet: Pneumatic Dispensing of Nano- to Picoliter Droplets of Liquid Metal StarJet:气动点胶纳米至皮升液滴的液态金属

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805314

T. Metz, G. Birkle, R. Zengerle, P. Koltay

{"title":"StarJet: Pneumatic Dispensing of Nano- to Picoliter Droplets of Liquid Metal","authors":"T. Metz, G. Birkle, R. Zengerle, P. Koltay","doi":"10.1109/MEMSYS.2009.4805314","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805314","url":null,"abstract":"In this work we present a novel, simple and robust, pneumatically actuated dispenser for nano- to picoliter sized droplets of liquid metals. The so called StarJet dispenser utilizes a star-shaped nozzle geometry that stabilizes plugs of liquid in the centre of the nozzle by capillary force. This minimizes the wall contact of the liquid plug and reduces contact line friction. Individual droplets of liquid metal can be pneumatically generated by interplay of the sheathing gas flow in the outer grooves of the nozzle and the liquid metal. The working principle was first discovered and studied by Computational Fluid Dynamic (CFD) simulations. For experimental validation silicon chips with the star-shaped geometry were fabricated by Deep Reactive Ion Etching (DRIE) and assembled into a printhead. With different nozzle chips volumes between 120 pl and 3.6 nl could be generated at natural frequencies of 90 Hz and 400 Hz. The StarJet can either be operated as drop on demand or as continuous droplet dispenser. We printed columns of metal with 0,5 to 1,0 mm width and 40 mm height (aspect ratio ≫40) to demonstrate the directional stability of the ejection.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134538744","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 21

Ultra-Compact Integration for Fully-Implantable Neural Microsystems 全植入式神经微系统的超紧凑集成

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805360

G. E. Perlin, K. Wise

引用次数: 22