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2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems最新文献

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A Micromachined Thermo-Optic Tunable Laser 微机械热光可调谐激光器
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805561
H. Cai, B. Liu, X. Zhang, W. M. Zhu, J. Tamil, W. Zhang, Q. Zhang, A. Liu
{"title":"A Micromachined Thermo-Optic Tunable Laser","authors":"H. Cai, B. Liu, X. Zhang, W. M. Zhu, J. Tamil, W. Zhang, Q. Zhang, A. Liu","doi":"10.1109/MEMSYS.2009.4805561","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805561","url":null,"abstract":"The paper presents a thermo-optic tunable laser that makes use of a micromachined etalon to form the external cavity. The wavelength tuning is obtained by the thermo-optic effect of the silicon material. In experiment, a wavelength tuning range of 14 nm is demonstrated by applying a heating current of 18.7 mA to a deep-etched silicon etalon of 206 ¿m wide. In the dynamic test, this laser measures a tuning speed of 3.2 ¿s, which is much faster than the typical speed of 1 ms as given by the previous MEMS tunable lasers that rely on the motion of mirrors or gratings. Since this laser is based on a different tuning mechanism of thermo-optic effect and requires no mechanical movement, it possesses many advantages such as fast speed, simple configuration and planar structure, and will broaden the applications of MEMS tunable lasers.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126475151","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Batch Fabrication of Out-of-Plane, IC-Compatible, Nanoscale-Tip Silicon Neuroprobe Arrays 面外、集成电路兼容、纳米级尖端硅神经探针阵列的批量制造
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805359
A. Goryu, A. Ikedo, K. Takei, K. Sawada, T. Kawano, M. Ishida
{"title":"Batch Fabrication of Out-of-Plane, IC-Compatible, Nanoscale-Tip Silicon Neuroprobe Arrays","authors":"A. Goryu, A. Ikedo, K. Takei, K. Sawada, T. Kawano, M. Ishida","doi":"10.1109/MEMSYS.2009.4805359","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805359","url":null,"abstract":"We developed a batch-fabrication of nanoscale-tip silicon microprobe arrays for use in multipoint nanoscale investigations of cell/neuron in-vivo/in-vitro. Sharpened tips, less than 100nm diameter, can be formed at the tips of out-of-plane three-dimensional silicon microprobe (length ≫10¿m) arrays, by silicon wet etching-based batch-process within only 1-3min, providing precisely controlled tip angles ranging from 15° to 50°. The penetration capability of the nanoscale-tip microprobes was demonstrated, using finite element modeling (FEM) simulations and penetration tests with a gelatin as tissue/cell.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122229044","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Microbial Fuel Cell based on Electrode-Exoelectrogenic Bacteria Interface 基于电极-产电细菌界面的微生物燃料电池
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805311
E. Parra, Liwei Lin
{"title":"Microbial Fuel Cell based on Electrode-Exoelectrogenic Bacteria Interface","authors":"E. Parra, Liwei Lin","doi":"10.1109/MEMSYS.2009.4805311","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805311","url":null,"abstract":"A microbial fuel cell with a microfabricated electrode and exoelectrogenic bacteria has been demonstrated. The superior compatibility of the organism's microbiology makes this approach more attractive and practical over previously micromachined microbial fuel cell designs. Both electrical performance and longevity of the device are greatly improved with continuous power output for over a week and enhanced performance over time. Using a 1mm2 anode, the fuel cell reaches and maintains 619 mV of open circuit voltage and delivers 0.12 ¿W maximum power using potassium ferricyanide at the cathode after 10 days of operation.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126050120","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 19
Electrical Discharge based Microfabrication on Electrospun Nanofibers 基于放电的电纺纳米纤维微细加工
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805443
H. Zeng, Yi Zhao
{"title":"Electrical Discharge based Microfabrication on Electrospun Nanofibers","authors":"H. Zeng, Yi Zhao","doi":"10.1109/MEMSYS.2009.4805443","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805443","url":null,"abstract":"This paper reports the use of electrical discharge for fabricating microstructures on electrospun polymer nanofibers. Microchips containing an array of conductive microelectrodes are fabricated. Electrical discharges are induced by applying high electrical voltage to these microelectrodes. The thermal energy generated by the micropatterned discharge arcs elevates the temperature in localized regions and melts polymer nanofibers in the close vicinity. Microstructures with the minimum line width as small as 20 ¿m are demonstrated. This method provides a promising start point to interface biodegradable nanofibrous materials to microstructures, which is significant for a broad array of biomedical and industrial applications.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114198039","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Supercritical Fluid Deposition (SCFD) Technique as a Novel Tool for MEMS Fabrication 超临界流体沉积(SCFD)技术作为MEMS制造的新工具
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805475
T. Momose, T. Ohkubo, T. Uejima, T. Saito, M. Sugiyama, Y. Shimogaki
{"title":"Supercritical Fluid Deposition (SCFD) Technique as a Novel Tool for MEMS Fabrication","authors":"T. Momose, T. Ohkubo, T. Uejima, T. Saito, M. Sugiyama, Y. Shimogaki","doi":"10.1109/MEMSYS.2009.4805475","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805475","url":null,"abstract":"In the present paper, supercritical fluid deposition (SCFD) process is proposed for making functional films and coatings on the surface of MEMS devices. SCFD can provide superior step coverage on to high aspect ratio features at relatively low temperature. It also provides possibility to deposit wide variety of materials, including metals, oxides, and organic compounds, with controllability of substrate selectivity. For example, pure Cu was conformally dposited onto high aspect ratio vias for ULSI interconnects with 50nm in diameter and 1¿m in depth at 220 °C. The Cu-SCFD process is a selective process, which can deposit Cu film only on conductive surface, however, non-selective deposition of Cu is also possible by using CuMnOx as a buffer layer between Cu and insulative substrate. SiO2 film was conformally fabricated in high aspect ratio trenches with 500 nm in width and 5 ¿m in depth at 200 °C. Biocompatible poly ethylene glycol monomethacrylate (PEGMA) was grafted onto the surface of micro-channel with aspect ratio of 2500 at 80 °C, and proved effective protection of protein adsorption onto SiO2 surface.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"38 12","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114245538","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A Novel Microfluidic Platform for Continuous DNA Extraction and Purification using Laminar Flow Magnetophoresis 层流磁电泳连续提取和纯化DNA的新型微流控平台
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805372
Marc Karle, J. Miwa, G. Roth, R. Zengerle, F. von Stetten
{"title":"A Novel Microfluidic Platform for Continuous DNA Extraction and Purification using Laminar Flow Magnetophoresis","authors":"Marc Karle, J. Miwa, G. Roth, R. Zengerle, F. von Stetten","doi":"10.1109/MEMSYS.2009.4805372","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805372","url":null,"abstract":"We present a novel microfluidic platform using laminar-flow magnetophoresis for combined continuous extraction and purification of DNA. All essential unit operations (DNA binding, sample washing and DNA elution) are integrated on one single chip. The key function is the motion of magnetic beads given by the interplay of laminar flow and time-varying magnetic field. The time for extraction was 1 minute. The device is a central part of a complete biochemical system for continuous monitoring of cell-growth in bioreactors. The novel platform allows continuous purification of DNA, but is also applicable to purification of RNA, proteins or cells, including their subsequent real-time analysis in general.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120997010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 19
A Directional Capacitive MEMS Microphone using Nano-Electrodeposits 纳米电沉积的定向电容式MEMS传声器
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805328
Sang-Soo Je, Jeonghwan Kim, M. Kozicki, J. Chae
{"title":"A Directional Capacitive MEMS Microphone using Nano-Electrodeposits","authors":"Sang-Soo Je, Jeonghwan Kim, M. Kozicki, J. Chae","doi":"10.1109/MEMSYS.2009.4805328","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805328","url":null,"abstract":"We present an in-situ non-volatile tuning method for adjusting MEMS microphone sensitivity using integrated nano-electrodeposits to achieve high directionality in hearing aids. Using a DC bias at room temperature, nano-electrodeposits are electrochemically formed on a Ag-Ge-Se solid electrolyte film integrated with a microphone diaphragm. The in-situ growth mechanism generates mass/stress redistribution on the diaphragm, tuning microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate the technique can achieve a tuning range of 1.67 dB (24%), corresponding to a 1.17-dB Directivity Index (DI) improvement, which is sufficient to enable acoustic directionality in high accuracy microphone arrays.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"171 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121721409","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Droplet Mixer based on Siphon-Induced Flow Discretization and Phase Shifting 基于虹吸诱导流动离散和相移的液滴混合器
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805414
R. Burger, N. Reis, J. Fonseca, J. Ducrée
{"title":"Droplet Mixer based on Siphon-Induced Flow Discretization and Phase Shifting","authors":"R. Burger, N. Reis, J. Fonseca, J. Ducrée","doi":"10.1109/MEMSYS.2009.4805414","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805414","url":null,"abstract":"We present a novel mixing principle for centrifugal microfluidic platforms. Siphon structures are designed to disrupt continuous flows in a controlled manner into a sequence of discrete droplets, displaying individual volumes as low as 60 nL. When discrete volumes of different liquids are alternately issued into a common reservoir, a striation pattern of alternating liquid layers is obtained. In this manner diffusion distances are drastically decreased and a fast and homogeneous mixing is achieved. Efficient mixing is demonstrated for a range of liquid combinations of varying fluid properties such as aqueous inks or saline solutions and human plasma. Volumes of 5 ¿L have been mixed in less than 20 s to a high mixing quality. One-step dilutions of plasma in a standard phosphate buffer solution up to 1:5 are also demonstrated.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125170550","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A Multifunctional Vertical Microsieve for Micro and Nano Particles Separation 一种用于微纳颗粒分离的多功能立式微筛
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805399
C. Shen, H. Pham, P. Sarro
{"title":"A Multifunctional Vertical Microsieve for Micro and Nano Particles Separation","authors":"C. Shen, H. Pham, P. Sarro","doi":"10.1109/MEMSYS.2009.4805399","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805399","url":null,"abstract":"This paper presents the design, fabrication and characterization of a new concept of microsieves with vertical nano-perforated walls. A new approach is applied to realize these walls accurately without sophisticated or non-conventional lithography while preserving IC-compatibility. By simply changing the deposition and etch time in the fabrication process, different pore size microsieves are fabricated. Further, by combining several walls with specific design modifications, a range of functionalities (filtration, separation, anti-choking, etc) can be integrated on one chip. Microsieves with 100 nm and 1¿m pore size are fabricated. Separation and antichoking functionalities are successfully demonstrated.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125171022","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Advancements in Technology and Design of Biomimetic Flow-Sensor Arrays 仿生流量传感器阵列技术与设计进展
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805341
C. Bruinink, R. Jaganatharaja, M. J. D. Boer, Erwin Berenschot, M. Kolster, T. Lammerink, R. Wiegerink, G. Krijnen
{"title":"Advancements in Technology and Design of Biomimetic Flow-Sensor Arrays","authors":"C. Bruinink, R. Jaganatharaja, M. J. D. Boer, Erwin Berenschot, M. Kolster, T. Lammerink, R. Wiegerink, G. Krijnen","doi":"10.1109/MEMSYS.2009.4805341","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805341","url":null,"abstract":"This paper reports on recent developments to increase the performance of biomimetic flow-sensor arrays by means of several technological advancements in the fabrication procedures and corresponding sensor design optimizations. Advancements include fabrication procedures with higher process latitude and geometrical modifications of several parts of the flow sensor. The conclusive measurements in this paper support our sensor-model predictions for a 100-fold increase in acoustic sensitivity (down to oscillating flow amplitudes in the order of 1 mm·s-1) translating to substantially higher capacitive outputs in comparison to our first-generation biomimetic flow-sensor arrays.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"150 3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122459979","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 61
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